A method for producing a pressure sensor device. The method includes providing a vessel that includes a cavity having side walls, the cavity including a floor and the side walls each including an upper side, which face away from the floor; providing a pressure sensor and situating the pressure sensor in the cavity and on the floor; filling the cavity with an oil so that the oil fills the cavity up to the upper sides of the side walls; applying a membrane onto the surface of the oil that completely covers the oil, and at least in some regions onto the upper sides of the side walls so that the membrane covers, circumferentially around the cavity, those regions of the upper sides of the side walls that lie against the oil, the membrane including a liquid material when applied onto the oil; and curing the liquid material of the membrane.

A method for producing a pressure sensor device. The method includes providing a vessel that includes a cavity having side walls, the cavity including a floor and the side walls each including an upper side, which face away from the floor; providing a pressure sensor and situating the pressure sensor in the cavity and on the floor; filling the cavity with an oil so that the oil fills the cavity up to the upper sides of the side walls; applying a membrane onto the surface of the oil that completely covers the oil, and at least in some regions onto the upper sides of the side walls so that the membrane covers, circumferentially around the cavity, those regions of the upper sides of the side walls that lie against the oil, the membrane including a liquid material when applied onto the oil; and curing the liquid material of the membrane.

A capacitive force sensor 101 of the present invention includes a plurality of cells each including a lower electrode 104, a movable member that includes an upper electrode 107 and has flexibility, and a support 105b arranged to movably support the movable member and to form a gap 106 between the upper and the lower electrodes. The plural cells are grouped into elements each including one or more of the cells, and the one or more cells in a same element are electrically connected to each other.

A capacitive force sensor 101 of the present invention includes a plurality of cells each including a lower electrode 104, a movable member that includes an upper electrode 107 and has flexibility, and a support 105b arranged to movably support the movable member and to form a gap 106 between the upper and the lower electrodes. The plural cells are grouped into elements each including one or more of the cells, and the one or more cells in a same element are electrically connected to each other.