A method for imaging a sample by means of an X-ray detector is disclosed, including providing an electron beam interacting with a target to generate X-ray radiation emitted from an X-ray spot on the target, moving the sample relative to the target, deflecting the electron beam such that the X-ray spot is moved over the target simultaneously and in accordance with the movement of the sample, and detecting X-ray radiation emitted from the X-ray spot and interacting with the sample.

A detection system and method for investigating a content of an item to be inspected, comprising an inspection space for receiving said item and a neutron generator for generating a directional beam of energetic neutrons, directed towards said inspection space. A detector is responsive to interaction products coming from said inspection space and impinging substantially along a detection axis upon interaction of said energetic particles with nuclei of material of said item. Said neutron generator is configured to expose said inspection space to a uni-directional beam of energetic neutrons along an interrogation axis through said inspection space. Said directional beam has a smaller cross section than a corresponding cross section of said inspection space and smaller than a corresponding cross section of said item to be inspected. Said detector detects said interaction products along a detection axis upon interaction of said uni-directional beam of energetic neutrons with said item to be inspected.

An X-ray collimator (30) that comprises: a collimator body (31) comprising: a collimation conduit (32) provided with an inlet (320), configured to be connected to an X-ray source (20) for the inlet of a beam (B) of X-rays, and an outlet (321), configured to emit a collimated portion (B1) of the X-ray beam (B); and a derivation conduit (33) inclined with respect to the collimation conduit (32), wherein the derivation conduit (33) is provided with an inlet (330), configured to be connected to the X-ray source (20) for the inlet of a peripheral portion (B2) of the same X-ray beam (B) emitted by the source (20), and an outlet (331); a reference detector (40) fixed to the collimator body (31) and provided with an inlet window (41) facing the outlet (331) of the derivation conduit (33).

Methods and systems for realizing a high radiance x-ray source based on a high density electron emitter array are presented herein. The high radiance x-ray source is suitable for high throughput x-ray metrology and inspection in a semiconductor fabrication environment. The high radiance X-ray source includes an array of electron emitters that generate a large electron current focused over a small anode area to generate high radiance X-ray illumination light. In some embodiments, electron current density across the surface of the electron emitter array is at least 0.01 Amperes/mm.sup.2, the electron current is focused onto an anode area with a dimension of maximum extent less than 100 micrometers, and the spacing between emitters is less than 5 micrometers. In another aspect, emitted electrons are accelerated from the array to the anode with a landing energy less than four times the energy of a desired X-ray emission line.

Disclosed herein is an apparatus for electromagnetic x-ray control. The apparatus comprises a thermionic filament, positioned at a first end of a micro-focus x-ray tube and configured to generate an electron stream. The apparatus also comprises an x-ray generation target, positioned within the micro-focus x-ray tube at a second end of the micro-focus x-ray tube, opposite the first end, to receive the electron stream and to generate x-rays in response to the electron stream impinging on the x-ray generation target. The apparatus further comprises an electromagnetic field element, configured to generate an electromagnetic field that receives the electron stream and operable to vary the electromagnetic field to redirect the electron stream, within the micro-focus x-ray tube, to impinge on the x-ray generation target at variable locations on the x-ray generation target. Each one of the variable locations corresponds to a different one of multiple variations of the electromagnetic field.

An apparatus includes a crystal analyzer positioned relative to an x-ray source on a Rowland circle in a tangential plane and having a Rowland circle radius (R). The crystal analyzer includes crystal planes curved along at least one direction within at least the tangential plane with a radius of curvature substantially equal to twice the Rowland circle radius (2R). The crystal planes are configured to receive x-rays from the x-ray source and to disperse the received x-rays according to Bragg's law. The apparatus further includes a spatially resolving detector configured to receive at least a portion of the dispersed x-rays. The spatially resolving detector includes a plurality of x-ray detection elements having a tunable first x-ray energy and/or a tunable second x-ray energy. The plurality of x-ray detection elements are configured to measure received dispersed x-rays having x-ray energies below the first x-ray energy while suppressing measurements of the received dispersed x-rays above the first x-ray energy and/or to measure the received dispersed x-rays having x-ray energies above the second x-ray energy while suppressing measurements of the received dispersed x-rays below the second x-ray energy. The first and second x-ray energies are tunable in a range of 1.5 keV to 30 keV.

An x-ray imaging/inspection system includes an x-ray source having a plurality of sub-sources in thermal communication with a substrate. The system further includes a first grating positioned to receive at least some of the x-rays from the x-ray source, a stage configured to hold a sample positioned to receive at least some of the x-rays from the x-ray source, at least one x-ray detector, and a second grating having periodic structures. The x-ray source, the first grating, and the second grating are configured such that a ratio of a pitch p.sub.0 of the plurality of sub-sources to a pitch p.sub.2 of the periodic structures of the second grating is substantially equal to a ratio of a distance d.sub.S-G1 between the plurality of sub-sources and the first grating and a distance d.sub.G1-G2 between the first grating and the second grating: (p.sub.0/p.sub.2)=(d.sub.S-G1/d.sub.G1-G2).

Disclosed herein is an x-ray backscatter apparatus for non-destructive inspection of a part. The apparatus comprises an emission shaping mechanism that is configured to receive an electron emission from a cathode and to adjust a shape of the electron emission from a circular cross-sectional shape into a first elliptical cross-sectional shape. The x-ray source further comprises an anode that is configured to convert the electron emission into an unfiltered x-ray emission having a second elliptical cross-sectional shape. The apparatus also comprises an x-ray filter that comprises an emission aperture having a cross-sectional area smaller than an area of the second elliptical cross-sectional shape of the unfiltered x-ray emission. The x-ray filter is located relative to the unfiltered x-ray emission to allow only a portion of the unfiltered x-ray emission to pass through the emission aperture and form a filtered x-ray emission.

An apparatus includes a crystal analyzer positioned relative to an x-ray source on a Rowland circle. The crystal analyzer includes crystal planes curved along at least one direction and configured to receive x-rays from the x-ray source and to disperse the received x-rays according to Bragg's law. The apparatus further includes a spatially resolving detector that includes a plurality of x-ray detection elements having a tunable first x-ray energy and/or a tunable second x-ray energy. The plurality of x-ray detection elements are configured to measure received dispersed x-rays having x-ray energies below the first x-ray energy while suppressing measurements above the first x-ray energy and/or to measure the received dispersed x-rays having x-ray energies above the second x-ray energy while suppressing measurements below the second x-ray energy.

A neutron imaging system that includes a central neutron source configured to produce source neutrons, wherein the central neutron source comprises a beam target, a moderator chamber surrounding at least a portion of the beam target, the moderator chamber housing a moderator, and a re-entrant cone extending into the moderator chamber. The re-entrant cone includes an entrance surface facing the beam target. The entrance surface encloses a cone chamber, isolating the cone chamber from the moderator. Furthermore, the entrance surface is shaped such that source neutrons produced at the beam target impinge the entrance surface with a neutron flux that varies by 10% or less along the entrance surface.