A film forming apparatus and a film forming apparatus usage. The film forming apparatus has a film forming chamber, a substrate retaining part, a heating unit, a shower head, and a physical characteristics detector. The physical characteristics detector includes an irradiation part that irradiates a film formed on a surface of a substrate with a beam, a receiver to receive the beam reflected by the film, and a detection unit that detects physical characteristics of the film based on the beam received by the receiver. The shower head includes a supply plane facing the film forming plane, multiple discharge outlets provided in the supply plane, a main body to transport source gas to the multiple discharge outlets, a first transmissive part that transmits the beam emitted by the irradiation part, and a second transmissive part that transmits the reflected beam and is located at a different position than the first transmissive part.

Provided is a method of diagnosing the degradation of a lithium secondary battery in a non-destructive manner without disassembling the battery, which includes: obtaining, from X-ray diffraction (XRD) data obtained during first charging of the lithium secondary battery, a first graph showing the change of the c-axis d-spacing value of the layered positive electrode active material according to the number of moles of lithium ions deintercalated from the layered positive electrode active material during the charging; obtaining, from XRD data obtained during second charging of the lithium secondary battery, a second graph showing the change of the c-axis d-spacing value of the layered positive electrode active material according to the number of moles of lithium ions deintercalated from the layered positive electrode active material during the charging; and classifying a cause of degradation of the secondary battery by comparing the first graph and the second graph.

Provided is a method of diagnosing the degradation of a lithium secondary battery in a non-destructive manner without disassembling the battery, which includes: obtaining, from X-ray diffraction (XRD) data obtained during first charging of the lithium secondary battery, a first graph showing the change of the c-axis d-spacing value of the layered positive electrode active material according to the number of moles of lithium ions deintercalated from the layered positive electrode active material during the charging; obtaining, from XRD data obtained during second charging of the lithium secondary battery, a second graph showing the change of the c-axis d-spacing value of the layered positive electrode active material according to the number of moles of lithium ions deintercalated from the layered positive electrode active material during the charging; and classifying a cause of degradation of the secondary battery by comparing the first graph and the second graph.

A quantitative analysis apparatus, a method, a program, and a manufacturing control system are provided. A WPPF section 320 for determining parameters of theoretical diffraction intensity by performing whole powder pattern fitting with respect to an X-ray diffraction profile to be analyzed, a scale factor acquiring section 325 for acquiring a scale factor of a test component among the determined parameters, a calibration curve storing section 350 for storing a calibration curve indicating a correlation between scale factors of the test component acquired with respect to a standard sample and content ratios of the test component in the standard sample, and a conversion section 370 for converting the scale factor of the test component acquired with respect to an objective sample into the content ratio of the test component in the objective sample using the stored calibration curve, are comprised.

A quantitative analysis apparatus, a method, a program, and a manufacturing control system are provided. A WPPF section 320 for determining parameters of theoretical diffraction intensity by performing whole powder pattern fitting with respect to an X-ray diffraction profile to be analyzed, a scale factor acquiring section 325 for acquiring a scale factor of a test component among the determined parameters, a calibration curve storing section 350 for storing a calibration curve indicating a correlation between scale factors of the test component acquired with respect to a standard sample and content ratios of the test component in the standard sample, and a conversion section 370 for converting the scale factor of the test component acquired with respect to an objective sample into the content ratio of the test component in the objective sample using the stored calibration curve, are comprised.

The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.

An X-ray beam generating system including an X-ray source for generating an original primary X-ray beam, an optics system including a first optics component and at least one second optics component which are movable relative to the X-ray source in order either to bring the first optics component into interaction with the original primary X-ray beam, whereupon a first primary X-ray beam is generated which is deflected at a first deflection angle, or to bring the second optics component into interaction with the original primary X-ray beam, whereupon a second primary X-ray beam is generated which is deflected at a second deflection angle, and a rotating device to rotate the X-ray beam generating system through either a first rotation angle or a second rotation angle to allow either the first primary X-ray beam or the second primary X-ray beam to impinge on a sample region.

An X-ray beam generating system including an X-ray source for generating an original primary X-ray beam, an optics system including a first optics component and at least one second optics component which are movable relative to the X-ray source in order either to bring the first optics component into interaction with the original primary X-ray beam, whereupon a first primary X-ray beam is generated which is deflected at a first deflection angle, or to bring the second optics component into interaction with the original primary X-ray beam, whereupon a second primary X-ray beam is generated which is deflected at a second deflection angle, and a rotating device to rotate the X-ray beam generating system through either a first rotation angle or a second rotation angle to allow either the first primary X-ray beam or the second primary X-ray beam to impinge on a sample region.

A device for examining a sample by means of X-radiation is provided, the device comprising: a radiation generation system for generating primary radiation; a first goniometer arm on which the radiation generation system is mounted and which is pivotable about a goniometer axis; a detection system configured to detect secondary radiation emanating from the sample; a second goniometer arm on which the detection system is mounted and which is pivotable about the goniometer axis; an evacuable sample chamber within which the sample is arrangeable in a sample region encompassing a portion of the goniometer axis, the sample chamber being delimited by a sample chamber wall which has a transmission region which is transmissive to the primary radiation and is vacuum-tight, in order to allow the primary radiation to penetrate into the sample chamber and to impinge on the sample region at different angles of incidence; wherein the sample chamber has a first opening in a detection beam path, at which the sample chamber and the detection system are connectable in a vacuum-tight manner so that the detection beam path is evacuable.

The invention is directed to a method for elucidating the three-dimensional structure of compounds by X-ray diffraction (X-ray SCD) characterized in that the compound is co-analyte crystallized with tetraaryladamantanes according to general formula I Wherein R and R′ are identical or different residues selected from the group consisting of O-R1, S-R1, NHR1, NR1R2, F, Cl, Br or I and R1, R2 stand for identical or different, substituted on not substituted aliphatic or aromatic residues having 1 to 25 carbon atoms and the the three-dimensional structure of the compound is obtained by X-ray diffraction (X-ray SCD).

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