G01L9/06

SENSOR APPARATUS AND METHOD OF MAKING SAME

A sensor apparatus includes at least one substrate layer of an elastically deformable material, the substrate layer extending longitudinally between spaced apart ends thereof. A conductive layer is attached to and extends longitudinally between the spaced apart ends of the at least one substrate layer. The conductive layer includes an electrically conductive material adapted to form a strain gauge having an electrical resistance that varies based on deformation of the conductive layer in at least one direction.

Verification of correct operation of a physical parameter sensor
11630015 · 2023-04-18 · ·

Apparatus and associated methods relate to sensing a physical parameter and verifying correct operation of a system used to sense the physical parameter. A sensing device includes four resistive elements configured in a Wheatstone bridge configuration is configured to sense the physical parameter. A biasing network selectively provides first and second biasing conditions to the sensing device. First and second output electrical signals are generated by the sensing device in response to the first and second biasing conditions, respectively, selectively provided to the sensing device. The first and second output electrical signals are each indicative of the parameter value of the physical parameter, but not necessarily equal to one another. A verification module verifies correct operation of the system based on a consistency determination of first and second output electrical signals.

Pressure measuring apparatus for measuring a discharge pressure of a liquid discharged onto a wafer

A pressure measuring apparatus for measuring a jetting pressure of a liquid jetted from a nozzle includes a plate including: a first surface facing the nozzle; and a second surface opposite to the first surface; a pressure sensor configured to detect a discharge position and the discharge pressure at the discharge position of the liquid and generate a signal based on the discharge pressure; and electrical components including a controller configured to receive the signal and collect data regarding the discharge pressure. The pressure sensor is provided on the first surface of the plate and the electrical components are provided on the second surface of the plate.

PRESSURE SENSOR WITH TRIM RESISTORS
20230160767 · 2023-05-25 ·

A pressure sensor includes a Wheatstone bridge circuit including a first resistor, a second resistor, a third resistor, and a fourth resistor having matching output characteristics. The pressure sensor further includes a first trim resistor in series with the Wheatstone bridge circuit, wherein the first trim resistor has output characteristics matching the output characteristics of the first resistor, the second resistor, the third resistor, and the fourth resistor of the Wheatstone bridge. The pressure sensor additionally includes a second trim resistor in parallel or a parallel loop with the Wheatstone bridge circuit, wherein the second trim resistor has output characteristics matching the output characteristics of the first resistor, the second resistor, the third resistor, and the fourth resistor of the Wheatstone bridge.

PRESSURE SENSOR WITH TRIM RESISTORS
20230160767 · 2023-05-25 ·

A pressure sensor includes a Wheatstone bridge circuit including a first resistor, a second resistor, a third resistor, and a fourth resistor having matching output characteristics. The pressure sensor further includes a first trim resistor in series with the Wheatstone bridge circuit, wherein the first trim resistor has output characteristics matching the output characteristics of the first resistor, the second resistor, the third resistor, and the fourth resistor of the Wheatstone bridge. The pressure sensor additionally includes a second trim resistor in parallel or a parallel loop with the Wheatstone bridge circuit, wherein the second trim resistor has output characteristics matching the output characteristics of the first resistor, the second resistor, the third resistor, and the fourth resistor of the Wheatstone bridge.

SENSOR APPARATUS AND METHOD OF MAKING SAME

A sensor apparatus includes at least one substrate layer of an elastically deformable material, the substrate layer extending longitudinally between spaced apart ends thereof. A conductive layer is attached to and extends longitudinally between the spaced apart ends of the at least one substrate layer. The conductive layer includes an electrically conductive material adapted to form a strain gauge having an electrical resistance that varies based on deformation of the conductive layer in at least one direction.

SENSOR APPARATUS AND METHOD OF MAKING SAME

A sensor apparatus includes at least one substrate layer of an elastically deformable material, the substrate layer extending longitudinally between spaced apart ends thereof. A conductive layer is attached to and extends longitudinally between the spaced apart ends of the at least one substrate layer. The conductive layer includes an electrically conductive material adapted to form a strain gauge having an electrical resistance that varies based on deformation of the conductive layer in at least one direction.

Mask adhesion determination device

A mask fitting level determination device includes a mask inner pressure detection unit inserted between a mask covering a mouth, nose and a face surface of a person to measure a pressure inside the mask. A circuit control unit derives information of a pressure value measured by the mask inner pressure detection unit and generates display information for the person wearing the mask. A determination display unit shows the person the display information generated by the circuit control unit. A battery unit supplies electricity to the circuit control unit and the determination display unit. A power supply switch starts and stops the supply of the electricity to the circuit control unit and the determination display unit. A start switch starts the mask inner pressure detection operation.

Mask adhesion determination device

A mask fitting level determination device includes a mask inner pressure detection unit inserted between a mask covering a mouth, nose and a face surface of a person to measure a pressure inside the mask. A circuit control unit derives information of a pressure value measured by the mask inner pressure detection unit and generates display information for the person wearing the mask. A determination display unit shows the person the display information generated by the circuit control unit. A battery unit supplies electricity to the circuit control unit and the determination display unit. A power supply switch starts and stops the supply of the electricity to the circuit control unit and the determination display unit. A start switch starts the mask inner pressure detection operation.

3D stacked piezoresistive pressure sensor

In a microelectromechanical system (MEMS) pressure sensor, thin and fragile bond wires that are used in the prior art to connect a MEMS pressure sensing element to an application specific integrated circuit (ASIC) for the input and output signals between these two chips are replaced by stacking the ASIC on the MEMS pressure sensing element and connecting each other using conductive vias formed in the ASIC. Gel used to protect the bond wires, ASIC and MEMS pressure sensing element can be eliminated if bond wires are no longer used. Stacking the ASIC on the MEMS pressure sensing element and connecting them using conductive vias enables a reduction in the size and cost of a housing in which the devices are placed and protected.