A high-precision pressure sensor, having a first base body that has two electrically conductive layers and an insulation layer arranged between the two layers and electrically insulating the two layers from one another, an electrically conductive measurement membrane arranged on the first base body with inclusion of a pressure chamber, which measurement membrane can be charged with a pressure to be measured, and an electrode provided in the membrane-facing layer and spaced apart from the measurement membrane, which electrode together with the measurement membrane forms a capacitor having a capacitance that varies according to the pressure acting upon the measurement membrane. The first base body is characterized in that it has a measurement membrane terminal via which a reference potential can be applied to the measurement membrane, an electrode terminal via which an electrode potential of the electrode can be tapped, and a shield terminal via which a shield potential that can be predetermined independently of the reference potential especially, a shield potential corresponding to the electrode potential can be applied to the layer facing away from the membrane.

A pressure sensor device includes a semiconductor die of the pressure sensor device and a bond wire of the pressure sensor device. A maximal vertical distance between a part of the bond wire and the semiconductor die is larger than a minimal vertical distance between the semiconductor die and a surface of a gel covering the semiconductor die.

A sensor includes two coaxial RF shielding members arranged to create a coaxial RF shielding structure that is electrically open and is formed from partially enclosed cylindrical shells. The RF shielding members are spaced from one another. The sensor also includes one or multiple electrically conductive coaxial coils between the coaxial RF shielding members. This configuration creates an LC circuit without requiring a separate capacitor electrically connected to the inductor. The RF shielding structure minimizes the surrounding tissue effects (e.g., parasitic capacitance), which improves the overall accuracy of the sensor. The LC circuit also can be remotely interrogated by external reader.

A pressure detection device includes: a piezoelectric element that detects a pressure change via a diaphragm head or the like; a circuit board that is provided with a processing circuit that performs electrical processing with respect to a charge signal outputted from the piezoelectric element; a conductive housing member, which has conductivity and is disposed to cover (house) the circuit board, and which is connected to the ground of the circuit board; and a housing (a leading end side housing, the diaphragm head and a rear end side housing), which houses the piezoelectric element, the circuit board and the housing member, and which is electrically insulated from the piezoelectric element, the circuit board and the housing member.

The present invention discloses an MEMS pressure sensing element, including a substrate provided with a groove; a pressure-sensitive film disposed above the substrate, the pressure-sensitive film sealing an opening of the groove to form a sealed cavity; and a movable electrode plate and a fixed electrode plate which are located in the sealed cavity and form a capacitor structure, wherein the fixed electrode plate is fixed on a bottom wall of the groove of the substrate, and the movable electrode plate is suspended above the fixed electrode plate and opposite to the fixed electrode plate; and the pressure-sensitive film is connected to the movable electrode plate so as to drive the movable electrode plate to move under the action of an external pressure. According to the MEMS pressure sensing element, pressure sensitivity and electrical detection are separated, the pressure-sensitive film is exposed in air, the capacitor structures are disposed in the sealed cavity defined by the pressure-sensitive film and the substrate, and the movable electrode plates of the capacitor structures can be driven by the pressure-sensitive film. In this way, not only is a pressure-sensitive function finished, but also external electromagnetic interferences on the capacitor structures are shielded.

An electronics assembly which includes a grounding connection, having a housing, a connector, a portion of the connector formed around the housing, a recess portion integrally formed as part of the connector, a substrate located in proximity to the connector, and circuitry mounted to the substrate such that the circuitry is at least partially disposed in a cavity formed as part of the connector. A conductor is mounted to the connector such that the conductor is located in the recess, and the conductor is in contact with the housing and the substrate. A grounding connection is formed between the circuitry and the housing when the conductor is in contact with the housing and the substrate. The conductor may be made of an elastomeric material, and the conductor deforms when the substrate is placed in proximity to the connector.

In order to eliminate influence of a noise voltage applied to a diaphragm of a capacitance type sensor, the capacitance type sensor includes: a detection capacitor formed of a diaphragm and a fixed electrode, the diaphragm being connected to a frame and deformed by receiving an external force; and a fixed capacitor connected in series with the detection capacitor, so that it is intended to detect a partial pressure applied to the detection capacitor by applying a voltage to the detection capacitor and the fixed capacitor, and further includes: a noise voltage generating part connected to the frame and adapted to generate a noise voltage caused in the frame; a noise voltage adding part adapted to add the noise voltage to the voltage applied to each of the capacitors; and a noise voltage subtraction part adapted to subtract the added noise voltage from a divided voltage of the detection capacitor.

Provided is a pressure detection device including: a pressure sensor including a pressure detection surface for detecting a pressure of a fluid; and a flow channel unit having a flow channel formed therein to guide the fluid to the pressure detection surface. The flow channel unit includes a flow channel body having the flow channel 21a formed therein, and an earth ring disposed in contact with the pressure sensor. The earth ring is formed of a conductive fluororesin material including a fluororesin material and a conductive material in which the fluororesin material is dispersed, and is maintained at a ground potential.

An oil filled pressure sensor is provided. The sensor includes a drift-stabilized pressure sensing element mounted to and electrically isolated from a header body, the pressure sensing element immersed in an oil filled cavity and temperature stabilized for sensing pressure in the cavity without substantial signal drift. A method of fabrication is provided.

Provided is a capacitive pressure sensor that prevents not only a change in temperature but also electromagnetic noise in the air from affecting the measurement value of pressure. In the capacitive pressure sensor, an electrode member includes: a measurement electrode fixed to an insulating positioning member and having an electrode face; a signal extraction electrode fixed with an insulating seal sealing the other end of the body; and a flexible connection member for electrically connecting the measurement electrode and the signal electrode. Moreover, the flexible connection member is accommodated in the accommodating depressed portion formed in the measurement electrode or the signal extraction electrode.