A closure device for the gas-tight closing of the input opening of a sample chamber of an x-ray analysis apparatus includes a slider having a closure plate and a carriage that is configured to be displaced in a lateral movement over the input opening on a linear guide arranged on a baseplate connected fixedly to the sample chamber. The closure plate is connected in an articulated manner to the carriage via deflecting elements that, upon butting against end stops connected rigidly to the baseplate, deflect the lateral movement of the carriage into a movement perpendicular thereto to press the closure plate over the input opening. A drive motor connected to the carriage via a drive means displaces the slider to provide the lateral movement on the linear guide.

A system for positioning a sample in a charged particle apparatus (CPA) or an X-ray photoelectron spectroscopy (XPS) system includes a sample carrier coupled to a stage inside the vacuum chamber of the CPA or XPS system. The system allows transferring of the sample carrier among multiple CPAs, XPS systems and glove boxes in inert gas or in vacuum. The sample carrier is releasably coupled with the stage in the vacuum chamber of the CPA or the XPS. Multiple electrodes in a sample area of the sample carrier are electrically connectable with the stage by multiple spring contacts between the sample carrier and the stage.

A system for positioning a sample in a charged particle apparatus (CPA) or an X-ray photoelectron spectroscopy (XPS) system includes a sample carrier coupled to a stage inside the vacuum chamber of the CPA or XPS system. The system allows transferring of the sample carrier among multiple CPAs, XPS systems and glove boxes in inert gas or in vacuum. The sample carrier is releasably coupled with the stage in the vacuum chamber of the CPA or the XPS. Multiple electrodes in a sample area of the sample carrier are electrically connectable with the stage by multiple spring contacts between the sample carrier and the stage.

Apparatus and methods are described for the automated transfer and storage of transmission electron microscope (TEM) and scanning/transmission electron microscope (STEM) lamella samples throughout a semiconductor manufacturing facility using existing automation infrastructure such as a Front Opening Unified Pod (FOUP). Also provided are wafer facsimiles corresponding to outer dimensions of semiconductor, data storage or solar cell wafers, wherein the facsimiles adapted to store, carry and/or provide a testing platform for testing of samples taken from semiconductor, data storage or solar cell wafers.

A sample analysis cup assembly, system and method for purging including a cell body, including a top end; a bottom end; a cell body wall extending axially from the top end to the bottom end; a transverse wall adjacent the top end, including a plurality of apertures extending therethrough; and a raised portion on the transverse wall including a central aperture extending therethrough; a rotatable cap, including a top surface; a bottom surface; and a series of apertures extending from the top surface through the bottom surface, the rotatable cap being structured to engage with the top end of the cell body; and a ring member structured to couple with the bottom end of the cell body are provided.

A geological analysis system, device, and method using x-ray fluorescence and spectroscopy are provided. The geological analysis system includes a sample tray which holds the geological sample materials, and sensors including an X-ray fluorescence (XRF) unit and spectrometer. The sample tray includes chambers formed in an upper surface, ports, and passages, each providing communication between an interior of a chamber and an interior of a port. The ports are configured to be attachable to vials. The system positions the sample tray with respect to the sensors for sensing one or more properties of geological sample materials in the sample tray.

A geological analysis system, device, and method using x-ray fluorescence and spectroscopy are provided. The geological analysis system includes a sample tray which holds the geological sample materials, and sensors including an X-ray fluorescence (XRF) unit and spectrometer. The sample tray includes chambers formed in an upper surface, ports, and passages, each providing communication between an interior of a chamber and an interior of a port. The ports are configured to be attachable to vials. The system positions the sample tray with respect to the sensors for sensing one or more properties of geological sample materials in the sample tray.

A mercury emissions monitor includes a mercury sensor tape configured to be fed in a reel-to-reel manner between first and second tape reels, wherein the mercury sensor tape includes a thin metallic film configured to form an amalgam with detected mercury. A mercury collection unit is configured to receive into a chamber a sample of a gas containing mercury, wherein the mercury collection unit is further configured to permit passage of portions of the mercury sensor tape through the chamber containing the gas sample so that the amalgam is formed with the thin metallic film. A mercury analysis unit includes a total reflection x-ray fluorescence (“TXRF”) system configured to perform a TXRF analysis of the amalgam, wherein the mercury analysis unit is configured to permit passage of the mercury sensor tape within a proximity of an XRF detector of the TXRF system. The mercury collection unit and the mercury analysis unit are positioned between the first and second tape reels so that the mercury sensor tape can move in a continuous manner from the first tape reel through the chamber of the mercury collection unit, then within sufficient proximity to the XRF detector, to be then taken up onto the second tape reel.

A mercury emissions monitor includes a mercury sensor tape configured to be fed in a reel-to-reel manner between first and second tape reels, wherein the mercury sensor tape includes a thin metallic film configured to form an amalgam with detected mercury. A mercury collection unit is configured to receive into a chamber a sample of a gas containing mercury, wherein the mercury collection unit is further configured to permit passage of portions of the mercury sensor tape through the chamber containing the gas sample so that the amalgam is formed with the thin metallic film. A mercury analysis unit includes a total reflection x-ray fluorescence (“TXRF”) system configured to perform a TXRF analysis of the amalgam, wherein the mercury analysis unit is configured to permit passage of the mercury sensor tape within a proximity of an XRF detector of the TXRF system. The mercury collection unit and the mercury analysis unit are positioned between the first and second tape reels so that the mercury sensor tape can move in a continuous manner from the first tape reel through the chamber of the mercury collection unit, then within sufficient proximity to the XRF detector, to be then taken up onto the second tape reel.

A pattern inspection apparatus includes a column to scan a substrate on which a pattern is formed, using multi-beams composed of a plurality of electron beams, a first stage to be able to move up to a first stroke by which an entire surface of an inspection region of the substrate can be irradiated with the multi-beams, a second stage, arranged on the first stage, to be able to move up to a second stroke sufficiently shorter than the first stroke and to place the substrate thereon, and a detector to detect secondary electrons emitted from the substrate because the substrate is irradiated with the multi-beams.