A system for semiconductor manufacturing that uses ultrasonic waves for estimating and monitoring a remaining service lifetime of a consumable element is provided. A consumable element comprises a front side arranged inside a process chamber and a back side, opposite the front side, arranged outside the process chamber. An ultrasonic transducer is arranged on the back side of the consumable element, and directed towards the front side of the consumable element. A monitoring unit is configured to estimate and monitor a remaining service lifetime of the consumable element using the ultrasonic transducer. A method for estimating and monitoring the remaining service lifetime of the consumable element using ultrasonic waves is also provided.

The application provides a device for measuring at least one parameter value of a suspended sediment of a fluid. The device includes a backscattering transducer module, a storage unit, and a calculation unit. The backscattering transducer module comprises a source module and a receiver module. The source module transmits at least three acoustic signals with different fixed characterizing measurement frequencies while the receiver module measures at least three echo level values of echo signals, which correspond with the at least three acoustic signals. The storage unit stores a data set of pre-determined echo level values with a data set of pre-determined suspended sediment parameter values. The calculation unit derives at least one suspended sediment parameter value from the data sets and the at least three echo level values.

The application provides a device for measuring at least one parameter value of a suspended sediment of a fluid. The device includes a backscattering transducer module, a storage unit, and a calculation unit. The backscattering transducer module comprises a source module and a receiver module. The source module transmits at least three acoustic signals with different fixed characterizing measurement frequencies while the receiver module measures at least three echo level values of echo signals, which correspond with the at least three acoustic signals. The storage unit stores a data set of pre-determined echo level values with a data set of pre-determined suspended sediment parameter values. The calculation unit derives at least one suspended sediment parameter value from the data sets and the at least three echo level values.

A fluid device includes: a flow path through which a fluid flows; and an ultrasonic element configured to transmit an ultrasonic wave to the fluid to generate a standing wave in the fluid in the flow path along a first direction orthogonal to a flowing direction of the fluid. The ultrasonic element includes a vibrator having a fluid contact surface that comes into contact with the fluid, and a piezoelectric element that is provided at the vibrator and that is configured to flexurally vibrate the vibrator in a normal direction of the fluid contact surface. When a thickness of the vibrator in the normal direction is t, a sound velocity of a medium of the fluid is C, an average sound velocity of a longitudinal wave transmitted in the vibrator is C′, a dimension of the flow path in the first direction is L, and a mode order of the standing wave is n, the following expression is satisfied.

[00001]$t<\frac{C^{\prime }}{C}\times \frac{L}{2n}$

A fluid device includes: a flow path through which a fluid flows; and an ultrasonic element configured to transmit an ultrasonic wave to the fluid to generate a standing wave in the fluid in the flow path along a first direction orthogonal to a flowing direction of the fluid. The ultrasonic element includes a vibrator having a fluid contact surface that comes into contact with the fluid, and a piezoelectric element that is provided at the vibrator and that is configured to flexurally vibrate the vibrator in a normal direction of the fluid contact surface. When a thickness of the vibrator in the normal direction is t, a sound velocity of a medium of the fluid is C, an average sound velocity of a longitudinal wave transmitted in the vibrator is C′, a dimension of the flow path in the first direction is L, and a mode order of the standing wave is n, the following expression is satisfied.

[00001]$t<\frac{C^{\prime }}{C}\times \frac{L}{2n}$

Apparatus is provided having an acoustic-based air probe with an acoustic source configured to provide an acoustic signal into a mixture of concrete; and an acoustic receiver configured to be substantially co-planar with the acoustic source, to respond to the acoustic signal, and to provide signaling containing information about the acoustic signal injected into the mixture of concrete.

An outer part for a device which is attachable thereto as a housing and/or an attachment part, a first reflective surface and a second reflective surface being formed on the outer part so that at least one signal emitted by an optical and/or acoustic source is directly or indirectly deflectable onto at least one detector surface of an optical and/or acoustic detector, an optical path being configured as a cavern or continuous recess in the outer part or as a depression of a boundary surface of the outer part, the optical path having at least one opening via which at least one substance is transferable into the optical path, and the at least one signal being deflectable into the optical path to the second reflective surface which is formed at a second end of the optical path with the first reflective surface at a first end of the optical path.

An outer part for a device which is attachable thereto as a housing and/or an attachment part, a first reflective surface and a second reflective surface being formed on the outer part so that at least one signal emitted by an optical and/or acoustic source is directly or indirectly deflectable onto at least one detector surface of an optical and/or acoustic detector, an optical path being configured as a cavern or continuous recess in the outer part or as a depression of a boundary surface of the outer part, the optical path having at least one opening via which at least one substance is transferable into the optical path, and the at least one signal being deflectable into the optical path to the second reflective surface which is formed at a second end of the optical path with the first reflective surface at a first end of the optical path.

An air bubble sensor has a holder at which at least one ultrasonic sensor is arranged to detect air bubbles and/or gas bubbles in a flowing liquid, wherein a flow passage which has connection pieces is integrated into the holder.

An air bubble sensor has a holder at which at least one ultrasonic sensor is arranged to detect air bubbles and/or gas bubbles in a flowing liquid, wherein a flow passage which has connection pieces is integrated into the holder.