A system may include an array of sensor elements, the array of sensor elements each comprising a first type of passive reactive element, a second type of passive reactive element electrically coupled to the array of sensor elements, a driver configured to drive the array of sensor elements and the second type of passive reactive element, and control circuitry configured to control enabling and disabling of individual sensor elements of the array of sensor elements to ensure no more than one of the array of sensor elements is enabled at a time such that when one of the array of sensor elements is enabled, the one of the array of sensor elements and the second type of passive reactive element together operate as a resonant sensor.

A wireless communication device includes a pressure sensor to generate a first signal in response to a pressure variation. A variable offset capacitor is coupled in parallel with the pressure sensor. A first analog-to-digital converter (ADC) is coupled to the variable offset capacitor and to convert the first signal to a digital signal. The pressure sensor is a capacitive pressure sensor. The variable offset capacitor is a digitally controlled variable capacitor and the ADC is a low-resolution and low-power ADC.

A MEMS photoacoustic gas sensor includes a first membrane and a second membrane opposing the first membrane and spaced apart from the first membrane by a sensing volume. The MEMS photoacoustic gas sensor includes an electromagnetic source and communication with the sensing volume to deflect the first membrane and the second membrane.

A sensor for detecting the pressure of a fluid has a sensor body having at least one first body part and one second body part. The first body part and the second body part are joined together in such a way that a first face of the first body part faces a first face of the second body part, at a distance therefrom.

The pressure sensor has a circuit arrangement, which includes at least one first electrical circuit that extends at least in part in an area corresponding to a membrane portion and is configured for detecting an elastic flexure or deformation thereof.

The first electrical circuit is associated to the first face of one of the first body part and the second body part, and the first face of the other one of the first body part and the second body part forms or has associated thereto at least one circuit element, prearranged for interacting with the first electrical circuit when an elastic flexure or deformation of the membrane portion is of a degree at least equal to a substantially predetermined limit, to generate thereby information or a warning representative of at least one from among an excessive pressure of the fluid, an incorrect pressure measurement, and an anomalous state of the device.

A sensor includes a membrane electrode, a counter-electrode, and at least one spring. The sensor can include a structure; a membrane electrode, which is deformable as a consequence of pressure and which is in contact with the structure; a counter-electrode mechanically connected to the structure and separated from the membrane electrode by a gap; and at least one spring mechanically connected to the membrane electrode and the counter-electrode, so as to exert an elastic force between the membrane electrode and the counter-electrode.

A resonant pressure sensor with improved linearity includes a substrate including a substrate-fixed portion fixed to a housing-fixed portion and a substrate-separated portion separated from the housing-fixed portion in a first direction; a first resonator disposed in the substrate-separated portion to detect a change of a resonance frequency based on a strain caused by static pressure applied by a pressure-receiving fluid interposed in a gap between the housing-fixed portion and the substrate; a first electrode extending along a second direction to output an excitation signal to the first resonator; a second electrode that extends along the second direction and from which the first resonator outputs a signal having the resonance frequency; and a processor that measures the static pressure based on the detected change.

A no-gel sensor package is disclosed. In one embodiment, the package includes a microelectromechanical system (MEMS) die having a first substrate, which in turn includes a first surface on which is formed a MEMS device. The package also includes a polymer ring with an inner wall extending between first and second oppositely facing surfaces. The first surface of the polymer ring is bonded to the first surface of the first substrate to define a first cavity in which the MEMS device is contained. A molded compound body having a second cavity that is concentric with the first cavity, enables fluid communication between the MEMS device and an environment external to the package.

A pressure sensor includes a first pressure sensing portion and a second pressure sensing portion, each including a first rigid electrode, a second rigid electrode, and a deflectable membrane structure, wherein the second rigid electrode is between the first rigid electrode and the deflectable membrane structure, and wherein the first rigid electrode, the second rigid electrode and the deflectable membrane structure are in a vertical configuration, and wherein the first and second rigid electrode of the first pressure sensing portion form a reference capacitor, and wherein the second rigid electrode and the deflectable membrane structure of the first pressure sensing portion form a sensing capacitor, and wherein the first and second rigid electrode of the second pressure sensing portion form a reference capacitor, and wherein the second rigid electrode and the deflectable membrane structure of the second pressure sensing portion form a sensing capacitor.

A pressure sensor device for a pressure sensor, in particular a capacitive pressure sensor, having a pressure chamber bounded by a movable sensing membrane and a stationary counterelectrode of the pressure sensor device. The sensing membrane and the counterelectrode each run in the longitudinal direction and the transverse direction of the pressure sensor device. The sensing membrane is directly or indirectly spring-mounted, in particular spring-mounted in two-dimensional fashion, in the pressure chamber relative to the counterelectrode by at least one micromechanical spring element, in particular a plurality of micromechanical spring elements.

A diaphragm vacuum gauge includes: a sensor chip that includes a first electrode provided on a base and a second electrode provided on a diaphragm so as to face the first electrode, the diaphragm and the base being disposed with a gap therebetween, and in which a distance between the first electrode and the second electrode changes in accordance with displacement of the diaphragm caused by pressure of a measurement target medium; an operational amplifier that converts a current output from the first electrode to a voltage and amplifies the voltage; and a coaxial cable that connects the first electrode and the operational amplifier with each other. The first electrode is connected to a virtual ground of the operational amplifier by a core wire of the coaxial cable.