Patent classifications
G01N2223/071
Inspection apparatus and inspection method
An inspection apparatus for inspecting an inspection target object, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection target object, and a plurality of X-ray detectors, wherein each of the plurality of X-ray detectors detects X-rays emitted from a foreign substance existing on an inspection target surface of the inspection target object irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.
Multi-function x-ray metrology tool for production inspection/monitoring of thin films and multidimensional structures
An apparatus for integrating metrology and method for using the same are disclosed. The apparatus includes a multi-chamber system having a transfer chamber, a deposition chamber, an etch chamber and a metrology chamber, and a robot configured to transfer a substrate between the deposition chamber or etch chamber and the metrology chamber.
System and Methods for Computing Physical Properties of Materials Using Imaging Data
A method for computing physical properties of materials, such as two-phase and three-phase relative permeabilities through a porous material, is described. The method employs single or multi-scale digital images of a representative sample which capture one or multiple fractionations of a micro-structure size cascade at the respective, required imaging resolutions. At a high resolution, the method computes basic physical properties, such as absolute permeabilities with a numerical method such as computational fluid dynamics solving the Navier-Stokes equation, and capillary pressure with simulations solving Young-Laplace equation. Saturation states of multiple fluids are combined to derive capillary pressure relationships at low resolutions when necessary. Upscaled physical properties, such as upscaled relative permeabilities corresponding to the low resolutions, are subsequently computed using the composition of multiple permeable facies at corresponding upscaled saturations determined by upscaled capillary pressure, honoring upscaled governing laws of the physical property, such as Darcy's law.
Method and apparatus for estimation of heat value using dual energy x-ray transmission and fluorescence measurements
A method and apparatus for estimating a heating value of a biological material. The method includes irradiating of the biological material with X-ray radiation of at least two different energy levels, measuring of an amount of radiation transmitted through the biological material at these energy levels, and measuring fluorescent radiation emitted by the biological material when irradiated at these energy levels. A final estimate of the heating value is then determined based on a preliminary estimate of the heating value of the biological material based on the measured transmitted radiation and a correction value based on the fluorescent radiation.
ANALYZING APPARATUS, SYSTEM, ANALYZING METHOD, AND PROGRAM
An analyzing apparatus includes a collection filter, a two-dimensional sensor, and a calculation unit. The collection filter collects fine particulate matter included in the air. The two-dimensional sensor obtains collection image data including a collection area of the collection filter in which the fine particulate matter is collected. The calculation unit calculates data relating to content of the colored particulate matter included in the collection area based on the collection image data.
Method for temperature monitoring in cryo-electron microscopy
Temperatures of cryo-electron microscopy samples are assessed based on images portions associated with high temperature superconductor (HTSC) areas or other thermal sensor materials that are thermally coupled to or thermally proximate the samples. Such thermal areas can be provided on sample mounts such as metallic grids, carbon films, or on sample stages. In examples using HTSCs, HTSCs having critical temperatures between ?175? C. and ?135? C. are typically used.
Direct Sampling from Phase-Separated Sample for Hydrophobicity Assessment
In one aspect, a method of assessing hydrophobicity of a target analyte is disclosed, which includes introducing a sin-gle-phase system containing a concentration of the target analyte into a mass spectrometer to acquire at least one mass signal associated with the target analyte, introducing a phase-separated system (e.g., a two-phase system) containing substantially the same concentration of the target analyte into the mass spectrometer to acquire at least one mass signal associated with said target analyte, and utilizing a ratio of the intensities of the mass signals to assess hydrophobicity of the target analyte.
Foreign substance analysis system
A foreign substance analysis system capable of accurately and easily analyzing a foreign substance contained in a sample. The foreign substance analysis system includes an infrared spectrum acquisition step of acquiring infrared spectrum information of a sample measured by an infrared spectrophotometer; and a fluorescent X-ray spectrum acquisition step of acquiring fluorescent X-ray spectrum information of the sample measured by a fluorescent X-ray analyzer; and a determination step of determining whether or not an organic element is contained in the sample by comparing a ratio of an intensity of a Compton scattered ray and an intensity of a Rayleigh scattered ray in the fluorescent X-ray spectrum information with a set threshold value.
Portable apparatus for soil chemical characterization
The present invention determines one or more properties of a soil sample by scanning a soil sample using a visible near infrared diffuse reflectance (VisNIR) spectroradiometer, scanning the soil sample using a x-ray fluorescence (PXRF) spectrometer, receiving a diffuse reflectance spectra from the VisNIR spectroradiometer and an elemental data from the PXRF spectrometer, determining one or more properties of the soil sample using one or more processors and a predictive model that relates the diffuse reflectance spectra and the elemental data to the one or more properties, and providing the one or more properties of the soil sample to one or more input/output interface.
Image data processing
A method for processing image data of a sample is disclosed. The method comprises registering a first and a second images of at least partially overlapping spatial regions of the sample and processing data from the registered images to obtain integrated image data comprising information about the sample, said information being additional to that available from said first and second images.