A cylindrical quartz crystal transducer that exhibits a low probability of twinning, and uses a combination of resonator signal inputs at the B-mode and C-mode frequencies to calculate resonator temperature. Crystallographic orientations are disclosed where combinations of B-mode and C-mode resonant frequencies exist that are sufficiently independent of pressure to enable accurate calculation of temperature under transient conditions. Such a transducer is usable at higher pressures and temperatures than conventional quartz pressure transducers. Furthermore, because the structure allows a choice of crystallographic orientation, other characteristics of the transducer, such as increased pressure sensitivity and activity dip-free operation, may be optimized by varying crystallographic orientation.

According to various embodiments, a dynamic pressure sensor includes a substrate, a reference volume formed in the substrate, a deflectable membrane sealing the reference volume, a deflection sensing element coupled to the membrane and configured to measure a deflection of the membrane, and a ventilation hole configured to equalize an absolute pressure inside the reference volume with an absolute ambient pressure outside the reference volume.

Certain implementations of the disclosed technology may include systems, methods, and apparatus for a sealed transducer with an adjustment port. The sealed transducer may include one or more terminals. A first terminal may include electrical connections for connecting to an input voltage source, a ground, and for providing a transducer output signal. A second terminal, for example, may include an electrical port for connecting to an external and separately sealed adjustment network. In one example implementation, the adjustment network can include one or more components configured to couple with internal circuitry of the transducer to alter a response of the transducer.

Downhole distributed pressure sensor arrays include sensor housings each comprising at least one pressure sensor in a pressure housing. Downhole pressure sensors include a housing, at least one pressure sensor in a pressure housing portion of the housing, and at least one isolation element positioned at an outer wall of the housing.

A sensor element for a pressure sensor, includes a sensor membrane on which a defined number of piezoresistors are situated, the piezoresistors being configured in a circuit in such a way that, when there is a change in pressure an electrical change in voltage can be generated; at least two temperature measuring elements configured in relation to the sensor membrane in such a way that temperatures of the sensor membrane at positions of the piezoresistors can be measured using the temperature measuring elements, an electrical voltage present at the circuit of the piezoresistors due to a temperature gradient being capable of being compensated computationally using the measured temperatures.

Resonating sensors for use in high-pressure and high-temperature environments are provided. In one embodiment, an apparatus includes a sensor with a double-ended tuning fork piezoelectric resonator that includes a first tine and a second tine. These tines are spaced apart from one another so as to form a slot between the first and second tines. The width of the slot from the first tine to the second tine varies along the lengths of the first and second tines. Various other resonators, devices, systems, and methods are also disclosed.

A pressure sensor includes a semiconductor substrate having a diaphragm that flexurally deforms by pressurization, a sensor part provided in the diaphragm, an insulating layer provided on the diaphragm, a conducting layer provided on the insulating layer, and a drive circuit that supplies a predetermined potential so that the drive voltage may be applied to the sensor part, wherein the conducting layer is set at a same potential as the predetermined potential or a potential larger than the predetermined potential.

An electronic device may include a beam layer, a piezoelectric material layer coupled to the beam layer, and a temperature sensor adjacent the piezoelectric material layer. The electronic device may also include drive circuitry coupled to the piezoelectric material layer and configured to drive the piezoelectric material layer with a low frequency drive signal for actuating the piezoelectric material layer, and a high frequency drive signal for sensing a pressure applied to the piezoelectric material layer. The high frequency drive signal may have a higher frequency than the low frequency drive signal. The electronic device may also include readout circuitry coupled to the piezoelectric material layer and configured to generate a sensed pressure value based upon the high frequency drive signal. Temperature compensation circuitry may cooperate with the readout circuitry to compensate the sensed pressure value based upon the temperature sensor.

A pressure sensor includes a diaphragm, a coupling portion coupled to the diaphragm, and two pressure receiving elements. Each pressure receiving element outputs an output signal that changes according to the temperature and the pressure applied to a pressure receiving surface and has an output characteristic that represents the relationship of the output signal to the pressure and the temperature. The two pressure receiving elements have the same output characteristics. The pressure receiving surface of one of the two pressure receiving elements is connected to the diaphragm through the coupling portion, and the pressure receiving surface of the other pressure receiving element is disconnected from the diaphragm. The pressure sensor outputs a signal that is in accordance with the difference between voltages of the two pressure receiving elements.

Certain implementations of the disclosed technology may include systems, methods, and apparatus for a sealed transducer with an adjustment port. The sealed transducer may include one or more terminals. A first terminal may include electrical connections for connecting to an input voltage source, a ground, and for providing a transducer output signal. A second terminal, for example, may include an electrical port for connecting to an external and separately sealed adjustment network. In one example implementation, the adjustment network can include one or more components configured to couple with internal circuitry of the transducer to alter a response of the sensor.