Disclosed herein is an x-ray backscatter apparatus for non-destructive inspection of a part. The apparatus comprises an emission shaping mechanism that is configured to receive an electron emission from a cathode and to adjust a shape of the electron emission from a circular cross-sectional shape into a first elliptical cross-sectional shape. The x-ray source further comprises an anode that is configured to convert the electron emission into an unfiltered x-ray emission having a second elliptical cross-sectional shape. The apparatus also comprises an x-ray filter that comprises an emission aperture having a cross-sectional area smaller than an area of the second elliptical cross-sectional shape of the unfiltered x-ray emission. The x-ray filter is located relative to the unfiltered x-ray emission to allow only a portion of the unfiltered x-ray emission to pass through the emission aperture and form a filtered x-ray emission.

The present invention relates to a device for spectroscopic measurements, in particular X-ray diffraction (XRD), temperature-resolved second harmonic generation (TR-SHG) or infrared (IR) measurements, which prevents the formation of condensation (dew) or ice (frost) when carrying out spectroscopic measurements in sub-ambient temperature conditions and to a method of spectroscopic measurements with said device.

An X-ray detector monitoring device capable of detecting a time when an X-ray detector is disabled due to a slow leak is provided. The X-ray detector monitoring device is provided with an X-ray detection element 32 for detecting X-ray intensity, an X-ray detector 30 having a vacuum insulation container 33 in which an X-ray introduction window 31 is formed, a cooling means 60 for cooling the X-ray detection element 32, a detection element temperature sensor 81 mounted on the X-ray detection element 32 to output detection element temperature information T.sub.t by detecting a temperature of an X-ray detection element 32, and a control unit 40 and 70 configured to calculate an output value for controlling the cooling means 60 to output the output value to the cooling means 60 so that the detection element temperature information T.sub.t becomes a preset temperature T.sub.S. The control unit 40 and 70 is configured to detect a vacuum state of the vacuum insulation container 33 based on the output value.

An X-ray imaging system including: an X-ray Talbot imaging apparatus which is provided with an object table, an X-ray source, a plurality of gratings, and an X-ray detector side by side in a direction of an X-ray radiation axis, and irradiates the X-ray detector with an X-ray from the X-ray source through an object and the plurality of gratings to obtain a moire image required for forming a reconstruction image of the object; and an object housing inside which the object is housed and an environmental condition independent of an external environment is set, wherein the object housing is provided detachably with respect to the object table.

An X-ray imaging system including: an X-ray Talbot imaging apparatus which is provided with an object table, an X-ray source, a plurality of gratings, and an X-ray detector side by side in a direction of an X-ray radiation axis, and irradiates the X-ray detector with an X-ray from the X-ray source through an object and the plurality of gratings to obtain a moire image required for forming a reconstruction image of the object; and an object housing inside which the object is housed and an environmental condition independent of an external environment is set, wherein the object housing is provided detachably with respect to the object table.

Provided is an x-ray device capable of suppressing reduction in detection precision. The X-ray device irradiates x-rays on an object and detects X-rays that pass through the object. The X-ray device comprises: an X-ray source that emits X-rays; a stage that holds the object; a detection device that detects at least some of the x-rays that have been emitted from the X-ray source and have passed through the object; a chamber member that forms an internal space wherein the X-ray source, the stage, and the detection device are arranged; and a partitioning section that separates the internal space into a first space wherein the X-ray source is arranged and a second space wherein the detection device is arranged.

A charged particle beam device includes: a detection chamber flange; a detector; a detector holding stand which holds the detector; a first shaft which is slidably inserted into a guide hole and connected to the detector holding stand, the guide hole being provided in the detection chamber flange; a first flange which is attached to the detection chamber flange and has a spherical bearing; a second flange which is supported by the spherical bearing of the first flange; and a second shaft which is slidably inserted into a guide hole provided in the second flange and passes through a through-hole in the detection chamber flange to be connected to the detector holding stand, each of the first shaft and the second shaft being provided with a flow channel of a heat transfer medium for cooling or heating the detector.

An X-ray thin film inspection device according to the present invention has an X-ray irradiation unit 40 mounted in a first rotation arm 32, an X-ray detector 50 mounted in a second rotation arm 33, a fluorescence X-ray detector 60 for detecting fluorescent X-ray occurring from an inspection target due to irradiation of X-ray, a temperature measuring unit 110 for measuring the temperature corresponding to the temperature of the X-ray thin film inspection device, and a temperature correcting system (central processing unit 100) for correcting an inspection position on the basis of the temperature measured by the temperature measuring unit 110.

The present invention relates to a device for spectroscopic measurements, in particular X-ray diffraction (XRD), temperature-resolved second harmonic generation (TR-SHG) or infrared (IR) measurements, which prevents the formation of condensation (dew) or ice (frost) when carrying out spectroscopic measurements in sub-ambient temperature conditions and to a method of spectroscopic measurements with said device.

The device includes a first X-ray source, configured to illuminating a measurement cell with a first beam of X photons; a first detector, placed opposite the first X-ray source along a first illumination axis; a second X-ray source, configured to illuminating the measurement cell with a second beam of X photons simultaneously with the first X-ray source; a second detector, placed opposite the second X-ray source along a second illumination axis; and a tray carrying the first X-ray source, the first detector, the second X-ray source, and the second detector, the tray being rotatable around the cell axis.