A MEMS switch is actuatable by a fluid, and includes a piezoelectric pressure sensor that detects the movement of a fluid generating a negative pressure. The piezoelectric pressure sensor is formed by a chip of semiconductor material having a through cavity and a sensitive membrane, which extends over the through cavity and has a first and a second surface. The piezoelectric pressure sensor is mounted on a face of a board having a through hole so that the through cavity overlies and is in fluid connection with the through hole. The board has a fixing structure, which enables securing in an opening of a partition wall separating a first and a second space from each other. The board is arranged so that the first surface of the sensitive membrane faces the first space, and the second surface of the sensitive membrane faces the second space.

A textile with an electrically conductive first side and an electrically conductive second side where the two sides are separated by an electrically insulating part of the textile and where the electrically conductivity is provided by a graphene coating on the respective sides and where a capacitance can be formed between the respective conductive sides.

A base for supporting a piezoelectric sensor comprising: a generally planar support frame having an upper side, a lower side, and an opening defined between the upper side and lower side; and a housing mounted in the opening, the housing including an upper portion and a lower portion, the upper portion including a sensor disposed therein and the lower portion includes a biasing member in contact with the sensor, wherein the sensor is biased by the biasing force of the biasing member against the upper portion of the housing, whereby the upper portion is in turn biased by the biasing force against a floor of a cage positioned on the upper side of the support frame.

A differential pressure sensor for determining a differential pressure value, comprising: a differential pressure measuring transducer having a measuring membrane; a membrane seal having a membrane seal body including a pressure chamber filled with a transmission fluid in which a filling body having a recess is arranged, wherein the differential pressure measuring transducer arranged in the recess, wherein a first pressure is applied to the differential pressure measuring transducer on a first measuring membrane side and a second pressure is applied to a second measuring membrane side such that deformation of the measuring membrane represents a differential pressure value between the first pressure and the second pressure, wherein a piezoelectric layer for determining an absolute pressure value of the first pressure is provided inside the pressure chamber.

A pressure sensor die especially suitable for high-temperature, high-pressure operating environment and delivering accurate and reliable pressure measurement at low cost. A single crystalline silicon includes a cap, a substrate and a base connected together. A recess formed on the cap creates an upper sealed cavity with the substrate. A silicon oxide layer is formed between the substrate and the cap. A recess formed on the base creates a lower sealed cavity with the substrate. The upper sealed cavity and the lower sealed cavity overlap in their projections. The substrate includes at least two sets of piezoresistive sensing elements located within the overlapping projections, perpendicular to each other, and oriented in different crystallographic directions.

A textile with an electrically conductive first side and an electrically conductive second side where the two sides are separated by an electrically insulating part of the textile and where the electrically conductivity is provided by a graphene coating on the respective sides and where a capacitance can be formed between the respective conductive sides.

Targeted antimicrobials are described and related, compositions, methods and systems.

A micromechanical component having at least one electromechanical flexible structure, each of which includes a first piezoelectric layer, a first outer electrode situated on a first side of the first piezoelectric layer, a first intermediate electrode situated on a second side, oriented away from the first side, of the first piezoelectric layer, a second piezoelectric layer situated on a side of the first intermediate electrode oriented away from the first piezoelectric layer, and a second outer electrode situated on a side of the second piezoelectric layer oriented away from the first intermediate electrode, the at least one electromechanical flexible structure having in each case a second intermediate electrode that is situated on the side of the first intermediate electrode oriented away from the first piezoelectric layer, between the second piezoelectric layer and the first intermediate electrode.

A pressure sensor of the present disclosure includes a laminated piezoelectric device including a stacked body in which piezoelectric layers and internal electrodes are alternately laminated; and a case which encloses the laminated piezoelectric device, the case including a case main body and a first projection protruding inwardly from the case main body, the first projection including an end face which abuts on an end face in a stacking direction of the stacked body, and is located inside an outer periphery of the end face of the stacked body.

A vacuum gauge includes an introduction tube, a diaphragm displaced by a gas to be measured that is introduced from the introduction tube, a piezoelectric element that has one end coupled to the diaphragm and is displaced along with the diaphragm, an inner structure to which a circumferential edge of the diaphragm and the other end of the piezoelectric element are secured and that is coupled to the introduction tube, and an airtight container to airtightly enclose the introduction tube and the inner structure. The inner structure, the introduction tube, and the diaphragm airtightly partition a space in the airtight container into a pressure introduction chamber to which the gas to be measured is introduced on one surface side of the diaphragm, and a reference pressure chamber on the other surface side of the diaphragm. the reference pressure chamber being set at a high vacuum that is lower than the pressure lower limit of the measurement gas.