A method for operating a group of pressure sensors is provided. First and second pressure sensors respectively have first and second pressure measurement ranges, and are arranged to measure the pressure in a common measurement volume, and have measurement ranges that overlap in a range. The method comprises: aa) reading out first and second measurement signals respectively from the first and second pressure sensors substantially simultaneously while the pressure in the common measurement volume is in the overlapping range; bb) stipulating the first measurement signal which has been read out as the adjustment point for the second pressure sensor; cc) determining at least one calibration parameter, in particular a gas-dependent calibration parameter, for the second pressure sensor as a function of the first measurement signal, as a function of the adjustment point for the second pressure sensor, as stipulated in bb), and as a function of the second measurement signal.

A Process Critical Thermal Conductivity Gauge (PCTCG) instrument relies on gauge chamber wall above-ambient-temperature-control (AATC) to provide improved accuracy and thermal stability with reduced and linearized temperature coefficients. A sensor resistor is exposed to gas pressure in a gauge chamber. AATC is provided by control of a heater that heats a chamber wall to control temperature difference between the sensor resistor and chamber wall. An example application of this technology is to end-point detection in lyophilization where the TCG is used to track partial pressures of water in binary gas mixtures.

A Process Critical Thermal Conductivity Gauge (PCTCG) instrument relies on gauge chamber wall above-ambient-temperature-control (AATC) to provide improved accuracy and thermal stability with reduced and linearized temperature coefficients. A sensor resistor is exposed to gas pressure in a gauge chamber. AATC is provided by control of a heater that heats a chamber wall to control temperature difference between the sensor resistor and chamber wall. An example application of this technology is to end-point detection in lyophilization where the TCG is used to track partial pressures of water in binary gas mixtures.

A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.

A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.

The present disclosure discloses a vacuum degree detection device, a monitoring system and a vacuum arc-extinguishing chamber thereof, wherein, in the vacuum degree detection device, a ceramic insulating housing is sealingly fixed to an end face cover plate of the vacuum arc-extinguishing chamber, the ceramic insulating housing is a circular ring-shaped structure coaxial with a conductive rod on the end face cover plate, a sealing area formed by the end face cover plate and the ceramic insulating housing is provided with a through hole communicating with the vacuum arc-extinguishing chamber; a thermoelectric vacuum sensor is disposed inside the ceramic insulating housing to detect the vacuum degree of the vacuum arc-extinguishing chamber, a cold end is fixed to the end face cover plate, an electrode is supported on the cold end, a thermoelectric arm is supported on the electrode, a hot end is laminated to the thermoelectric arm.

The present disclosure discloses a vacuum degree detection device, a monitoring system and a vacuum arc-extinguishing chamber thereof, wherein, in the vacuum degree detection device, a ceramic insulating housing is sealingly fixed to an end face cover plate of the vacuum arc-extinguishing chamber, the ceramic insulating housing is a circular ring-shaped structure coaxial with a conductive rod on the end face cover plate, a sealing area formed by the end face cover plate and the ceramic insulating housing is provided with a through hole communicating with the vacuum arc-extinguishing chamber; a thermoelectric vacuum sensor is disposed inside the ceramic insulating housing to detect the vacuum degree of the vacuum arc-extinguishing chamber, a cold end is fixed to the end face cover plate, an electrode is supported on the cold end, a thermoelectric arm is supported on the electrode, a hot end is laminated to the thermoelectric arm.

Acoustic transducers for generating electrical signals in response to acoustic signals are disclosed. In some embodiments, an acoustic transducer includes an at least partially evacuated hermetically sealed cavity defined in part by a first diaphragm. The acoustic transducer also includes a backplate disposed at least partially within the cavity. The cavity having a pressure lower than atmospheric pressure. The acoustic transducer further includes a pressure sensor coupled to the backplate and configured to sense the pressure in the cavity.

Acoustic transducers for generating electrical signals in response to acoustic signals are disclosed. In some embodiments, an acoustic transducer includes an at least partially evacuated hermetically sealed cavity defined in part by a first diaphragm. The acoustic transducer also includes a backplate disposed at least partially within the cavity. The cavity having a pressure lower than atmospheric pressure. The acoustic transducer further includes a pressure sensor coupled to the backplate and configured to sense the pressure in the cavity.

Electrical, mechanical, computing, and/or other devices that include components formed of extremely low resistance (ELR) materials, including, but not limited to, modified ELR materials, layered ELR materials, and new ELR materials, are described.