A beamstop arrangement for an x-ray-optical system is adjustable in an xy plane perpendicular to a z-direction for optimizing a ratio of useful radiation reaching a surface to interfering radiation of an x-ray beam in the z-direction. The beamstop arrangement comprises a plurality of beamstops of differing size and/or geometry arranged on an exchanging mount, which is installed on a carriage displaceable in the xy plane by means of a drive unit having at least one positioning motor. The multiple beamstops can be located in a vacuum, while the drive motors and all electronic components can be positioned outside the vacuum, so that no heat development takes place in the measurement region. Corruption of the measurement result due to a changed measurement background is thus avoided.

A detector system for an x-ray imaging device includes a detector chassis, a plurality of sub-assemblies mounted to the detector chassis and within an interior housing of the chassis, the sub-assemblies defining a detector surface, where each sub-assembly includes a thermally-conductive support mounted to the detector chassis, a detector module having an array of x-ray sensitive detector elements mounted to a first surface of the support, an electronics board mounted to a second surface of the support opposite the first surface, at least one electrical connector that connects the detector module to the electronics board, where the electronics board provides power to the detector module and receives digital x-ray image data from the detector module via the at least one electrical connector. Further embodiments include x-ray imaging systems, external beam radiation treatment systems having an integrated x-ray imaging system, and methods therefor.

System and method for imaging an integrated circuit (IC). The imaging system comprises an x-ray source including a plurality of spatially and temporally addressable electron sources, an x-ray detector arranged such that incident x-rays are oriented normal to an incident surface of the x-ray detector and a three-axis stage arranged between the x-ray source and the x-ray detector, the three-axis stage configured to have mounted thereon an integrated circuit through which x-rays generated by the x-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the three-axis stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the three-axis stage to acquire a set of intensity data by the x-ray detector as the three-axis stage moves along a three-dimensional trajectory.

An X-ray imaging system includes the following. An X-ray Talbot imaging apparatus includes an X-ray source, a plurality of gratings, and an X-ray detector. An X-ray is irradiated from the X-ray source through the examined target which is an object and the plurality of gratings and to the X-ray detector to obtain a moire image necessary to generate the reconstructed image of the examined target. A first database shows, for each name or type of material, a correlation between information regarding a signal strength in the reconstructed image generated based on the moire image and quality information of the material included in the examined target. A controller estimates as the evaluation index the quality information in the examined target from the reconstructed image based on information regarding the input name or the type of material and input shape information and the first database.

There is disclosed a mobile radiographic imaging apparatus including a component operable to emit radiation for imaging a subject, an arm rotatably connected at a proximal end thereof to a body section of the apparatus, such that it is supported by the body section and can slew relative to the body section about an upright axis, and to a distal end of which said component is connected, and a generator assembly arranged in the body section and including a generator arranged in the casing and electrically connected to said component, the apparatus being configured such that the generator assembly rotates with the arm, about said axis, wherein the generator assembly has a centre of mass which is radially offset from said axis in a second direction that is substantially opposite to said first direction.

A core analysis system having a trailer and an analysis assembly secured to the trailer. The analysis assembly includes an X-ray Fluorescence (XRF) detection subassembly defining a sample analysis area. The analysis assembly further includes a conveyor subassembly configured to selectively deliver one or more core samples to the sample analysis area of the XRF detection subassembly.

The radiation detection device according to the present invention comprises: a sample holding unit; an irradiation unit configured to irradiate a sample held by the sample holding unit with radioactive rays; a detection unit configured to detect radioactive rays generated from the sample; a distance calculation unit configured to calculate a distance from a predetermined base point to an irradiated part, which is to be irradiated with radioactive rays, of the sample held by the sample holding unit; a size specification unit configured to specify a size of the irradiated part on the sample based on the calculated distance; and a display unit configured to display the specified size of the irradiated part.

A method is carried out with the aid of a particle beam microscope which includes a particle beam column for producing a beam of charged particles, the particle beam column having an optical axis. Furthermore, the particle beam microscope includes a holding device for holding the extracted micro-sample. The method includes holding the extracted micro-sample and an adjacent hinge element via the holding device. The micro-sample adopts a first spatial orientation relative to the optical axis. The method also includes producing a bending edge in the hinge element by way of irradiation with a beam of charged particles such that the adjacent micro-sample is moved in space and the spatial orientation of the micro-sample is altered. The method further includes holding the micro-sample in a second spatial orientation relative to the optical axis, wherein the second spatial orientation differs from the first spatial orientation.

A hybrid inspection system of the present invention is an inspection system including a first inspection device (1) for inspecting a sample (11) based on X-ray measurement data obtained by irradiating the sample (11) with X-rays, and a second inspection device (2) for inspecting the sample (11) by a measuring method using no X-rays. The X-ray measurement data obtained by the first inspection device or an analysis result of the X-ray measurement data is output to the second inspection device (2). In the second inspection device (2), the structure of the sample (11) is analyzed by using the X-ray measurement data input from the first inspection device (1) or the analysis result of the X-ray measurement data.

A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.