A failure diagnosis system includes a sensor that is provided in a diagnosis target device and detects diagnosis target information of the diagnosis target device, an abnormality determination unit that determines whether or not an abnormality occurs in the diagnosis target device based on the diagnosis target information detected by the sensor, a storage unit that stores a site of the diagnosis target device where the abnormality determination is possible and a sensor installation location where a sensor needs to be installed for the abnormality determination of the site, a designation reception unit that receives designation of a site where the abnormality determination is performed, and a presentation unit that executes predetermined presentation processing. The presentation processing by the presentation unit includes processing of presenting the sensor installation location where the sensor needs to be installed to perform the abnormality determination of the designated site.

Provided is a technique of processing a substrate by executing a process recipe including a plurality of steps, the technique including: (a) acquiring vibration data of a member that exhausts an atmosphere in a process chamber that processes the substrate from a vibration sensor while executing the process recipe; and (b) detecting presence of an abnormality sign in a case where a ratio between a magnitude of vibration at a rotation frequency of the member and a magnitude of vibration at a comparison frequency that is an integral multiple of the rotation frequency exceeds a preset abnormality sign threshold on the basis of the acquired vibration data.

Provided is a technique of processing a substrate by executing a process recipe including a plurality of steps, the technique including: (a) acquiring vibration data of a member that exhausts an atmosphere in a process chamber that processes the substrate from a vibration sensor while executing the process recipe; and (b) detecting presence of an abnormality sign in a case where a ratio between a magnitude of vibration at a rotation frequency of the member and a magnitude of vibration at a comparison frequency that is an integral multiple of the rotation frequency exceeds a preset abnormality sign threshold on the basis of the acquired vibration data.

A transmission device is provided and includes a transmission structure and a circuit board, where the circuit board is disposed on an input end of the transmission structure, and a sensing element and a data processing element communicatively connected to the sensing element are integrated on the circuit board to perform signal measurement operations.

A transmission device is provided and includes a transmission structure and a circuit board, where the circuit board is disposed on an input end of the transmission structure, and a sensing element and a data processing element communicatively connected to the sensing element are integrated on the circuit board to perform signal measurement operations.

A method for automatic diagnosis of a mechanical system of a group of mechanical systems sharing mechanical characteristics includes obtaining data relating to a vibration. The vibration-related data is acquired by a portable communications device configured to communicate with a remote processor. The processor automatically diagnoses the mechanical system by applying a relationship to the obtained vibration-related data. The relationship is based on sets of vibration-related data previously obtained from the mechanical systems. Each set of vibration-related data relates to vibrations of a mechanical system. The relationship is further based on sets of operation data previously obtained for mechanical systems of the group. Each set of operation data indicates a previous state of operation of a mechanical system. Each of the previous states of operation is associated with at least one of the previously obtained sets of vibration-related data.

A control system for evaluating residual operating life of a machine component of a machine tool includes a sensor and a control system. The sensor is disposed on the machine tool and is configured to sense movement of the machine component. The control device is configured to calculate a length of time based on a sense signal received from the sensor and sampled at a time point right after the machine component is freshly oiled, and to enable output of an alarm when determining that the length of time thus calculated is smaller than a predetermined length.

A control system for evaluating residual operating life of a machine component of a machine tool includes a sensor and a control system. The sensor is disposed on the machine tool and is configured to sense movement of the machine component. The control device is configured to calculate a length of time based on a sense signal received from the sensor and sampled at a time point right after the machine component is freshly oiled, and to enable output of an alarm when determining that the length of time thus calculated is smaller than a predetermined length.

A machine tool that visualizes the state of a ball screw in an easy-to-understand way includes a detector that detects at least one sensed value among vibrations, sound, and a current, heat, light, and power value applied to drive a ball screw during warming-up, a feature amount extractor that extracts a first feature amount and a second feature amount from the sensed value obtained by the detector, and a display that displays a point plotting the sensed value, and at least two boundaries laid out like contour lines to represent the possibility of generation of an anomaly in the ball screw, on a plane having a first axis defined by numerical values regarding the first feature amount and a second axis defined by numerical values regarding the second feature amount.

A machine tool that visualizes the state of a ball screw in an easy-to-understand way includes a detector that detects at least one sensed value among vibrations, sound, and a current, heat, light, and power value applied to drive a ball screw during warming-up, a feature amount extractor that extracts a first feature amount and a second feature amount from the sensed value obtained by the detector, and a display that displays a point plotting the sensed value, and at least two boundaries laid out like contour lines to represent the possibility of generation of an anomaly in the ball screw, on a plane having a first axis defined by numerical values regarding the first feature amount and a second axis defined by numerical values regarding the second feature amount.