A system may include an array of sensor elements, the array of sensor elements each comprising a first type of passive reactive element, a second type of passive reactive element electrically coupled to the array of sensor elements, a driver configured to drive the array of sensor elements and the second type of passive reactive element, and control circuitry configured to control enabling and disabling of individual sensor elements of the array of sensor elements to ensure no more than one of the array of sensor elements is enabled at a time such that when one of the array of sensor elements is enabled, the one of the array of sensor elements and the second type of passive reactive element together operate as a resonant sensor.

The present invention relates to a differential pressure sensor for a leak detection device comprising: at least two bodies in which a cavity is created; a membrane that is arranged between the two bodies and separates said cavity so as to define a test chamber in each one of said bodies; at least one electrode arranged in each one of the test chambers and facing said membrane so as to form therewith a capacitor;
characterised in that said sensor comprises at least two seals arranged between each of said bodies and the membrane.

The invention relates to a method and to a measurement cell assembly for determining a pressure in a pressure cell (2) are given, wherein the method consists in that a measurement signal (x) is determined, which is at least proportional to a measured pressure in the pressure cell (2), and in that the measurement signal (x) is filtered by means of a first filter unit (10) having a low-pass characteristic in order to produce an output signal (y), wherein the low-pass characteristics of the first filter unit (10) is defined by means of a first damping factor (α.sub.1). The method is characterized in that an input difference (x_diff), which results from a difference between the output signal (y) and the measurement signal (x), is filtered by means of a second filter unit (20) having a low-pass characteristic to determine an output difference, wherein the low-pass characteristic of the second filter unit (20) is defined by means of a second damping factor (α.sub.2), and in that the first damping factor (α.sub.1) of the first filter unit (10) is determined on the basis of the output difference of the second filter unit (20).

A method of predicting a lifetime of a gas filling of an electrical switchgear is disclosed, wherein pressure values p.sub.1, p.sub.2 in a system of the electrical switchgear containing the gas filling at a predefined temperature T.sub.p at different points in time t.sub.1, t.sub.2 are measured. Based on the pressure difference Δp between the pressure values p.sub.1, p.sub.2 the lifetime of the gas filling is calculated. Alternatively, the pressure values p.sub.1, p.sub.2 can be taken at temperatures T.sub.1, T.sub.2 within a predefined temperature range at different points in time t.sub.1, t.sub.2.

The invention relates to a pressure sensor, forces after one to three directions, normal to the sensor plane and tangential to the sensor plane, as well as torques, the sensor being based on the variation of reactive or mixed impedances when applying normal forces or pressure and/or tangential forces or torques on the sensor structure. The sensor has a structure that includes a closed and watertight space, so that the behavior of the sensor is little or not affected by varying environmental conditions.

A micromechanical component for a pressure and inertial sensor device. The component includes a substrate having an upper substrate surface; a diaphragm having an inner diaphragm side oriented towards the upper substrate surface and an outer diaphragm side pointing away from the upper substrate surface, the inner diaphragm side bordering on an inner volume, in which a reference pressure is enclosed, and the diaphragm being able to be warped using a pressure difference between a pressure prevailing on its outer diaphragm side and the reference pressure; and a seismic mass situated in the inner volume, a sensor electrode, which projects out on the inner diaphragm side and extends into the inner volume, being displaceable with respect to the substrate due to a warping of the diaphragm. A pressure and inertial sensor device, and a method of manufacturing a micromechanical component for a pressure and inertial sensor device, are also described.

A pressure sensor (10) for a fluid circuit, in particular, of a motor vehicle, the sensor comprising: a body (12) comprising a fluid inlet (14), a fluid outlet (16) and an internal chamber (18) for connecting the inlet to the fluid outlet for the fluid flow in said body, an elastically deformable membrane (20) located in said chamber and comprising a first face (20a) intended to be in contact with the fluid flowing in the body, characterised in that it further comprises: a resonant circuit (22) of the RLC type located in said chamber and associated with a readout circuit (23) located outside the chamber (18).

Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.

To provide a pressure sensor housing that is less likely to cause temperature distribution inside a pressure sensor when the pressure sensor is disposed inside a heater block, a pressure sensor housing includes a hollow cylindrical member extending along a predetermined axis core. A pressure sensor element that detects the pressure of a fluid is accommodated inside the cylindrical member. The entire circumference of a side surface thereof is surrounded by an air layer in the first posture in which an axis core of a space is aligned with the predetermined axis core with the hollow member disposed in the space. The side surface is in contact with a wall surface defining the space at a plurality of points at the same time in a second posture, which is at least one of postures in which the predetermined axis core is eccentric with the axis core of the space.

A pressure sensor includes a micromechanical sensor element including a pressure-sensitive diaphragm, which spans a cavity in a base material and includes a diaphragm electrode. A fixed counter electrode is situated inside the cavity and, with the diaphragm electrode, forms a first measuring capacitor for detecting a first measuring pressure. A reference capacitor is situated inside the cavity and includes a first and a second fixed reference electrode. The pressure sensor is operable in a first operating mode, in which the first measuring capacitor and the first reference capacitor are interconnected in a first bridge circuit. The pressure sensor is operable in a second operating mode, in which the diaphragm electrode, the counter electrode and the reference electrodes are interconnected in such a way that the diaphragm electrode, together with the at least one first reference electrode, forms a second measuring capacitor for detecting a second measuring pressure.