G01N21/71

Plasma spectrometry method

A plasma spectrometry method with high reproducibility of plasma light emission is described, wherein the method comprises: a detection step of applying a voltage, thereby detecting the resulting plasma light emission; and non-detection step of detecting no plasma light emission.

CHEMICAL ELEMENT ANALYSIS DEVICE AND METHOD FOR CONTAMINANTS IN LIQUID
20170322162 · 2017-11-09 ·

The present invention relates to a chemical element analysis device and method for contaminants in a liquid. The chemical element analysis device for contaminants in a liquid according to the present invention comprises: a sample storage unit 10 for storing a sampled liquid sample 1; a laser unit 20 for emitting a laser beam 21: 21a, 21b, and 21c and irradiating the laser beam 21 to the sample 1: 1a, 1b, and 1c sprayed from the sample storage unit 10; and a spectrometer 30 for collecting plasma light 31: 31a, 31b, and 31c generated by irradiating the laser beam 21 to the sample 1, and measuring a spectrum of the plasma light 31.

FIELD LENS CORRECTED THREE MIRROR ANASTIGMAT SPECTROGRAPH
20170268927 · 2017-09-21 ·

A spectrograph that includes camera focusing optics with a primary mirror having a concave-shaped reflective mirror surface, a secondary mirror having a convex-shaped reflective mirror surface and positioned to receive light reflected by the primary mirror, a tertiary mirror having a concave reflective mirror surface and positioned to receive light reflected by the secondary mirror, and a field correcting lens comprising a convex lens surface in combination with a concave lens surface, wherein light received by said field correcting lens from said tertiary mirror enters said convex lens surface, traverses said field correcting lens, and exits from said concave lens surface. The optional field correcting lens is positioned such that the primary mirror, secondary mirror, tertiary mirror, and the field correcting lens share the common parent vertex axis.

Photon source, metrology apparatus, lithographic system and device manufacturing method

A radiation driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a first container containing a gas (e.g. Xe). Collection optics collects photons emitted by a plasma maintained by the laser radiation to form a beam of output radiation. First container is enclosed within a hermetically sealed second container. Any ozone generated within the second container as a result of ultraviolet components of the output radiation is completely contained within the second container. Second container further filters out the ultraviolet components. Microwave radiation may be used instead of laser radiation to form the plasma.

Photon source, metrology apparatus, lithographic system and device manufacturing method

A radiation driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a first container containing a gas (e.g. Xe). Collection optics collects photons emitted by a plasma maintained by the laser radiation to form a beam of output radiation. First container is enclosed within a hermetically sealed second container. Any ozone generated within the second container as a result of ultraviolet components of the output radiation is completely contained within the second container. Second container further filters out the ultraviolet components. Microwave radiation may be used instead of laser radiation to form the plasma.

Laser induced breakdown spectroscopy (LIBS) apparatus with dual CCD spectrometer
09766182 · 2017-09-19 · ·

This invention discloses a compact laser induced breakdown spectroscopy (LIBS) apparatus suitable for field operations. The LIBS apparatus comprises a Q-switched laser with laser pulse energy between several tens and several thousands of micro joules (μJ), which is significantly lower than that of traditional LIBS lasers. The spectrograph of the LIBS apparatus employs a dual CCD (charge coupled device) design, which maintains compact size and in the meantime offers large spectral coverage and high spectral resolution.

Process and Apparatus for Sorting Reusable Pieces of Raw Material

The invention relates to a process and an apparatus for sorting reusable raw-material pieces (5) which are moved continually in conveying direction (2) by a transport means (1), where the chemical composition of the raw-material pieces (5) is analyzed by laser-induced breakdown spectroscopy (LIBS) and automated sorting of the raw-material pieces (5) is implemented depending on the composition found, where the raw-material pieces (5) in a first step are subjected to a plurality of first laser pulses (6) in order to remove surface coatings and/or contaminants from the raw-material pieces (5), and in a second step, one or more second laser pulses (7) are directed at those locations of the raw-material pieces (5) from which the surface coatings and/or contaminants have been removed, with exposed material of the raw-material pieces (5) being converted by the second laser pulses (7) into a plasma, where the laser (3) used for the first and second laser pulses (6, 7) is the same, and the area of the raw-material pieces (5) over which the first laser pulses (6) are moved and which is freed from surface coatings and/or contaminants is greater than the area of the raw-material pieces (5) that is embraced by the second laser pulses (7), the focal diameter and the focal point of the laser beam being kept constant between the first and second laser pulses (6, 7). In this way it is possible, utilizing only one laser, to achieve undistorted analysis of the composition of the raw-material pieces (5) and to perform sorting in dependence on said analysis.

Methods for multiphase laser ablation analysis

Methods of liquid and solid materials analysis by laser induced ablation spectroscopy are disclosed. The liquid and solid materials are analyzed in an instrument having one pulsed laser to produce emissive plasma plumes and ablate solid material. Liquid phase samples are aerosolized before streaming to an analysis zone where they are dissociated into a plasma plume. A large number of sites within solid phase sample structures and be analyzed using a movable x-y-z stage and displayed in a chemical map.

METHOD AND APPARATUS FOR POWER EQUIPMENT ONLINE MONITORING

The present disclosure provides a method and apparatus for power equipment online monitoring, intended to solve technical difficulties in power equipment online monitoring. The technology of the present disclosure lies in focusing laser to a to-be-detected substance inside and/or at a surface of the power equipment, generating a plasma by laser induction at the to-be-tested substance, quantitatively analyzing constituents and content of the to-be-detected substance by measuring the spectrum of the plasma, so as to determine a series of phenomena such as aging during running process of power equipment, chemical reaction state, surface absorption, deposition of electrically discharging product, vacuum leakage, trace moisture measurement, solid solution, liquid solution, gas solution and the like, thereby achieving the objective of online monitoring the power equipment.

Method and integrated device for analyzing liquid flow and liquid-solid interface interaction

An Integrated Circuit (IC) chip with a lab-on-a-chip, a method of manufacturing the lab-on-a-chip and a method of using the lab-on-a-chip for fluid flow analysis in physical systems through combination with computer modeling. The lab-on-a-chip includes cavities in a channel layer and a capping layer, preferably transparent, covering the cavities. Gates control two dimensional (2D) lattice structures acting as heaters, light sources and/or sensors in the cavities, or fluid channels. The gates and two dimensional (2D) lattice structures may be at the cavity bottoms or on the capping layer. Wiring connects the gates and the 2D lattice structures externally.