Improved gas leak detection from moving platforms is provided. Automatic horizontal spatial scale analysis can be performed in order to distinguish a leak from background levels of the measured gas. Source identification can be provided by using isotopic ratios and/or chemical tracers to distinguish gas leaks from other sources of the measured gas. Multi-point measurements combined with spatial analysis of the multi-point measurement results can provide leak source distance estimates. These methods can be practiced individually or in any combination.

A portable small-object holding device, comprising: a housing, movable gripper jaws configured to grip and hold a small object; at least one hinge and at least one cog-wheel configured to enable rotating said at least one hinge around its longitudinal axis; and wherein the portable small-object holding device is adapted to enable illuminating the small object when being held within said portable small-object holding device, by a beam of light at least one wavelength. The inspection of the small-object is carried out after inserting the portable small-object holding device via an aperture comprised in a portable apparatus for inspecting small objects, and preferably engaging the portable small-object holding device with the portable apparatus for inspecting small objects.

A mask inspection device and method thereof are provided. In the mask inspection device, an image capturing module is controlled to capture an image of the object to be inspected, and when the captured image does not match a predetermined correction image, a horizontal position of the bearing module which holds the object is adjusted; when the captured image matches the predetermined correction image, a light emission element projects a spot light towards the object, and the image capturing module captures an image in a mask region of the object, so as to produce a mask inspection image. The mask inspection information can be obtained from a two-dimensional image of the mask inspection image, and an abnormal image of the mask inspection image is inspected to generate mask abnormal information.

Improved gas leak detection from moving platforms is provided. Automatic horizontal spatial scale analysis can be performed in order to distinguish a leak from background levels of the measured gas. Source identification can be provided by using isotopic ratios and/or chemical tracers to distinguish gas leaks from other sources of the measured gas. Multi-point measurements combined with spatial analysis of the multi-point measurement results can provide leak source distance estimates. These methods can be practiced individually or in any combination.

Apparatus is provided featuring a signal processor or signal processing module configured to receive signaling containing information about images of an ore sample; and determine information about a Bitumen Content of the ore sample based at least partly on the signaling, including for use in real time ore blend management in a bitumen recovery process related to mined oil sands. The ore sample may be an ore face, and the signaling may contain information about the images of the ore face. The signal processor or signal processing module may be configured to determine a real time ore face ore grade visualization based at least partly on the signaling, and provide corresponding signaling containing information about the real time ore face ore grade visualization, including a composite overlay image.

An inspection device for a substrate includes a support member, a turning table and a first drive device. The turning table includes: a carrier pivotally mounted on a pivot shaft, the carrier having an observation aperture through its thickness direction; and positioning clamps which are mounted on the carrier and are used to retain the display substrate in the range of the observation aperture. The first drive device is in transmission connection with the pivot shaft of the carrier in order to drive the turning table to rotate around the pivot shaft. In use, an omnidirectional inspection of the display substrate can be achieved by turning the turning table. Moreover, the contact between the inspector and the display substrate can be avoided, the risk of damaging the display substrate during appearance inspection can be decreased, and therefore defects of the display substrate caused by appearance inspection can be reduced.

A system includes a vacuum chamber having a wafer chuck therein and side windows slanted relative to the wafer chuck. A wafer stage is positioned below the wafer chuck and configured to rotate the wafer chuck and move the wafer chuck vertically. Illumination optics, including an illumination corrector lens, are configured to receive light and direct the light through an illumination vacuum window of the side windows to an optical spot on the wafer. Collection optics, including a collection corrector lens, are configured to receive the light from the optical spot through a collection vacuum window of the side windows and direct the light to a detector. A transfer module is configured to move the illumination optics and the collection optics parallel to the illumination vacuum window and the collection vacuum window respectively. The illumination corrector lens and the collection corrector lens are configured to reduce chromatic aberration.

A light source apparatus according to the present disclosure includes an input optical system including a first optical member configured to irradiate a target material with excitation light, an output optical system including a second optical member configured to extract light generated by irradiating the target material with the excitation light, a target holding unit configured to hold the target material, an acquiring unit configured to acquire displacement of a surface position of the target material, a driving unit configured to cause relative positions of an optical member and the target holding unit to vary, the optical member including at least one of the first optical member and the second optical member, and a control unit configured to drive the driving unit based on the displacement.

Metrology tools are provided, which comprise both active and passive vibration isolation devices, passive or active isolation systems such as constrained layer dampers, particle impact dampers or liquid impact dampers, and/or noise cancellation transducers, combined in different supporting structures of the metrology tool to dampen and reduce vibrations at a wide range of frequencies and intensities, and to which frequency range spectral analysis and optimization may be applied to determine specific tool configurations according to the provided principles.

A compact Raman spectroscopic analysis device includes a housing that forms an internal accommodation space therein, a light source unit that is disposed within the housing and irradiates light onto a subject, a light receiving unit that is disposed within the housing and receives light reflected or scattered from the subject to obtain a Raman spectrum, and a processor that is disposed within the housing and configured to analyze biological material of the subject based on a peak area value of a Raman spectrum range corresponding to the biological material. The light receiving unit includes a diffraction grating that reflects the reflected or scattered light, a slit through which the reflected light passes, and a light detector.