The present invention discloses an MEMS pressure sensing element, including a substrate provided with a groove; a pressure-sensitive film disposed above the substrate, the pressure-sensitive film sealing an opening of the groove to form a sealed cavity; and a movable electrode plate and a fixed electrode plate which are located in the sealed cavity and form a capacitor structure, wherein the fixed electrode plate is fixed on a bottom wall of the groove of the substrate, and the movable electrode plate is suspended above the fixed electrode plate and opposite to the fixed electrode plate; and the pressure-sensitive film is connected to the movable electrode plate so as to drive the movable electrode plate to move under the action of an external pressure. According to the MEMS pressure sensing element, pressure sensitivity and electrical detection are separated, the pressure-sensitive film is exposed in air, the capacitor structures are disposed in the sealed cavity defined by the pressure-sensitive film and the substrate, and the movable electrode plates of the capacitor structures can be driven by the pressure-sensitive film. In this way, not only is a pressure-sensitive function finished, but also external electromagnetic interferences on the capacitor structures are shielded.

In order to eliminate influence of a noise voltage applied to a diaphragm of a capacitance type sensor, the capacitance type sensor includes: a detection capacitor formed of a diaphragm and a fixed electrode, the diaphragm being connected to a frame and deformed by receiving an external force; and a fixed capacitor connected in series with the detection capacitor, so that it is intended to detect a divided voltage applied to the detection capacitor by applying a voltage to the detection capacitor and the fixed capacitor, and further includes: a noise voltage generating part connected to the frame and adapted to generate a noise voltage caused in the frame; a noise voltage adding part adapted to add the noise voltage to the voltage applied to each of the capacitors; and a noise voltage subtraction part adapted to subtract the added noise voltage from a divided voltage of the detection capacitor.

In a sensor unit, a lower end surface of a terminal block (24) is attached to an upper end surface (12ES1) of a housing (12) by using a silicone-based adhesive in such a way as to cover an upper end surface (14ES1) of a hermetic glass (14). A covering layer (10A) made of a silicone-based adhesive is formed in a given thickness on the entire upper end surface (14ES1) of the hermetic glass (14), from which a group of input-output terminals (40ai) protrude.

A connector for use with a sensor, such as a pressure sensor, has EMI absorbing capabilities. The connector includes a polymeric body configured for coupling to a sensor body and an EMI absorbing material. The EMI absorbing material may be entrained in the polymeric body, coated on the polymeric body, or otherwise integrated with the polymeric body. The EMI absorbing material may be carbon black or carbon nanotubes.

A pressure sensor includes a housing, a pressure chamber defined within the housing, and a pressure transducer. The pressure sensor also includes a header that seals the pressure chamber and supports the pressure transducer in the pressure chamber. A plurality of pins extend through respective openings in the header. The sensor pins have first ends electrically connected to the pressure transducer in the pressure chamber and second ends electrically connected to sensor electronics outside the pressure chamber. The pins are electrically insulated from the header. The header is configured so that the electrical insulation of at least one pin from the header is less than the electrical insulation of the remaining pins from the header.

A noise resistance of a pressure sensor is improved while avoiding a hetero metal bonding. A pressure detection device includes a metal case having the diaphragm which is deformed due to a pressure received from a pressure medium, a sensor element which detects a pressure by detecting the deformation of the diaphragm, a lead frame which is electrically connected to the sensor element, and a connection member which holds the lead frame. A first surface of the lead frame, that is, the surface on a side near the metal case in the parallel plate region, and a second surface of the metal case, that is, the upper surface of the base member interpose at least one of the resin of the connection member being an insulator and the insulating adhesive and are disposed to face each other with a predetermined gap therebetween.

A pressure difference sensor for determining a pressure measurement signal includes a measuring cell made from a semiconductor material. The measuring cell is suppliable with first and second pressures and, using an electrical transducer element, outputs the pressure measurement signal as a function of a difference between the first and second pressures. First and second stiffening elements of a ceramic or semiconductor material are each joined with the pressure difference measuring cell by a respective first or second joining layer and have a respective first or second duct, via which the respective first or second pressure is suppliable to the pressure difference measuring cell. The first and/or the second joining layer comprise(s) an electrically conductive material and serve(s) for the mechanical connecting of the pressure difference measuring cell with the first and second stiffening elements and for implementing an electrical functionality.

A split-type piezoelectric sensor includes a first circuit board and a second circuit board. The first circuit board includes a sub-board, a piezoelectric film, and a first connector. The sub-board and the first circuit board are located on the same plane, and the sub-board is located in a hollow area of the first circuit board and connected to one end in the first circuit board. The piezoelectric film is attached to the sub-board and is electrically connected to the sub-board. The first connector and the piezoelectric film are provided on the same side, and the first connector is electrically connected to the first circuit board. The second circuit board includes a signal processing unit and a second connector electrically connected to the signal processing unit. The second connector is opposite to and detachably connected to the first connector, and the second connector supports the first circuit board.

Provided is a pressure detection device including a pressure detection unit configured to detect a pressure to be transmitted to a pressure sensor, and a flow channel unit on which the pressure detection unit is disposed. The pressure detection unit) includes a pressure sensor and a conductive protective film disposed in contact with the pressure sensor, the conductive protective film breaking contact between the pressure sensor and a fluid. The conductive protective film is formed of a conductive fluororesin material including a fluororesin material and a conductive material dispersed in the fluororesin material and is connected to a ground portion maintained at a ground potential.

Provided is a pressure detection device including: a pressure sensor including a pressure detection surface for detecting a pressure of a fluid; and a flow channel unit having a flow channel formed therein to guide the fluid to the pressure detection surface. The flow channel unit includes a flow channel body having the flow channel 21a formed therein, and an earth ring disposed in contact with the pressure sensor. The earth ring is formed of a conductive fluororesin material including a fluororesin material and a conductive material in which the fluororesin material is dispersed, and is maintained at a ground potential.