A method of X-ray analysis measures X-ray diffraction in transmission. In order to carry out quantitative measurements, a background measurement is taken slightly away from the diffraction peak and the ratio of measured intensities used to correct for variations in sample composition.

The present disclosure concerns an electron microscopy method, including the emission of a precessing electron beam and the acquisition, at least partly simultaneous, of an electron diffraction pattern and of intensity values of X rays.

A multi-electron beam inspection apparatus includes a multi-detector that includes a plurality of detection sensors each of which detects a secondary electron beam emitted due to that a target object is irradiated with a primary electron beam individually preset in multiple secondary electron beams emitted because the target object is irradiated with multiple primary electron beams, a reference image data generation circuit that generates reference image data of a position irradiated with each primary electron beam, based on design data serving as a basis of the pattern formed on the target object, a synthesis circuit that synthesizes, for each primary electron beam, the reference image data of the position irradiated with a primary electron beam concerned and portions of reference image data of positions irradiated with other primary electron beams different from the primary electron beam concerned, and a comparison circuit that compares synthetic reference image data having been synthesized, and secondary electron image data based on a value detected by the detection sensor which detects a secondary electron beam due to irradiation with the primary electron beam concerned.

The purpose of the present invention is to provide a pattern measurement device for quantitatively evaluating a pattern formed using a directed self-assembly (DSA) method with high accuracy. The present invention is a pattern measurement device for measuring distances between patterns formed in a sample, wherein the centroids of a plurality of patterns included in an image are determined; the inter-centroid distances, and the like, of the plurality of centroids are determined; and on the basis of the inter-centroid distances, and the like, of the plurality of centroids, a pattern meeting a specific condition is distinguished from patterns different from the pattern meeting the specific condition or information is calculated about the number of the patterns meeting the specific condition, the size of an area including the patterns meeting the specific condition, and the number of imaginary lines between the patterns meeting the specific condition.

Methods and devices are disclosed for the tomographic imaging of a biological sample from almost all rotational perspectives in three-dimensional space and with multiple imaging modalities. A biological sample is positioned on an imaging stage that is capable of nearly full 360-degree rotation in at least one of two substantially orthogonal axes. Positioned about the stage is an X-ray imaging module enabling the recording of a series of images. A reflected light imaging module can also be positioned about the stage to enable recording of black and white or color white light images. A computer can use the images to construct three-dimensional models of the sample and to render images of the sample conveying information from one or more imaging channels.

An inspection system includes one or more processors and an infrared (IR) camera operably coupled to the one or more processors. The one or more processors control a microwave transmitter to sequentially emit microwaves having different frequencies within a designated frequency range into an object during a first sweep. The IR camera generates thermal image data of the object after the object is heated by each of the different frequencies of microwaves. The one or more processors analyze the thermal image data and determine a selected frequency within the designated frequency range that provides greater heating of the object than one or more other frequencies in the designated frequency range. The one or more processors also analyze select thermal image data of the object, responsive to heating of the object by the selected frequency of microwaves, to detect an element in the object.

An analysis apparatus comprises: a moveable stage assembly; a sample holder on a top surface of the stage assembly; a first photon source and a first photon detector or detector array, the first photon source being configured to emit a first beam of photons that intercepts the surface of a sample at a first location on the sample and the first photon detector or detector array being configured to detect photons that are emitted from the first location; and a second photon source and a second photon detector or detector array, the second photon source being configured to emit a second beam of photons that intercepts the surface of the sample at a second location on the sample, the second location being spaced apart from the first location, and the second photon detector or detector array being configured to detect photons that are emitted from the second location.

An apparatus (20) for carrying out a quality control on industrial production lines (10), comprising one or more apparatuses (30, 40, 50) for the measurement of properties of a product sample (C) of the aforesaid industrial production lines (10), which supply respective one or more measurement signals, the apparatus (20) comprising a processing module configured for processing the one or more measurement signals and obtaining properties of the product sample (C), the quality control being carried out as a function of said properties of the product sample (C), said one or more apparatuses (30, 40, 50) for the measurement of properties of a product sample (C) comprising: an x-ray fluorescence apparatus (30) that comprises an x-ray source (331), which emits a first x-ray beam (XB, XBC) towards the product sample (C) in a measurement environment, and a particle detector (335), which is configured for receiving a second x-ray beam (XBR) scattered by the product sample (C) and generating a first received signal supplied within the set of said respective one or more measurement signals. The apparatus (20) further comprises an optical-spectroscopy apparatus, preferably operating in the near infrared (40), which comprises a radiation source operating in the near infrared (NIR), which emits a first optleal-radiation beam towards a product sample (C), and an optical sensor for receiving a second optleal-radiation beam scattered by the product sample (C) and generating a second received signal supplied within the set of said respective one or more measurement signals.

An apparatus (100) for analysing a sample (101) comprising a drill core sample or drill cuttings is provided. The apparatus comprises an X-ray geological structure data unit configured to scan the sample to obtain a data set indicating a volume of the sample, a fluorescence detector (109) configured to measure fluorescent radiation emanating from the sample (101) when irradiated by the X-ray beam, and a weighing unit (105) configured to weigh the sample. The apparatus further comprises a processing unit (104) configured to calculate a density of the sample (101) based on the data set obtained by the X-ray geological structure data unit, the fluorescent radiation measured by the fluorescence detectors, and the weight provided by the weighing unit.

The present invention relates a security screening device, comprising: a radiation generator for respectively generating X-rays and neutron beams and irradiating same toward an inspection object; an inspection object transfer unit for changing the position of the inspection object; a radiation detector configured to respectively detect X-rays and neutron beams transmitted through the inspection object; and a gamma ray detector installed adjacent to the inspection object and configured to detect a gamma signal generated from the inspection object, wherein the radiation detector acquires image information of the inspection object by using radiation information detected from the X-rays and neutron beams that have passed through the inspection object, and the gamma ray detector analyzes the detected gamma ray to detect the location of the inspection object from the analysis of the inspection object and the image information.