A camera module inspection system and a method for operating the inspection system. More specifically, the inspection system can quickly check and correct the alignment of the camera module.

The present disclosure relates to a calibrated constellation simulator, a system and a method for calibrating and/or testing a star sensor assembled on a spacecraft. The calibrated constellation simulator comprises an optical device configured to project a defined star formation (IRF) of a star catalog onto a star sensor assembled on a spacecraft. Further, the calibrated constellation simulator comprises an alignment unit with a position and/or location reference (ARF) of the calibrated constellation simulator configured to detect a position and/or location of the calibrated constellation simulator in space, wherein the defined star formation (IRF) and the position and/or location reference (ARF) are in a first fixed calibrated rotation (Q.sub.OSPS) with respect to one another. The calibrated constellation simulator improves the calibration of the star sensor as an independent calibration standard. The constellation simulator becomes a calibration standard.

A lensmeter system may include a mobile device having a camera. The camera may capture a first image of a pattern through a lens that is separate from the camera, while the lens is in contact with a pattern. The mobile device may determine the size of the lens based on the first image and known features of the pattern. The camera may capture a second image of the pattern, while the lens is at an intermediate location between the camera and the pattern. The second image may be transformed to an ideal coordinate system, and processed determine a distortion of the pattern attributable to the lens. The mobile device may measure characteristics of the lens based on the distortion. Characteristics of the lens may include a spherical power, a cylinder power, and/or an astigmatism angle.

An apparatus for the moir measurement of an optical test object includes a grating arrangement made of a first grating (25, . . . ) which is positionable in the optical beam path upstream of the test object and a second grating (11, . . . ) which is positionable in the optical beam path downstream of the test object, an evaluation unit having at least one detector (12, . . . ), for evaluating moire structures produced by superposition of the two gratings in a detection plane situated downstream of the second grating in the optical beam path, and at least one aperture stop (14, . . . ), by way of which the light distribution which was produced after the light exit from the second grating can be shadowed in a region-wise fashion such that only light of a subset of all field points on the second grating reaches the detection plane.

A projection exposure apparatus (10) for microlithography has a measuring system (50) for measuring an optical element of the projection exposure apparatus. The measuring system (50) includes an irradiation device (54), which is configured to radiate measuring radiation (62) in different directions (64) onto the optical element (20), such that the measuring radiation (62) covers respective optical path lengths (68) within the optical element (20) for the different directions (64) of incidence, a detection device (56), which is configured to measure, for the respective directions (64) of incidence, the respective optical path lengths covered by the measuring radiation (62) in the optical element (20), and an evaluation device, which is configured to determine a spatially resolved distribution of refractive indices in the optical element (20) by computed-tomographic back projection of the respective measured path lengths with respect to the respective directions of incidence.

Disclosed herein is a method including: (i) providing a light transmissive sample including nominally parallel internal facets, which are about perpendicular to an external surface of the sample; (ii) providing an optical element having a refractive index about equal to that of the sample and including an external first surface and an external second surface acutely inclined relative thereto; (iii) positioning the second surface of the optical element adjacent to the first surface of the sample; (iv) impinging light beams on the first surface of the optical element, about normally thereto; (v) sensing light beams, which exit out of the sample following passage of the impinging light beams via the optical element, transmission thereof into the sample, reflection once off the internal facets, and exit out of the sample; and (vi) based on the sensed data, computing a deviation from parallelism between the internal facets.

Disclosed herein is a method including: (i) providing a light transmissive sample including nominally parallel internal facets, which are about perpendicular to an external surface of the sample; (ii) providing an optical element having a refractive index about equal to that of the sample and including an external first surface and an external second surface acutely inclined relative thereto; (iii) positioning the second surface of the optical element adjacent to the first surface of the sample; (iv) impinging light beams on the first surface of the optical element, about normally thereto; (v) sensing light beams, which exit out of the sample following passage of the impinging light beams via the optical element, transmission thereof into the sample, reflection once off the internal facets, and exit out of the sample; and (vi) based on the sensed data, computing a deviation from parallelism between the internal facets.

The present disclosure illustrates a non-contact measurement device for a radius of curvature and a thickness of a lens and a measurement method thereof. The non-contact measurement device utilizes a non-contact probe to integrate a motor, an optical scale and an electronic control module, so as to achieve measurement for the radius of curvature and the thickness of the lens. The present disclosure adopts astigmatism to achieve fast and precise focusing. To overcome the spherical aberration problem, thickness measurement can be implemented by the non-contact measurement device through a formula calculation and utilization of a correction plate, wherein single one probe is used for the measurement herein. For the thicker lens, the non-contact measurement device can be extended to use dual probes, so as to detect the top and bottom sides of the lens.

A process is provided for determining characteristics of a lens, the process including obtaining a captured image of a pattern through a corrective lens; transforming the captured image to an ideal coordinate system; processing the captured image to determine an overall distortion from a reference pattern to the pattern of the captured image; determining a distortion of the captured pattern attributable to the corrective lens; and measuring at least one characteristic of the corrective lens. In some embodiments, the overall distortion is determined by detecting, in the captured image, at least one captured pattern landmark; determining a transformation from at least one ideal pattern landmark to the at least one captured pattern landmark; and determining for the corrective lens, from the transformation, a spherical power measurement, a cylinder power measurement, and an astigmatism angle measurement.

Disclosed herein is a method including: providing a light guiding arrangement (LGA) configured to redirect light, incident thereon in a direction perpendicular to an external surface of the sample, into or onto the sample, such that light impinges on an internal facet of the sample nominally normally thereto; generating a first incident light beam (LB), directed at the external surface normally thereto, and a second incident LB, parallel to the first incident LB and directed at the LGA; obtaining a first returned LB by reflection of the first incident LB off the external surface, and a second returned LB by redirection by the LGA of the second incident LB into or onto the sample, reflection thereof off the internal facet, and inverse redirection by the LGA; measuring an angular deviation between the returned LBs and deducing therefrom an actual inclination angle of the internal facet relative to the external surface.