An apparatus and method for measuring pressure and/or humidity, having at least one sensor for measuring pressure and/or humidity. The sensor has at least one capacitor having at least two electrodes that are arranged in a horizontal direction relative to one another along and on a flexible support material. At least one dielectric layer is arranged between the electrodes. At least one at least partially moisture-permeable and/or moisture-absorbing layer is arranged in some places on a side, facing away from a support material, of the electrode and/or the dielectric layer. The at least one electrode and/or the dielectric layer are arranged transversely between the support material and the moisture layer. In this way, a capacitance is at least partially changed by moisture hitting the dielectric layer, and a processing unit is designed and provided to measure and/or store this change, so as to create a capacitive moisture sensor.

A method for correcting a dual-capacitance pressure sensor for measuring fluid pressure, comprising: at a first time, taking measurements of fluid pressure based on movements of a first membrane and a second membrane of the pressure sensor; at a second time, taking measurements of fluid pressure based on movements of the first membrane and the second membrane; determining a change in the measurement results based on movements of the first membrane between the first point in time and the second point in time; determining a change in the measurement results based on movements of the second membrane between the first point in time and the second point in time; Checking whether the changes in the measurements determined are based solely on a change in fluid pressure or whether the changes in the measurements determined are due to changes in the pressure sensor, and if the latter is the case, determining a correction for the measurements determined at the second point in time.

An exemplary microelectromechanical device includes a MEMS layer, portions of which respond to an external force in order to measure the external force. A substrate layer is located below the MEMS layer and an anchor couples the substrate layer and MEMS layer to each other. A plurality of temperature sensors are located within the substrate layer to identify a temperature gradient being experienced by the MEMS device. Compensation is performed or operations of the MEMS device are modified based on temperature gradient.

A method of fabricating a plurality of individual microelectromechanical transducer elements includes forming a plurality of microelectromechanical transducer elements on a wafer. Each microelectromechanical transducer element has a sensitive region with a membrane and a sensing element monitoring at least one measurand and generating an electrical signal correlated with the at least one measurand, and an electrical contact outputting the electrical signal. The method includes providing, for each microelectromechanical transducer element, a sealing structure around a sensitive region and an electrical connection connected to the electrical contact. The sealing structure and the electrical connection are made out of a reflow solder material. The method includes dicing the wafer to form individual microelectromechanical transducer elements.

A pressure sensor structure includes a sensor body including a diaphragm plate that functions as a sense electrode, a base electrode that faces the diaphragm plate, and a sidewall layer maintaining a gap between the diaphragm plate and the base electrode, and a conductive guard substrate to support the sensor body. The sidewall layer includes a guard electrode layer and upper and lower electrically insulating layers to electrically insulate the guard electrode layer. An electrically insulating layer is between the guard substrate and the sensor body to electrically insulate the guard substrate. The guard substrate is electrically connected to the guard electrode layer to function as a guard electrode together with the guard electrode layer.

A pressure sensor chip includes a base, a first layer including a first cavity and joined to an upper surface of the base, a second layer joined to an upper surface of the first layer, a third layer including a second cavity and joined to an upper surface of the second layer, and a fourth layer including a third cavity and joined to an upper surface of the third layer. The second layer includes a first diaphragm between the first and second cavities. The fourth layer includes a second diaphragm between the second cavity and a space in communication with outside. A top end of the third cavity is in communication with outside. The bottom end of the third cavity is in communication with the second cavity. The first cavity is sealed. The pressure in the first cavity is lower than the pressure in the second cavity.

A micro pressure sensor includes a body having a compartmentalized chamber provided by membranes anchored between opposing walls of the body and carrying electrodes disposed on surfaces of the membranes. The body has a first pair of opposing walls and a second pair of opposing walls orthogonal to the first pair that define a chamber, a plurality of membranes having a correspond electrode layer over a surface, the plurality of membranes disposed in the chamber, anchored between the first pair of opposing walls of the body to provide plural compartments, a first set of ports coupled to a first set of the plural compartments, the first set of ports disposed in corresponding portions of a first one of the first pair of opposing walls of the body, with a second one of the first pair of opposing walls of the body being a solid portion of the body; and a second set of ports coupled to a second different set of the plural compartments, the second set of ports disposed in corresponding portions of the second one of the first pair of opposing walls of the body, with the first one of the first pair of walls of the body being a solid portion of the body.

The present invention provides a tactual sensor using a micro liquid metal droplet simultaneously having high sensitivity and good spatial resolution. A tactual sensor using a micro liquid metal droplet according to an exemplary embodiment of the present invention includes: a first film having a first electrode layer; a second film having a second electrode layer facing toward the first electrode layer; an insulating layer provided on the second film while covering the second electrode layer; and a main body disposed between the first electrode layer and the insulating layer to form a chamber corresponding to the first electrode layer and the second electrode layer and accommodating a micro liquid metal droplet in the chamber.

Aspects of the present disclosure are directed to pressure sensing. As may be implemented in accordance with one or more embodiments, an external energy field is applied to a resonant circuit having inductive conductors separated by a compressible dielectric, for wirelessly detecting pressure. Specifically, the resonant circuit is responsive to the energy field and applied pressures by operating in respective states exhibiting different resonant frequencies that are based upon pressure-related compression of the compressible dielectric. These resonant frequencies, or a change in the resonant frequencies, can be used as an indication of the pressure.

The present invention relates to an artificial bladder system having a double space divided by a partition wall and a wireless, non-powered urine fullness sensor using an RFID technology, which provides an artificial bladder system comprising: an outer wall that forms the outer shape of the artificial bladder, is inserted into the body, and has an inner space; a partition wall, wherein both ends are fixed to the inside of the outer wall, the inner space of the outer wall is divided into a double space of a urine reservoir and a working fluid space, and it is deformable according to amounts of the urine and the working fluid; and a urine fullness sensor installed in the working fluid space and sensing a urine fullness degree based on the deformation of the partition wall.