G01N23/2204

Automated SEM nanoprobe tool

Aspects of the present disclosure provide an apparatus comprising a primary beam column configured to direct a primary beam of energetic particles onto a location of interest on a sample containing one or more integrated circuit structures, a detector configured to produce a signal in response to detection of secondary charged particles generated as a result of an interaction between the primary beam of energetic particles and the location of interest, and a signal processor coupled to the detector configured to measure the transient behavior of generation of the secondary charged particles from the signal produced by the detector, and a characterizing module configured to characterize the location of interest by comparing the measured transient behavior to a predetermined reference transient behavior. The detector has a response that is fast enough to detect a transient behavior of generation of the secondary charged particles.

Autonomous microfluidic device for sample preparation

The microfluidic device has a first reservoir that preferably includes a first liquid. The first liquid is being held by a capillary stop valve in the first reservoir. A second reservoir is in fluid communication with the first reservoir. The second reservoir has a second liquid and a sample support disposed therein. The second reservoir has an inlet opening defined therein. A draining unit is adjacent to the second reservoir. The draining unit is in fluid communication with the second reservoir. The draining unit has a first absorption member disposed therein.

Multimodality Multi-Axis 3-D Imaging With X-Ray
20170309063 · 2017-10-26 · ·

Methods and devices are disclosed for the imaging of a biological sample from all rotational perspectives in three-dimensional space and with multiple imaging modalities. A biological sample is positioned on an imaging stage that is capable of full 360-degree rotation in at least one of two orthogonal axes. Positioned about the stage are imaging modules enabling the recording of a series of images in multiple modalities, including reflected visible light, fluorescence, X-ray, ultrasound, and optical coherence tomography. A computer can use the images to construct three-dimensional models of the sample and to render images of the sample conveying information from one or more imaging channels. The rendered images can be displayed for an operator who can manipulate the images to present additional information or viewing angles of the sample. The image manipulation can be with touch gestures entered using a sterilizable or disposable touch pen.

Acquisition and processing of data in a tomographic imaging apparatus

A method of investigating a specimen using a tomographic imaging apparatus comprising: A specimen holder, for holding the specimen; A source, for producing a beam of radiation that can be directed at the specimen; A detector, for detecting a flux of radiation transmitted through the specimen from the source; A stage apparatus, for producing relative motion of the source with respect to the specimen, so as to allow the source and detector to image the specimen along a series of different viewing axes; A processing apparatus, for assembling output from the detector into a tomographic image of at least part of the specimen,
which method comprises the following steps: Considering a virtual reference surface that surrounds the specimen and is substantially centered thereon; Considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to said series of viewing axes; Choosing discrete viewing axes in said series so as to cause said set to comprise a two-dimensional lattice of points located areally on said reference surface in a substantially uniform distribution.

Acquisition and processing of data in a tomographic imaging apparatus

A method of investigating a specimen using a tomographic imaging apparatus comprising: A specimen holder, for holding the specimen; A source, for producing a beam of radiation that can be directed at the specimen; A detector, for detecting a flux of radiation transmitted through the specimen from the source; A stage apparatus, for producing relative motion of the source with respect to the specimen, so as to allow the source and detector to image the specimen along a series of different viewing axes; A processing apparatus, for assembling output from the detector into a tomographic image of at least part of the specimen,
which method comprises the following steps: Considering a virtual reference surface that surrounds the specimen and is substantially centered thereon; Considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to said series of viewing axes; Choosing discrete viewing axes in said series so as to cause said set to comprise a two-dimensional lattice of points located areally on said reference surface in a substantially uniform distribution.

X-RAY APPARATUS
20170234810 · 2017-08-17 ·

An equipment mount for an x-ray apparatus is disclosed. The mount comprises a main shield element, a peripheral shield element and a secondary shield element arranged to permit a mounting element to pass through the main shield element in a shielded manner. A support apparatus for an x-ray apparatus is also disclosed. The support apparatus comprises a separable bearing for translating a support part between a first position and a second position and an elevator mechanism for translating the support part from the second position to a third position, thereby separating the bearing. A manipulator stage for an x-ray apparatus is also disclosed. The stage comprises a first support structure arranged to support a sample stage and supported at first and second positions either side of the sample stage by second and third support structures, the second and third support structures being configured to allow the first support structure to raise and lower while remaining supported at both ends.

MICROREACTOR FOR USE IN MICROSCOPY
20170236685 · 2017-08-17 ·

An improved microreactor for use in microscopy, use of said microreactor, and a microscope comprising said reactor. The present invention is in the field of microscopy, specifically in the field of electron and focused ion beam microscopy (EM and FIB), and in particular Transmission Electron Microscopy (TEM). However its application is extendable in principle to any field of microscopy, especially wherein characteristics of a (solid) specimen (or sample) are studied in detail, such as during a reaction.

X-RAY THIN FILM INSPECTION DEVICE

An X-ray thin film inspection device of the present invention includes an X-ray irradiation unit 40 installed on a first rotation arm 32, an X-ray detector 50 installed on a second rotation arm 33, and a fluorescence X-ray detector 60 for detecting fluorescence X-rays generated from an inspection target upon irradiation of X-rays. The X-ray irradiation unit 40 includes an X-ray optical element 43 comprising a confocal mirror for receiving X-rays radiated from an X-ray tube 42, reflects plural focused X-ray beams monochromatized at a specific wavelength and focuses the plural focused X-ray beams to a preset focal point, and a slit mechanism 46 for passing therethrough any number of focused X-ray beams out of the plural focused X-ray beams reflected from the X-ray optical element 43.

Method and System for Stack Monitoring of Radioactive Nuclides
20220034827 · 2022-02-03 ·

A system and method for monitoring one or more radioactive nuclides present in a stack flow consist of a first detector having a predetermined first sensitivity to gamma radiation and a second detector having a predetermined second sensitivity to gamma radiation and also a predetermined sensitivity to beta radiation. An enclosure proximal to the second detector defines a detection volume and enables the use of calibration factors which are independent of the geometry and material composition of a stack duct. A signal processor with energy window discrimination analyzes the signals from the two detectors. The use of two or more energy windows enables the identification of the nuclide species present in the stack flow and an accurate background-corrected measurement of the released radiation activity concentration for each of the identified nuclide species.

Method and System for Stack Monitoring of Radioactive Nuclides
20220034827 · 2022-02-03 ·

A system and method for monitoring one or more radioactive nuclides present in a stack flow consist of a first detector having a predetermined first sensitivity to gamma radiation and a second detector having a predetermined second sensitivity to gamma radiation and also a predetermined sensitivity to beta radiation. An enclosure proximal to the second detector defines a detection volume and enables the use of calibration factors which are independent of the geometry and material composition of a stack duct. A signal processor with energy window discrimination analyzes the signals from the two detectors. The use of two or more energy windows enables the identification of the nuclide species present in the stack flow and an accurate background-corrected measurement of the released radiation activity concentration for each of the identified nuclide species.