Method includes positioning a first carrier assembly on a system stage. The carrier assembly includes a support frame having an inner frame edge that defines a window of the support frame. The first carrier assembly includes a first substrate that is positioned within the window and surrounded by the inner frame edge. The first substrate has a sample thereon. The method includes detecting optical signals from the sample of the first substrate. The method also includes replacing the first carrier assembly on the system stage with a second carrier assembly on the system stage. The second carrier assembly includes the support frame and an adapter plate held by the support frame. The second carrier assembly has a second substrate held by the adapter plate that has a sample thereon. The method also includes detecting optical signals from the sample of the second substrate.

There is an inspection system including multiple inspection units configured to inspect substrates, wherein each of the inspection units includes: a tester configured to inspect a substrate; a moving part configured to hold and move the substrate relative to the tester; and a frame structure configured to accommodate the tester and the moving part, wherein the frame structure of one inspection unit includes: a first frame to be connected to a frame structure of another inspection unit; and a second frame that accommodates at least the moving part and is configured to move relative to the first frame to extract the moving part from the first frame.

A method of operating an electronic device that is configured to support manufacturing a semiconductor device includes (i) selecting a height of a stage of the electronic device that is configured to hold the semiconductor device, (ii) generating white light by using a light source of the electronic device, (iii) generating light of a selected wavelength by filtering the white light using a monochromater of the electronic device, (iv) emitting the light of the selected wavelength to the semiconductor device using a beam splitter of the electronic device, and (v) capturing reflection light reflected from the semiconductor device using a camera of the electronic device.

The invention concerns an apparatus for scanning the optical properties of materials using a stationary sample stage and a dual-axis rotational system. The apparatus includes motors for azimuthal and polar rotation, supporting an optical system with adjustable lenses and filters to collect data from multiple angles. This design is particularly advantageous for photo-excited materials using linearly polarized sources, as it maintains static pump polarization, eliminating the need for additional motors or optical elements to align the pump with the sample's rotation. This avoids complications with halfwave plates and broadband retarders, which may not preserve linear polarization across all wavelengths. The modular system accommodates various detectors, ensuring versatility while enabling precise, high-resolution spectral imaging. The stationary sample stage prevents alignment issues and distortion, providing consistent and accurate measurements of materials' optical properties across a range of experimental setups.

A Raman spectroscopic analysis device includes a housing that forms an internal accommodation space therein, a light source unit that is disposed within the housing and irradiates light onto a subject, a light receiving unit that is disposed within the housing and receives light reflected or scattered from the subject to obtain a Raman spectrum, and a processor that is disposed within the housing and configured to analyze biological material of the subject based on a peak area value of a Raman spectrum range corresponding to the biological material. The light receiving unit includes a diffraction grating that reflects the reflected or scattered light, a slit through which the reflected light passes, and a light detector.

A system and method for capturing ice particles in a vacuum is provided. The system includes a clamshell apparatus. The clamshell includes a stand and a base positioned on top of the stand. A pair of linear actuators is operatively connected to the stand and a lid. The lid is operatively connected to the based movable between an open and closed position. The lid includes a grid with a plurality of apertures. An ultralight gel is positioned within the plurality of apertures and a soft metal sheet positioned behind the grid and the ultralight gel.

In a spectroscopic analysis system, a broadband light source emits infra-red, visible or ultra-violet light which is transmitted through a fluid in a sample cell to a broadband detector. Changes in transmitted intensity are related to measurand in the fluid. A rotatable optical modulator or chopper, driven by an electric motor and located in the optical path, has light-transmissive optical elements, and non-transmissive regions. A non-contact magnetic field generator applies a magnetic field to the modulator or chopper to damp or brake the rotation. In an aspect, the modulator is an electrically conductive, non-ferromagnetic wheel, disc or cylinder in which eddy currents are induced. Optical elements may be apertures, filters, cuvettes, etc. A Hall effect sensor, rotary encoder, optical switch, etc. may determine angular speed or position of the modulator, and a PID controller may be used to maintain rotation speed at a setpoint by modulating an electromagnetic field generator.

The present invention provides a dimensional measurement apparatus. The apparatus includes at least one light source, camera means spaced apart from and directed towards said light source, a platform located intermediate said light source and camera means, arranged to receive an article thereon to be measured by said apparatus, in use; and computing means in communication with at least said light source and camera means. The light source, upon communication with the computing means, is arranged in use to illuminate in portions or regions behind the article being measured with respect to the camera means, which correspond with edges and/or an outer profile of that article, as detected by the camera means and communicated to the light source via the computing means.

A system includes a vacuum chamber having a wafer chuck therein and side windows slanted relative to the wafer chuck. A wafer stage is positioned below the wafer chuck and configured to rotate the wafer chuck and move the wafer chuck vertically. Illumination optics, including an illumination corrector lens, are configured to receive light and direct the light through an illumination vacuum window of the side windows to an optical spot on the wafer. Collection optics, including a collection corrector lens, are configured to receive the light from the optical spot through a collection vacuum window of the side windows and direct the light to a detector. A transfer module is configured to move the illumination optics and the collection optics parallel to the illumination vacuum window and the collection vacuum window respectively. The illumination corrector lens and the collection corrector lens are configured to reduce chromatic aberration.

A Raman signal analysis device, which enables miniaturization of the device and non-invasive continuous monitoring of blood glucose level, includes a housing that forms an internal accommodation space therein; one or more light source units that are disposed within the housing and irradiate light onto a subject; a light receiving unit that obtains a Raman signal of light reflected or scattered from the subject using an optical filter array and an optical detection component array; and a processor configured to analyze biological information of the subject based on the Raman signal acquired by the light receiving unit.