A tolerance error estimating apparatus, method, program, reconstruction apparatus and control apparatus capable of estimating a deviation of a drive axis from a reference position with respect to driving time are provided. A tolerance error estimating apparatus (processing apparatus 300) X-ray analysis apparatus comprises a specific position calculating section 320 for obtaining a specific position of a reference sample at each rotation driving time from X-ray detection images and a deviation amount calculating section 330 for calculating the deviation amount Δx in the x direction and Δy in the y direction of the center position of a rotation drive shaft as the rotation drive axis at each rotation driving time from the reference position based on the specific position, when the z direction of the orthogonal coordinate system fixed to the sample is set the direction parallel to the rotation drive axis.

An X-ray single-pixel camera based on X-ray computational correlated imaging, which belongs to the technical research fields of X-ray computational correlated imaging and X-ray single-pixel imaging. The X-ray single-pixel camera includes: an X-ray modulation system (3), an X-ray modulation control system (4), an X-ray single-pixel detector (5), a main control system unit (6), a time synchronization system (7) and a computational imaging system (8). The main control system unit (6) controls each module through software; the time synchronization system (7) controls synchronization of each module for automatic collection; and the computational imaging system (8) is configured to perform a second-order correlated computation or a compressed sensing computation or a deep learning computation on the signals collected by the X-ray single-pixel detector (5) and a preset modulation matrix, so as to obtain an image of an object under test. The X-ray single-pixel camera based on X-ray computational correlated imaging, provided by the present invention, realizes single-pixel imaging, greatly reduces the sampling number while ensuring the imaging quality, and reduces the X-ray radiation dose in an imaging process.

A radiation imaging system is provided. The system comprises a radiation imaging apparatus including a plurality of pixels for acquiring radiation image data and a detection unit for performing exposure control during radiation irradiation, and a radiation control apparatus configured to control a radiation source that irradiates radiation to the radiation imaging apparatus. The radiation imaging apparatus and the radiation control apparatus transmit signals that relate to exposure control by wireless communication. The radiation imaging apparatus, in a case where an irradiation stop signal indicating that radiation irradiation has been stopped is not received from the radiation control apparatus after a signal instructing to stop radiation irradiation has been transmitted to the radiation control apparatus and until a first time interval has elapsed, transmits a signal instructing to stop radiation irradiation to the radiation control apparatus again.

A system for non-destructive evaluation of an object uses a spherical coordinate system to control two robotic arms. In some examples, the system includes a radiation source coupled to one robotic arm, a radiation detector coupled to the other robotic arm; and a control unit configured to determine, based on input, a first position located on a first surface of a first sphere within the spherical coordinate system; determine, based on the input, a second position located on a second surface of a second sphere within the spherical coordinate system, wherein the second position is located opposite a midpoint of the spherical coordinate system from the first position; and control a motion of the source robotic arm and the detector robotic arm such that the radiation source and the radiation detector move to different ones of the first position and the second position.

An analysis apparatus comprises: a moveable stage assembly; a sample holder on a top surface of the stage assembly; a first photon source and a first photon detector or detector array, the first photon source being configured to emit a first beam of photons that intercepts the surface of a sample at a first location on the sample and the first photon detector or detector array being configured to detect photons that are emitted from the first location; and a second photon source and a second photon detector or detector array, the second photon source being configured to emit a second beam of photons that intercepts the surface of the sample at a second location on the sample, the second location being spaced apart from the first location, and the second photon detector or detector array being configured to detect photons that are emitted from the second location.

A radiation imaging system comprises a radiation imaging apparatus having a plurality of imaging modes, and a control apparatus configured to control imaging of a radiation image with respect to the radiation imaging apparatus. The radiation imaging system comprises: an obtaining unit configured to obtain information with respect to a communication state between the radiation imaging apparatus and the control apparatus; and a display control unit configured to cause a display unit of at least one of the radiation imaging apparatus and the control apparatus to display information indicating a margin in the communication state based on an imaging mode of the radiation imaging apparatus and the information with respect to the communication state.

Methods and systems for performing measurements of semiconductor structures based on high-brightness, Soft X-Ray (SXR) illumination over a small illumination spot size with a small physical footprint are presented herein. In one aspect, the focusing optics of an SXR based metrology system project an image of the illumination source onto a specimen under measurement with a demagnification of at least 1.25. In a further aspect, an illumination beam path from the x-ray illumination source to the specimen under measurement is less than 2 meters. In another aspect, SXR based measurements are performed with x-ray radiation in the soft x-ray region (i.e., 80-3000 eV). In some embodiments, SXR based measurements are performed at grazing angles of incidence in a range from near zero degrees to 90 degrees. In some embodiments, the illumination optics project an image of an illumination source onto a specimen under measurement with a demagnification of 50, or less.

A diffraction system for determining a crystalline structure of a sample collects a series of diffraction frames from a crystal sample illuminated by a beam of photonic or particulate radiation, such as X-rays. A plurality of software modules for processing the detected diffraction frames perform different tasks in refining the collected diffraction data, such as harvesting, indexing, scaling, integration, and structure determination. Output parameters from certain modules are used as input parameters in others, and are exchanged between the modules as they become available. The modules operate simultaneously, and generate successive versions of output parameters as corresponding input parameters are changed until a final result is achieved. This provides a system of structure determination that is fast and efficient.

Provided is a method of analyzing a diffraction pattern of a mixture, the method including: a first step of fitting, through use of a fitting pattern including a term obtained by multiplying a known target pattern indicating a target component by a first intensity ratio, and a term obtained by multiplying an unknown pattern indicating a residual group consisting of one or more residual components by a second intensity ratio, and having the first intensity ratio, the second intensity ratio, and the unknown pattern as fitting parameters, the fitting pattern to the observed pattern by changing the first and the second intensity ratio in a state where the unknown pattern is set to an initial pattern; and a second step of fitting the fitting pattern to the observed pattern by changing the unknown pattern while restricting the changes of the first and the second intensity ratio.

A method for measuring a fiber orientation degree includes: irradiating a sample formed of a composite material containing discontinuous carbon fibers with an X-ray to acquire an X-ray diffraction image; calculating an angle (2θ).sub.A of a peak originating from a crystal face of graphite; calculating a correction coefficient δ of a thickness of the sample; calculating an upper limit (2θ).sub.B of the peak of the crystal face of graphite; calculating a diffraction sensitivity I.sub.C(ϕ) of the peak originating from the crystal face of graphite by correcting an integrating range with the correction coefficient δ and integrating the X-ray diffraction image with respect to a diffraction angle (2θ); and calculating a fiber orientation degree Sd(β) by the method of Hermans from the diffraction sensitivity I.sub.C(ϕ).