A method and system for imaging an object are described herein. A scatter image of the object is generated at a projection angle. In generating the scatter image, a non-grid image of the object is acquired using a radiation source and a detector. An aperture plate is positioned between the object and the detector and a first grid image of the object is acquired. The aperture plate includes a plurality of apertures positioned on a grid. The aperture plate is moved to a second position and a second grid image of the object is acquired. A scatter image of the object is generated based on the non-grid image, the first grid image, and the second grid image and stored.

Methods and systems for reducing the effect of finite source size on illumination beam spot size for Transmission, Small-Angle X-ray Scatterometry (T-SAXS) measurements are described herein. A beam shaping slit having a slender profile is located in close proximity to the specimen under measurement and does not interfere with wafer stage components over the full range of angles of beam incidence. In one embodiment, four independently actuated beam shaping slits are employed to effectively block a portion of an incoming x-ray beam and generate an output beam having a box shaped illumination cross-section. In one aspect, each of the beam shaping slits is located at a different distance from the specimen in a direction aligned with the beam axis. In another aspect, the beam shaping slits are configured to rotate about the beam axis in coordination with the orientation of the specimen.

The present disclosure relates to a collimator. The collimator may include a motor, a transmission unit having a first end and a second end, and a leaf unit having a leaf. The first end of the transmission unit may be connected to the motor and the second end of the transmission unit may be connected to the leaf. The present disclosure also relates to a collimator system. The collimator system may include a leaf module having a leaf, a driving module having a motor configured to drive the leaf, and a processing module to generate a movement profile of the leaf. The movement profile of the leaf may include a first speed during a first stage, a second speed of the leaf during a second stage, and a third speed of the leaf during a third stage.

The X-ray analysis apparatus contains an X-ray generation unit. The X-ray generation unit includes a target plate having a target that is irradiated with an electron beam from an electron beam source and generates X-rays, X-ray convergence optics that converges X-rays generated from the target in conjunction with a movement of the target plate, and a driving unit that changes a position of the target plate or the X-ray convergence optics relative to the electron beam source.

An x-ray-based cased wellbore tubing and casing imaging tool is disclosed, the tool including at least a shield to define the output form of the produced x-rays; a two-dimensional per-pixel collimated imaging detector array; a parallel hole collimator format in one direction that is formed as a pinhole in another direction; Sonde-dependent electronics; and a plurality of tool logic electronics and PSUs. A method of using an x-ray-based cased wellbore tubing and casing imaging tool is also disclosed, the method including at least: producing x-rays in a shaped output; measuring the intensity of backscatter x-rays returning from materials surrounding a wellbore; determining an inner and an outer diameter of tubing or casing from the backscatter x-rays; and converting image data from said detectors into consolidated images of the tubing or casing.

A beam shaping apparatus (10) for use in an X-ray analysis device (40). The beam shaping apparatus processes an input N beam (32) from an X-ray beam source (20), and generates an output beam (34) with an output beam shape for irradiating a sample (112) held by a sample holder (22) of the X-ray analysis device. Movement of the output beam shape is controlled in dependence upon a varying tilt angle (χ) of the sample (112), this defined by a tilt position of the sample holder (22).

There is provided a transmission X-ray diffraction (XRD) apparatus, the transmission XRD apparatus including an X-ray source for generating a direct X-ray beam; sample holder for receiving the sample, the sample being positioned to receive the direct X-ray beam when held by the sample holder; a detector for receiving X-rays transmitted through the sample and outputting an X-ray diffraction pattern therefrom; and an optical element positioned between the X-ray source and the detector, the optical element including a Montel optic and a secondary pin-hole collimator collectively adapted to focus the direct X-ray beam on the detector, wherein a ratio between a dimension of the direct X-ray beam projected on the detector and a sample-to-detector distance is equal or smaller than 1/570. Related methods are also provided.

The present disclosure relates to a collimator. The collimator may include a motor, a transmission unit having a first end and a second end, and a leaf unit having a leaf. The first end of the transmission unit may be connected to the motor and the second end of the transmission unit may be connected to the leaf. The present disclosure also relates to a collimator system. The collimator system may include a leaf module having a leaf, a driving module having a motor configured to drive the leaf, and a processing module to generate a movement profile of the leaf. The movement profile of the leaf may include a first speed during a first stage, a second speed of the leaf during a second stage, and a third speed of the leaf during a third stage.

A method of defining at least one scan parameter for an x-ray scan of a single crystal structure, the method comprising: determining a target orientation of the structure for the scan; and defining different non-zero levels of x-ray exposure for different parts of a scan area based on either or both of the target orientation and characteristics of the structure; and, defining the scan area so that substantially all x-rays of the scan are directed to the structure in the target orientation.

A collimator assembly for an x-ray optical system having a Soller slit for collimation of x-ray radiation with respect to a direction of an axis (z) of the Soller slit, wherein the Soller slit has a plurality of lamellae spaced apart from one another and having lamella planes parallel to one another, is characterized in that the Soller slit comprises a plurality of segments which are arranged along the axis and are separated from one another. The arrangement also has a collimator frame for enclosing and guiding the plurality of segments, and at least one of the plurality of segments is displaceable with respect to the collimator frame and relative to other segments. A simple but nonetheless accurate adjustment of the spectral resolution of an x-ray spectrometer to a respective different analytical application is thus enabled in a compact and cost-effective manner.