Methods and systems for improving a measurement recipe describing a sequence of measurements employed to characterize semiconductor structures are described herein. A measurement recipe is repeatedly updated before a queue of measurements defined by the previous measurement recipe is fully executed. In some examples, an improved measurement recipe identifies a minimum set of measurement options that increases wafer throughput while meeting measurement uncertainty requirements. In some examples, measurement recipe optimization is controlled to trade off measurement robustness and measurement time. This enables flexibility in the case of outliers and process excursions. In some examples, measurement recipe optimization is controlled to minimize any combination of measurement uncertainty, measurement time, move time, and target dose. In some examples, a measurement recipe is updated while measurement data is being collected. In some examples, a measurement recipe is updated at a site while data is collected at another site.

A residual stress detection device for a curved surface coating and a detection method thereof is provided, where its structure includes: a detection piece carrier, configured to fix the detection piece, so that a to-be-detected point on the detection piece remains at a highest point; an X-ray generation source, radiating an X-ray to the to-be-detected point fixedly or along a path; a detection element, including a moving mechanism, where the moving mechanism moves the detection element along a path extending toward a direction orthogonal to an incident direction of the X-ray, so that the detection element receives and detects intensity of a diffraction X-ray at a position of the diffraction X-ray; and a stress calculation module, obtaining a strain value based on an intensity peak of the diffraction X-ray detected by the detection element, and calculating a residual stress value of the detection piece by using a formula.

A residual stress detection device for a curved surface coating and a detection method thereof is provided, where its structure includes: a detection piece carrier, configured to fix the detection piece, so that a to-be-detected point on the detection piece remains at a highest point; an X-ray generation source, radiating an X-ray to the to-be-detected point fixedly or along a path; a detection element, including a moving mechanism, where the moving mechanism moves the detection element along a path extending toward a direction orthogonal to an incident direction of the X-ray, so that the detection element receives and detects intensity of a diffraction X-ray at a position of the diffraction X-ray; and a stress calculation module, obtaining a strain value based on an intensity peak of the diffraction X-ray detected by the detection element, and calculating a residual stress value of the detection piece by using a formula.

A sample inspection system contains a source of electromagnetic radiation and an apparatus that includes a beam former, a collimator and an energy resolving detector. The beam former is adapted to receive electromagnetic radiation from the source to provide a polygonal shell beam formed of at least three walls of electromagnetic radiation. The collimator has a plurality of channels adapted to receive diffracted or scattered radiation at an angle. The energy resolving detector is arranged to detect radiation diffracted or scattered by a sample upon incidence of the polygonal shell beam onto the sample and transmitted by the collimator.

A method of quantitatively analyzing a carbon based hybrid negative electrode including the steps of preparing a secondary battery including a carbon based hybrid negative electrode, where the carbon based hybrid negative electrode comprises a carbon based negative electrode active material and a non-carbon based negative electrode active material, measuring a lattice d-spacing of the carbon based negative electrode active material in the carbon based hybrid negative electrode during charging/discharging of the secondary battery using an X-ray diffractometer and then plotting a graph of a change in lattice d-spacing value as a function of charge/discharge capacity, detecting an inflection point of a slope of the graph during discharging; and then, quantifying capacity contribution of the carbon based negative electrode active material and the non-carbon based negative electrode active material in the total discharge capacity of the secondary battery by the inflection point of the slope of the graph.

The present disclosure provides methods of collecting electron diffraction patterns from nanocrystals to obtain a three-dimensional structural model of a compound, as well as methods of identifying compounds and methods of determining polymorphic forms. In addition, the present disclosure provides methods of characterizing a first compound from a sample, as well as methods of screening compounds from a sample. The present disclosure also provides systems for characterizing a compound from a sample, which systems include modules for high-performance liquid chromatography, dispensing, and electron microscopy.

The present disclosure provides methods of collecting electron diffraction patterns from nanocrystals to obtain a three-dimensional structural model of a compound, as well as methods of identifying compounds and methods of determining polymorphic forms. In addition, the present disclosure provides methods of characterizing a first compound from a sample, as well as methods of screening compounds from a sample. The present disclosure also provides systems for characterizing a compound from a sample, which systems include modules for high-performance liquid chromatography, dispensing, and electron microscopy.

A process for quantifying the amount of unbound metal and bound metal in solution is provided. A process for quantifying the amount of bound metal amino acid chelate and free ligand in a solid (e.g., dry mixture such as an animal feed) is also provided.

A process for quantifying the amount of unbound metal and bound metal in solution is provided. A process for quantifying the amount of bound metal amino acid chelate and free ligand in a solid (e.g., dry mixture such as an animal feed) is also provided.

A sample holder (3) for performing X-ray analysis on a crystalline sample (11) comprises a mounting support with a first end that can be attached to a goniometer head, whereby the crystalline sample (11) can be attached to the mounting support at a distance to the first end. The sample holder (3) further comprises a holder base at the first end of the mounting support with means for mounting the holder base to the goniometer head, whereby the holder base is configured to fit into a well (2) of a well plate (1). The holder base comprises a ferromagnetic material for mounting the holder base to a magnetic base element at or within the goniometer head. The mounting support comprises a tube preferably made of glass into which the crystalline sample (11) can be inserted. The sample holder (3) can also comprise a base disk (14) that provides for a lid for a well (2) of the well plate (1) after insertion of the sample holder (3) into the well (2). The holder base can also comprise a holder ring (7) that is arranged at the first end of the mounting support and that surrounds the mounting support in a circumferential manner The base disk (14) can be removably attachable to the holder ring (7). A crystalline sponge is attached to the mounting support.