A no-gel sensor package is disclosed. In one embodiment, the package includes a microelectromechanical system (MEMS) die having a first substrate, which in turn includes a first surface on which is formed a MEMS device. The package also includes a polymer ring with an inner wall extending between first and second oppositely facing surfaces. The first surface of the polymer ring is bonded to the first surface of the first substrate to define a first cavity in which the MEMS device is contained. A molded compound body having a second cavity that is concentric with the first cavity, enables fluid communication between the MEMS device and an environment external to the package.

A diaphragm vacuum gauge includes: a pressure receiving unit having an electrical property that changes in accordance with displacement of a diaphragm caused by pressure of a measurement target medium; a heater that heats the pressure receiving unit; a temperature sensor that measures a temperature of the pressure receiving unit; a pressure measurement unit that converts a change in the electrical property of the pressure receiving unit to a pressure measurement value; a storage unit that stores a plurality of heating temperature settings; a heating temperature setting unit that selects one heating temperature setting from among the plurality of heating temperature settings in accordance with a digital input signal that is externally input; and a control unit that controls power supply to the heater on the basis of the temperature measured by the temperature sensor and the heating temperature setting selected by the heating temperature setting unit.

A pressure detection element includes a substrate, first and second electrodes on the substrate, a membrane including a first diaphragm portion and a second diaphragm portion and spaced from the substrate, and a spacer between the substrate and the membrane to define a first space in which the first electrode and the first diaphragm portion are spaced from and opposed to each other and a second space in which the second electrode and the second diaphragm portion are spaced from and opposed to each other. The substrate includes a trench in a portion positioned between the first diaphragm portion and the second diaphragm portion when viewed in a direction in which the substrate and the membrane are opposed.

A pressure sensor includes a diaphragm of a thin plate shape, the diaphragm forming part of a wall surface of a pressure chamber into and out from which a measurement target fluid flows. Multiple recesses are formed in the diaphragm on a side in contact with the measurement target fluid, and an interval between adjacent two of the multiple recesses is 10 μm or less.

A pressure detector includes a first board with a first pressure inlet, a first groove, and a first board electrode; a second board with a second pressure inlet, a second groove, and a second board electrode; and a sensing unit arranged therebetween with a diaphragm. The first groove is in communication with the first pressure inlet so as to prevent the formation of a closed space between the first board and the diaphragm when they contact with each other. The second groove is in communication with the second pressure inlet so as to prevent the formation of a closed space between the second board and the diaphragm when they contact each other.

A MEMS photoacoustic gas sensor includes a first membrane and a second membrane opposing the first membrane and spaced apart from the first membrane by a sensing volume. The MEMS photoacoustic gas sensor includes an electromagnetic source and communication with the sensing volume to deflect the first membrane and the second membrane.

Aspects of the subject technology relate to a sensor device including a first cavity and a second cavity separated from the first cavity by a diaphragm. A first plate of the first cavity forms a first electrode of a capacitance. The diaphragm forms a second plate of the first cavity, which is the second electrode of the capacitance. The diaphragm is flexible and can deflect in response to an applied pressure.

Systems and methods relate to a kink or obstruction detection system for use in a minimally invasive implant, such as a disease management device. The kink or obstruction detection system can detect changes in pressure in the fluid flow path of a fluid being delivered to a patient. The kink or obstruction detection system can be included in a device between a pump and the cannula.

The present disclosure provides a transparent and highly sensitive pressure sensor with improved linearity and pressure sensitivity including: a first substrate on which a micropattern having pyramidal structures is formed; a first electrode layer coated on the micropattern of the first substrate; a second substrate stacked on the first electrode layer; and a second electrode layer stacked on the second substrate, wherein the first substrate and the second substrate show a difference in light refractive index of 10% or less in the visible light region.

The present disclosure provides an apparatus and a processing unit. The apparatus includes a first layer configured to collect pressure data and a second layer comprising a plurality of electrodes configured to sense electrical activity. The processing unit is communicatively coupled to the apparatus and completes a series of steps. The steps provide for receiving pressure data from the first layer. Based on the received pressure data, the processing unit then determines an orientation of a user. The user can be positioned on the apparatus. The processing unit then selects a subset of electrodes from the plurality of electrodes, based on the determined orientation. The processing unit then measures electrical activity at the subset of electrodes.