In a microelectromechanical system (MEMS) pressure sensor, thin and fragile bond wires that are used in the prior art to connect a MEMS pressure sensing element to an application specific integrated circuit (ASIC) for the input and output signals between these two chips are replaced by stacking the ASIC on the MEMS pressure sensing element and connecting each other using conductive vias formed in the ASIC. Gel used to protect the bond wires, ASIC and MEMS pressure sensing element can be eliminated if bond wires are no longer used. Stacking the ASIC on the MEMS pressure sensing element and connecting them using conductive vias enables a reduction in the size and cost of a housing in which the devices are placed and protected.

Electrical and mechanical noise in a microelectromechanical system (MEMS) pressure sensor are reduced by the symmetrical distribution of bond pads, conductive vias and interconnects and by the elimination of bond wires used in the prior art to connect a MEMS pressure sensing element to an application specific integrated circuit (ASIC). The bond wires are eliminated by using conductive vias to connect an ASIC to a MEMS pressure sensing element. Extraneous electrical noise is suppressed by conductive rings that surround output signal bond pads and a conductive loop that surrounds the conductive rings and bond pads. The conductive rings and loop are connected to a fixed voltage or ground potential.

Pressure measurement apparatus, assemblies and methods are described. According to one aspect, a pressure sensor assembly includes a substrate, a first adhesive member adhered to the substrate, a sensor support adhered to the first adhesive member, a second adhesive member adhered to the sensor support, and a pressure sensor adhered to the second adhesive member and aligned with apertures of the substrate, first adhesive member, and second adhesive member, and the pressure sensor is configured to vary an output signal as a result of changes in pressure of a received air stream, and the output signal is indicative of the changes in pressure of the air stream.

A controller configured for detecting a disturbance using a comparison of outputs of at least two sensors and for determining a pressure from the outputs of the at least two sensors. A ratio of the measurement sensitivity and the disturbance sensitivity should be different for the at least two sensors. A method for monitoring disturbances of a sensor assembly includes comparing the outputs of the at least two sensors. The controller and related method provide, while requiring only two sensors, a redundant system that is also able to detect excessive disturbances on a sensor assembly.

A system and method of analyzing duct pressure within a pipe monitors and detects vacuum pressure of gases. The system includes a pressure monitor and a target duct. The pressure monitor preferably includes an alarm light, a speaker, a sensing light, a service light, and a battery alert. The method begins by periodically capturing a plurality of pressure readings inside the target duct with the pressure monitor. Each pressure reading is timestamped with the pressure monitor. Each pressure reading is compared to each situational alert with the pressure monitor to identify at least one matching alert for at least one specific reading. The matching alert is from the plurality of situational alerts. The specific reading is from the plurality of pressure readings. The matching alert is visually and/or audibly outputted with the pressure monitor, if the matching alert is identified for the specific reading.

A system and method of analyzing duct pressure within a pipe monitors and detects vacuum pressure of gases. The system includes a pressure monitor and a target duct. The pressure monitor preferably includes an alarm light, a speaker, a sensing light, a service light, and a battery alert. The method begins by periodically capturing a plurality of pressure readings inside the target duct with the pressure monitor. Each pressure reading is timestamped with the pressure monitor. Each pressure reading is compared to each situational alert with the pressure monitor to identify at least one matching alert for at least one specific reading. The matching alert is from the plurality of situational alerts. The specific reading is from the plurality of pressure readings. The matching alert is visually and/or audibly outputted with the pressure monitor, if the matching alert is identified for the specific reading.

An object of the present invention is to realize a pressure sensor with a small variation in sensor characteristics. The pressure sensor includes a diaphragm having longitudinal and lateral sides, and four strain gauges disposed on the diaphragm. The four strain gauges are arranged at a center of the diaphragm. Two of the four strain gauges are arranged along a lateral direction, and other two strain gauges are arranged along a longitudinal direction.

A sensor device is disclosed comprising at least one deformable substrate, at least one transducer element formed in or on a surface area of a first side of the deformable substrate, at least one other transducer element formed in or on a surface area of a second side of the deformable substrate, and electrical conductors formed on and/or in the substrate for electrically connecting between and to the transducer elements.

A sensor device is disclosed comprising at least one deformable substrate, at least one transducer element formed in or on a surface area of a first side of the deformable substrate, at least one other transducer element formed in or on a surface area of a second side of the deformable substrate, and electrical conductors formed on and/or in the substrate for electrically connecting between and to the transducer elements.

A system is for detecting a location of a touch input on a surface of a propagating medium. The system includes a transmitter coupled to the propagating medium and configured to emit a signal. The signal has been allowed to propagate through the propagating medium and the location of the touch input on the surface of the propagating medium is detected at least in part by detecting an effect of the touch input on the signal that has been allowed to propagate through the propagating medium. The system includes a piezoresistive sensor coupled to the propagating medium. The piezoresistive sensor is configured to at least detect a force, pressure, or applied strain of the touch input on the propagating medium.