An x-ray microscopy method that obtains a classification of different particles by distinguishing between different material phases through a combination of image processing involving morphological edge enhancement and possibly resolved absorption contrast differences between the phases along with optional wavelet filtering.

Charged particle assessment tools and inspection methods are disclosed. In one arrangement, a condenser lens array divides a beam of charged particles into a plurality of sub-beams. Each sub-beam is focused to a respective intermediate focus. Objective lenses downstream from the intermediate foci project sub-beams from the condenser lens array onto a sample. A path of each sub-beam is substantially a straight line from each condenser lens to a corresponding objective lens.

Charged particle assessment tools and inspection methods are disclosed. In one arrangement, a condenser lens array divides a beam of charged particles into a plurality of sub-beams. Each sub-beam is focused to a respective intermediate focus. Objective lenses downstream from the intermediate foci project sub-beams from the condenser lens array onto a sample. A path of each sub-beam is substantially a straight line from each condenser lens to a corresponding objective lens.

An apparatus for analyzing a core sample obtained from a subterranean formation includes a neutron generator, a plurality of detectors, a computed tomography scanner, an information processing device, and a transport system. The neutron generator can operate in a pulsed mode and emit neutrons into the core sample.

An apparatus for analyzing a core sample obtained from a subterranean formation includes a neutron generator, a plurality of detectors, a computed tomography scanner, an information processing device, and a transport system. The neutron generator can operate in a pulsed mode and emit neutrons into the core sample.

An analyzer includes a wavelength-dispersive X-ray spectrometer and a control unit that controls the wavelength-dispersive X-ray spectrometer, the control unit performing: processing of acquiring an analysis result of preparatory analysis performed on a specimen to be analyzed; processing of setting spectroscopic conditions for WDS analysis using the wavelength-dispersive X-ray spectrometer based on the analysis result of the preparatory analysis; and processing of performing the WDS analysis on the specimen to be analyzed under the set spectroscopic conditions.

The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample; scanning said charged particle beam over said sample; and detecting, using a first detector, emissions of a first type from the sample in response to the beam scanned over the sample. Spectral information of detected emissions of the first type is used for assigning a plurality of mutually different phases to said sample. In a further step, a corresponding plurality of different color hues—with reference to an HSV color space—are associated to said plurality of mutually different phases. Using a second detector, emissions of a second type from the sample in response to the beam scanned over the sample are detected. Finally an image representation of said sample is provided.

The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample; scanning said charged particle beam over said sample; and detecting, using a first detector, emissions of a first type from the sample in response to the beam scanned over the sample. Spectral information of detected emissions of the first type is used for assigning a plurality of mutually different phases to said sample. In a further step, a corresponding plurality of different color hues—with reference to an HSV color space—are associated to said plurality of mutually different phases. Using a second detector, emissions of a second type from the sample in response to the beam scanned over the sample are detected. Finally an image representation of said sample is provided.

A valence of a target element of a sample and crystallinity of a sample can be detected with a small device. The analysis device 100 includes: a placement holder 110 for placing a sample S; an X-ray source 11 for irradiating the sample S with X-rays; a first detector 141 for detecting characteristic X-rays generated from the sample S by the irradiation of the X-rays; a second detector 142 for detecting X-rays diffracted by the sample; and a signal processing device 20. The signal processing device 20 detects the valence of the target element of the sample based on the characteristic X-rays detected by the first detector 141, and detects the crystallographic data of the sample based on the X-rays detected by the second detector 142.

Systems and methods of observing a sample using an electron beam apparatus are disclosed. The electron beam apparatus comprises an electron source configured to generate a primary electron beam along a primary optical axis, and a first electron detector having a first detection layer substantially parallel to the primary optical axis and configured to detect a first portion of a plurality of signal electrons generated from a probe spot on a sample. The method may comprise generating a plurality of signal electrons and detecting the signal electrons using the first electron detector substantially parallel to the primary optical axis of the primary electron beam. A method of configuring an electrostatic element or a magnetic element to detect backscattered electrons may include disposing an electron detector on an inner surface of the electrostatic or magnetic element and depositing a conducting layer on the inner surface of the electron detector.