The present invention refers to a method for improving a Transmission Kikuchi Diffraction, TKD pattern, wherein the method comprises the steps of: Detecting a TKD pattern (20b) of a sample (12) in an electron microscope (60) comprising at least one active electron lens (61) focussing an electron beam (80) in z-direction on a sample (12) positioned in distance D below the electron lens (61), the detected TKD (20b) pattern comprising a plurality of image points x.sub.D, y.sub.D and mapping each of the detected image points x.sub.D, y.sub.D to an image point of an improved TKD pattern (20a) with the coordinates x.sub.0, y.sub.0 by using and inverting generalized terms of the form x.sub.D=γ*A+(1−γ)*B and y.sub.D=γ*C+(1−γ)*D wherein

[00001]$\gamma =\frac{Z}{D}$ with Z being an extension in the z-direction of a cylindrically symmetric magnetic field B.sub.Z of the electron lens (61), and wherein A, B, C, D are trigonometric expressions depending on the coordinates x.sub.0, y.sub.0, with B and D defining a rotation around a symmetry axis of the magnetic field B.sub.Z, and with A and C defining a combined rotation and contraction operation with respect to the symmetry axis of the magnetic field B.sub.Z. The invention further relates to a measurement system, computer program and computer-readable medium for carrying out the method of the invention.

A charged particle beam device capable of easily discriminating the energy of secondary charged particles is realized. The charged particle beam device includes a charged particle source, a sample stage on which a sample is placed, an objective lens that irradiates the sample with a charged particle beam from the charged particle source, a deflector that deflects secondary charged particles released by irradiating the sample with the charged particle beam, a detector that detects the secondary charged particles deflected by the deflector, a sample voltage control unit that applies a positive voltage to the sample or the sample stage, and a deflection intensity control unit that controls the intensity with which the deflector deflects the secondary charged particles.

The disclosure relates to a method of examining a sample using a charged particle microscope. The method comprises the steps of detecting using a first detector emissions of a first type from the sample in response to the beam scanned over the area of the sample. Then, using spectral information of detected emissions of the first type, at least a part of the scanned area of the sample is divided into multiple segments. According to the disclosure, emissions of the first type at different positions along the scan in at least one of said multiple segments may be combined to produce a combined spectrum of the sample in said one of said multiple segments. In an embodiment, a second detector is used to detect emissions of a second type, and this is used to divide the area of the sample into multiple regions. The first detector may be an EDS, and the second detector may be based on EM. This way, EDS data and EM data can be effectively combined for producing colored images.

In an image collection system using a transmission electron microscope, a useless collection time to be spent collecting images in each of which particles overlap each other or no particle is contained, and a date volume are reduced. The image collection system includes: a control unit that moves an observation field of view in the transmission electron microscope and overlaps each other electron waves that propagate through spatially different portions within the observation field of view; a photographing unit that acquires the overlapped electron waves as an observation image; and a determination unit that determines whether a particle is present within the observation field of view.

A spin polarimeter includes: a particle beam source or a photon beam source that is a probe for a sample; a sample chamber in which the sample is accommodated; a spin detector that includes a target to be irradiated with an electron generated from the sample by a particle beam or a photon beam from the probe, and a target chamber in which the target is accommodated, and is configured to detect a spin of the sample by detecting an electron scattered on the target; a first exhaust system that is configured to exhaust the sample chamber; a second exhaust system that is configured to exhaust the target chamber; and an orifice that is disposed between the target chamber and the sample chamber.

An improved charged particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus for detecting a thin device structure defect is disclosed. An improved charged particle beam inspection apparatus may include a charged particle beam source to direct charged particles to a location of a wafer under inspection over a time sequence. The improved charged particle beam apparatus may further include a controller configured to sample multiple images of the area of the wafer at difference times over the time sequence. The multiple images may be compared to detect a voltage contrast difference or changes to identify a thin device structure defect.

The present disclosure concerns an electron microscopy method, including the emission of a precessing electron beam and the acquisition, at least partly simultaneous, of an electron diffraction pattern and of intensity values of X rays.

An analyzing apparatus includes a collection filter, a two-dimensional sensor, and a calculation unit. The collection filter collects fine particulate matter included in the air. The two-dimensional sensor obtains collection image data including a collection area of the collection filter in which the fine particulate matter is collected. The calculation unit calculates data relating to content of the colored particulate matter included in the collection area based on the collection image data.

A numerical characterization method for the dispersion state of carbon nanotubes based on fractal dimension is invented. In this method, a SEM image of the dispersion state of carbon nanotube is obtained first, and then is binarized by the ImageJ software to extract the boundary of individual carbon nanotubes or carbon nanotubes agglomerates, and thereby calculating the fractal dimension of the processed image with the assistance of the box-count algorithm. The value of fractal dimension represents quantitatively the abundant information contained in the dispersion state of carbon nanotubes, which is capable of realizing the numerical characterization of the dispersion state of carbon nanotubes. The invention quantifies the dispersion state of carbon nanotubes, and provides a powerful strategy for controlling, comparison and prediction of macro-properties of carbon nanotube based composites.

An electron microscope (EM) preparation and imaging system including an EM device and a sample preparation device for forming a vitreous ice layer containing a liquid sample through vitrification, which are located within a sealable environment. The sample preparation apparatus includes a cryogenically-cooled stage that receives a sample deposit surface, such as a cryo-EM grid, which is cryogenically cooled through direct contact with the stage. A sample dispenser is movable with respect to the stage and is configured to deposit a liquid sample onto the sample deposit surface at a selected rate of deposition. Once the liquid sample is deposited onto the sample deposit surface by the sample dispenser, it is vitrified automatically in place.