An apparatus for measuring a pressure of a corrosive or high temperature process liquid includes a pressure sensor in communication with the process liquid via a vertical tube. A buffer gas injected into the vertical tube forms a liquid/gas interface at a desired height. The buffer gas supply is then either isolated or regulated so as to cause the buffer gas pressure within the vertical tube to remain equal with the process liquid pressure. The pressure sensor indirectly measures the process liquid pressure by measuring the buffer gas pressure within the vertical tube, while remaining chemically and thermally protected from the process liquid. In embodiments, pressure measurements from a pair of gas buffered pressure sensors located upstream and downstream of a valve are combined with measurements of the process liquid temperature to determine a flow rate of the process liquid through the valve.

The present invention relates to a differential pressure sensor. The differential pressure sensor includes: a housing including a body and a cover, the housing having a first chamber and a second chamber defined in the housing and separated from each other; a first pressure channel communicating with the first chamber; a second pressure channel communicating with the second chamber; a substrate on which an electronic component is mounted and in which a terminal is formed, the substrate including a first surface facing the first chamber and a second surface extending parallel to the first surface and facing the second chamber, the substrate configured to cover the second chamber; a sensor element installed on the first surface of the substrate so as to generate an electric signal corresponding to a pressure difference between the first chamber and the second chamber; a lead frame installed in the housing with one end thereof extending into the first chamber, the lead frame configured to transmit the electric signal of the sensor element to an external device; a conductive wire configured to connect the terminal of the substrate and the lead frame so as to transmit the electric signal of the sensor element to the lead frame; a first sealing member disposed in a region where the body and the cover make contact with each other, the first sealing member configured to seal the first chamber with respect to the outside; and a second sealing member disposed in a region where the substrate and the body make contact with each other, the second sealing member configured to seal the second chamber with respect to the first chamber.

A method, device and system for a gage pressure transducer including the making thereof are provided. In one embodiment, a method includes receiving, at a first diaphragm, a first pressure, wherein the first diaphragm is composed of metal; transferring, from the first diaphragm, to a first sensor, the first pressure using a first oil region, wherein the first oil region is disposed between the first diaphragm and the first sensor; receiving, at the first sensor, the first pressure; measuring, by the first sensor, the first pressure to generate a first pressure signal; and outputting, from the first sensor, to a first header pin, the first pressure signal, wherein the first header pin is electrically coupled to the first sensor using a first conductive glass frit.

A differential pressure sensor includes: a sensor module including: a sensor case including a port through which a target fluid is to be introduced and a base attached with the port; a sensor configured to detect a physical quantity of the target fluid; a sensor substrate attached with the sensor, the sensor substrate having an outer circumferential surface facing an inner circumferential surface of the base; and a cover configured to press the sensor substrate against the base; and a case body including an electric circuit that is housed therein and electrically connectable to the sensor module, the case body having an open end to which the sensor module is externally attached, in which a sensor module clearance is defined between the outer circumferential surface of the sensor substrate and an inner circumferential surface of the sensor case.

A sensor system for sensing pressure of a first fluid (e.g. a liquid and/or gas) comprises an optical sensing fiber that is configured for sensing pressure, and at least one sensor housing embedding the optical sensing fiber. The sensor housing is filled with a second fluid. The sensor housing comprises a non-hermetic pressure transfer medium comprised in the sensor system and positioned in the sensor housing such that a pressure of the first fluid can be transferred via the pressure transfer medium onto the second fluid towards the optical sensing fiber for determining based thereon a pressure of the first fluid.

This invention relates to a device for measuring differential pressure comprising a first pressure measurement means (11) measuring a first pressure value (P1) and a second pressure measurement means (12) measuring a second pressure value (P2), the second pressure measurement means (12) being configured to read the pressure (P1) measured by the first pressure measurement means (11), calculate the pressure difference between the pressure (P1) measured by the first pressure measurement means (11) and the pressure (P2) measured by the second pressure measurement means (12), and transmit the differential pressure value in the form of a single signal. The first pressure measurement means (11) is of the analogue or digital type and the second pressure measurement means (12) is of the digital type and the value of the differential pressure transmitted is in the form of a single digital signal.

A micromechanical pressure sensor system, including: a substrate; a pressure sensor component connected to the substrate; and an essentially hollow frustum-shaped sleeve structure, which is connected to the substrate, which surrounds the pressure sensor component at least laterally and which has an opening at a side of the sleeve structure facing away from the substrate.

A pressure sensor module detects a fluid pressure on the basis of a differential pressure between a reference pressure and the fluid pressure, and includes: a housing; a sensor element that can contact each of the reference pressure and the fluid pressure; a support member that supports the sensor element and is held in the housing; a first pressure passage that guides the fluid pressure to a first contact surface of the sensor element; and a second pressure passage that is sealed from the first pressure passage and guides the reference pressure to a second contact surface of the sensor element.

A corrosion resistant apparatus for an air data probe with a sleeve being cylindrical in shape with a first end and a second end, at least one circumferentially extending groove on an outside of the sleeve configured to accommodate coils of a heater, and a bore at a center of the sleeve and extending between the first end and the second end configured to provide a pneumatic pathway that allows atmospheric conditions to reach measurement equipment of the air data probe.

A pressure sensor system having at least one pressure sensor device. The pressure sensor device has a stack having a ceramic substrate, at least one signal processing element, and at least one sensor element. The pressure sensor device is placed in a sensor housing provided with a membrane, and a residual volume of the sensor housing provided with the membrane is filled with an incompressible fluid. A method for producing such a pressure sensor system, and to a measuring device, are also described.