In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an environmental condition, and wherein the sensor is configured to measure a capacitance between the base electrode and the first membrane electrode. The system further includes a first device of the system configured to generate electrical interference signals, a first electrically conductive shield layer positioned between the sensor and the first device of the system, wherein the first electrically conductive shield layer defines a plurality of first apertures extending through the first electrically conductive shield layer and a dielectric material disposed in the plurality of first apertures.

A high accuracy capacitive pressure transducer capable of performing measurements at a fixed temperature, with stability better than ±2 mK, in the temperature range of 15° C.-30° C. and which does not require the use of correction for thermal transpiration effect. The pressure transducer includes a vacuum gauge having a pressure sensor and a pressure sensor sheath, a temperature control unit secured in a cap; an aluminum block having a lower surface in contact with the pressure sensor sheath and an upper surface in contact with a main plate; and a temperature sensor located between the main plate and the upper surface of the aluminum block. The vacuum gauge is connected to a vacuum system by means of a connecting pipe.

A remote seal system includes a remote diaphragm having a first side configured to be exposed to a process fluid. A conduit is coupled to the remote diaphragm and includes a fill fluid in fluidic communication with a second side of the remote diaphragm. A temperature sensor is thermally coupled to the conduit and configured to sense a temperature of the fill fluid. In one alternative example, a remote sensing assembly includes a flexible elongate conduit having a first end coupled to a remote diaphragm in fluidic communication with a process fluid and a second end extending a length from the first end to a process fluid pressure transmitter. A substantially incompressible fill fluid is disposed within the flexible elongate conduit. The process fluid pressure transmitter is configured to generate an output value indicative of pressure in the process fluid based on a corresponding pressure in the fill fluid. A temperature detector is coupled to the flexible elongate conduit and is configured to provide a signal indicative of an average temperature of the fill fluid along the flexible elongate conduit. A compensation system calculates a thermal expansion value based on the average temperature and adjusts the pressure signal based on the thermal expansion value.

A transmitter for measuring a process pressure includes a pressure sensor and a temperature sensor providing an input temperature signal. A first remote pressure sensitive diaphragm couples to the transmitter by a first capillary tube filled with a fill fluid having a density as a function of fill fluid temperature. An input circuit is operably connected to at least the pressure sensor and provides an intermediate pressure signal at least roughly representative of the process pressure. A correcting circuit is coupled to the temperature sensor and to the input circuit. The correcting circuit processes the intermediate pressure signal by compensating for the fill fluid density as a function of the temperature and provides a compensated output more closely representative of the process pressure. The correction circuit further performs an initial height determination based upon a pressure measurement made while no pressure is applied to the first diaphragm.

A sensor carrier having a main plane of extension, a first side parallel to the main plane of extension, a second side parallel to the main plane of extension, which is situated opposite the first side, and at least one electrical contact surface situated on the second side. At least one stress-measuring structure is embedded in the sensor carrier. A sensor module having such a sensor carrier as well as to a component having a sensor module having such a sensor carrier, are also described. A method for calibrating a sensor module and a method for operating a sensor module are also described.

A sensor circuit and a method for compensating for temperature changes are provided. In accordance with an embodiment, sensor circuit includes at least one sensor for determining a measurement variable; a heating structure; and at least one compensation circuit. The compensation circuit is configured to acquire information about a temperature change in an environment of the sensor, and to counteract a temperature change in the sensor on the basis of the information by driving the heating structure.

According to one embodiment, a pressure sensor is disclosed. The pressure sensor includes a substrate, and a first capacitor element. The first capacitor element includes a lower electrode provided on the substrate, an upper electrode disposed above the lower electrode, and a film provided over the lower electrode and upper electrode. The lower electrode and the upper electrode are between the substrate and the film. An absolute value of an amount of change in an electrostatic capacitance between the lower electrode and the upper electrode with respect to unit change in an ambient temperature of the first capacitor element is substantially zero.

A remote seal system includes a remote diaphragm having a first side configured to be exposed to a process fluid. A conduit is coupled to the remote diaphragm and includes a fill fluid in fluidic communication with a second side of the remote diaphragm. A temperature sensor is thermally coupled to the conduit and configured to sense a temperature of the fill fluid. In one alternative example, a remote sensing assembly includes a flexible elongate conduit having a first end coupled to a remote diaphragm in fluidic communication with a process fluid and a second end extending a length from the first end to a process fluid pressure transmitter. A substantially incompressible fill fluid is disposed within the flexible elongate conduit. The process fluid pressure transmitter is configured to generate an output value indicative of pressure in the process fluid based on a corresponding pressure in the fill fluid. A temperature detector is coupled to the flexible elongate conduit and is configured to provide a signal indicative of an average temperature of the fill fluid along the flexible elongate conduit. A compensation system calculates a thermal expansion value based on the average temperature and adjusts the pressure signal based on the thermal expansion value.

A variable capacitance type pressure sensor is constructed by only using semi-conductor industry accepted metals and materials in the wetted surface. PCTFE or PTFE by injection molding or compression molding is used to join components together and provide sealing and electrical isolation. No oil filling is needed. The sensor can measure both differential pressure and line pressure. Implanted temperature sensor is used to do thermal calibration and temperature compensation.

A base plate has pressure introducing holes at positions facing a diaphragm support portion. A thickness portion (thick portion) of the diaphragm support portion and a sensor base joined to the diaphragm support portion thus serves as a heat dissipating or absorbing portion and hinders the transfer of thermal energy of a measured medium to a sensor diaphragm.