A MEMS device for detecting particulate and gases in the air, comprising: a first semiconductor body; a second semiconductor body with a first surface facing a first surface of the first semiconductor body; and a first spacer element and a second spacer element, which extend between the first surfaces of the semiconductor bodies so as to arrange them at a distance apart from one another and define a first duct. The MEMS device further comprises at least one of the following: a first particulate sensor comprising a first emitter unit for generating acoustic waves in the first duct, and a first particulate-detection unit for detecting the particulate, the first emitter unit and the first particulate-detection unit facing one another through the first duct; and a first gas sensor, which faces the first duct and is configured to detect said gases in the air present in the first duct.

A MEMS device for detecting particulate and gases in the air, comprising: a first semiconductor body; a second semiconductor body with a first surface facing a first surface of the first semiconductor body; and a first spacer element and a second spacer element, which extend between the first surfaces of the semiconductor bodies so as to arrange them at a distance apart from one another and define a first duct. The MEMS device further comprises at least one of the following: a first particulate sensor comprising a first emitter unit for generating acoustic waves in the first duct, and a first particulate-detection unit for detecting the particulate, the first emitter unit and the first particulate-detection unit facing one another through the first duct; and a first gas sensor, which faces the first duct and is configured to detect said gases in the air present in the first duct.

A gas sensor comprises a substrate, a first semiconductor-based sensor element for determining the density and/or viscosity of a gas, which element is arranged above the substrate and which has a resonant element, and a cover arranged above the first sensor element, wherein the substrate and/or the cover has an opening to allow the passage of a gas to the first sensor element.

Disclosed are apparatus and methods for enhancing operation of an ultrasonic sensing device for determining the status of an object near such ultrasonic sensing device. From the ultrasonic sensing device, an emission signal having a current frequency or band in an ultrasonic frequency range is emitted. Ultrasonic signals are received and analyzed to detect one or more objects near or contacting the ultrasonic sensing device. After expiration of a predefined time period of emitting the emission signal, a background noise signal is detected from an environment of the ultrasonic device and background noise metrics are estimated based on the background noise signal. It is then determined whether the current frequency of the emission signal is optimized based on the background noise metrics. A next frequency or band is selected and the emission signal is emitted at the next frequency or band if it is determined that the current frequency or band is not optimum. The operations of detecting, estimating, determining, and selecting are repeated after each time a next frequency or band is selected and the emission signal is emitted at such next frequency or band.

Disclosed are apparatus and methods for enhancing operation of an ultrasonic sensing device for determining the status of an object near such ultrasonic sensing device. From the ultrasonic sensing device, an emission signal having a current frequency or band in an ultrasonic frequency range is emitted. Ultrasonic signals are received and analyzed to detect one or more objects near or contacting the ultrasonic sensing device. After expiration of a predefined time period of emitting the emission signal, a background noise signal is detected from an environment of the ultrasonic device and background noise metrics are estimated based on the background noise signal. It is then determined whether the current frequency of the emission signal is optimized based on the background noise metrics. A next frequency or band is selected and the emission signal is emitted at the next frequency or band if it is determined that the current frequency or band is not optimum. The operations of detecting, estimating, determining, and selecting are repeated after each time a next frequency or band is selected and the emission signal is emitted at such next frequency or band.

A sensor system that combines the sensing application of surface acoustic wave (SAW) sensor and sensor signal transfer though the enclosure wall via acoustic means. The sensor system includes SAW sensor placed inside the enclosure and at least one pair of bulk acoustic wave (BAW) transducers, one mounted inside and second outside the enclosure wall, allowing the interrogation of SAW sensor from outside the enclosure. The external BAW transducer converts interrogation electrical pulse into acoustic pulse which travels though the enclosure wall to the internal BAW transducer. The internal BAW transducer converts the interrogation electrical pulse to electrical pulse and transfers it to SAW sensor. The response of the SAW transducer containing series of electric pulses is converted to the series of acoustic pulses by internal BAW transducer which propagates though enclosure wall. The external BAW transducer converts the series of acoustic pulses into series of electrical pulses and is received by the interrogation circuit for processing.

A detection device, a detecting method for the detection device, and a detecting system are provided. The detection device includes: a first interdigital transducer and a second interdigital transducer, wherein the first interdigital transducer is arranged opposite to the second interdigital transducer, and a surface wave of the first interdigital transducer is transmitted in a direction toward the second interdigital transducer; and a reaction layer arranged between the first interdigital transducer and the second interdigital transducer.

Various liquid cells for use in surface acoustic wave-based sensors are disclosed. The sensor can include a substrate, at least one sensor element, and at least one pair of electrical components. The electrical components can be located on opposite ends of the sensor element. The liquid cell can include a top layer that is configured to cover at least a portion of the pair of electrical components. The liquid cell can also include a fluidic channel. The fluidic channel can be configured to receive a liquid media and is arranged not intersect with any of the pair of electrical components. The liquid cell can also include a plurality of peripheral walls that are configured to form a plurality of air pockets. Each of the plurality of air pockets are configured to form virtual non-physical walls to prevent the liquid media from contacting the at least one sensor element.

Various liquid cells for use in surface acoustic wave-based sensors are disclosed. The sensor can include a substrate, at least one sensor element, and at least one pair of electrical components. The electrical components can be located on opposite ends of the sensor element. The liquid cell can include a top layer that is configured to cover at least a portion of the pair of electrical components. The liquid cell can also include a fluidic channel. The fluidic channel can be configured to receive a liquid media and is arranged not intersect with any of the pair of electrical components. The liquid cell can also include a plurality of peripheral walls that are configured to form a plurality of air pockets. Each of the plurality of air pockets are configured to form virtual non-physical walls to prevent the liquid media from contacting the at least one sensor element.

Disclose herein is a portable platform based on a direct digital synthesizer (DDS) is investigated for the orthogonal SAW sensor, integrating signal synthesis, gain control, phase/amplitude measurement, and data processing in a small, portable electronic system. The disclosed platform allows for simultaneous removal of non-specific binding proteins, and mixing, as well as improved incubation time.