G01N2223/34

Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
20230075421 · 2023-03-09 ·

An X-ray system includes, first and second X-ray channels (XCs), a spot sizer and a processor. The first XC is configured to: (i) direct a first X-ray beam for producing a spot on a surface of a sample, and (ii) produce a first signal responsively to a first X-ray radiation received from the surface. The spot sizer is positioned at a distance from the surface and is shaped and positioned to set the spot size by passing to the surface a portion of the first X-ray beam. The second XC is configured to: (i) direct a second X-ray beam to the surface, and (ii) produce a second signal responsively to a second X-ray radiation received from the surface, and the processor is configured to: (i) perform an analysis of the sample based on the first signal, and (ii) estimate the size of the spot based on the second signal.

METHOD FOR OPERATING AN X-RAY DEVICE

A method and device for operating an x-ray device including an x-ray emitter and an x-ray detector are provided. An alternating magnetic field is produced and emitted at the x-ray emitter. At least two sensors are included for capturing at least one physical variable correlating with the alternating magnetic field. An alignment of the x-ray detector relative to the x-ray emitter is determined based on the measurement.

Abnormality Detection Device and Fixing Structure
20220010826 · 2022-01-13 ·

There is provided an abnormality detection device and a fixing structure which are suitable for detecting an abnormality of a fastener such as a bolt or a nut. An abnormality detection device detects an abnormality of a fixing structure including a bolt, a nut, and a washer which include a conductor and fix steel plates to each other, and a spacer which includes an insulator and is disposed between the steel plates and the washer, the abnormality detection device including: a transmission antenna that radiates electromagnetic waves to the fixing structure; a reception antenna that receives electromagnetic waves reflected by the fixing structure; and an abnormality detector that changes a frequency of the electromagnetic waves radiated from the transmission antenna to acquire frequency characteristics of standing waves received by the reception antenna and detects an abnormality of the fixing structure by comparing the frequency characteristics with frequency characteristics in a normal state.

Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
11781999 · 2023-10-10 · ·

An X-ray system includes, first and second X-ray channels (XCs), a spot sizer and a processor. The first XC is configured to: (i) direct a first X-ray beam for producing a spot on a surface of a sample, and (ii) produce a first signal responsively to a first X-ray radiation received from the surface. The spot sizer is positioned at a distance from the surface and is shaped and positioned to set the spot size by passing to the surface a portion of the first X-ray beam. The second XC is configured to: (i) direct a second X-ray beam to the surface, and (ii) produce a second signal responsively to a second X-ray radiation received from the surface, and the processor is configured to: (i) perform an analysis of the sample based on the first signal, and (ii) estimate the size of the spot based on the second signal.

Method for operating an x-ray device

A method and device for operating an x-ray device including an x-ray emitter and an x-ray detector are provided. An alternating magnetic field is produced and emitted at the x-ray emitter. At least two sensors are included for capturing at least one physical variable correlating with the alternating magnetic field. An alignment of the x-ray detector relative to the x-ray emitter is determined based on the measurement.

X-RAY COMPUTED TOMOGRAPHY (CT) SCANNER
20240142392 · 2024-05-02 ·

An X-ray computed tomography (CT) scanner includes a plurality of X-Ray sources and detectors mounted about an opening where scanning takes place. The X-Ray sources and detectors are arranged to oscillate back and forth in opposing first and second rotational directions about the opening, or in the same rotational direction about the opening, in order to generate a cross-sectional image of an object located within the opening.

Abnormality detection device and fixing structure

An abnormality detection device and a fixing structure which are suitable for detecting an abnormality of a fastener such as a bolt or a nut are disclosed. An abnormality detection device detects an abnormality of a fixing structure, which includes a conductor and which fix steel plates to each other, and a spacer which includes an insulator and which is disposed between the steel plates and the washer. The abnormality detection device includes a transmission antenna that radiates electromagnetic waves to the fixing structure, a reception antenna that receives electromagnetic waves reflected by the fixing structure, and an abnormality detector that changes a frequency of the electromagnetic waves radiated from the transmission antenna to acquire frequency characteristics of standing waves received by the reception antenna. The abnormality of the fixing structure is detected by comparing the frequency characteristics with frequency characteristics in a normal state.

GENERATION OF FUSED ENVIRONMENTAL AND COMPOSITIONAL INFORMATION
20260044645 · 2026-02-12 ·

A compositional visualization system comprises a sensor to collect contextual information, a particle generator to generate a first stream of one or more types of particles, and a detector to receive a second stream of one or more detectable products. The second stream is generated by interaction of the first stream with the environment. The system further comprises computer-executable instructions to cause the system to transform the received second stream into compositional data, and merge the compositional data with the contextual information to generate a merged digital representation. The merged digital representation can be displayed at one or more devices and can also be used directly to drive autonomous robotic systems.

Method to control gap for sheet manufacturing measurement processes
12601590 · 2026-04-14 · ·

Sensors used in sheet manufacturing environments can be sensitive to the gap between the scanner heads. Nuclear gauges measure both the sheet product and gas in the column between the scanner heads. The gap distance can affect the measurement in a linear or non-linear fashion depending on the sensing principle High frequency vibrations can cause the sensor devices therein to move. Techniques for controlling the sensor gap between operative surfaces on dual scanner heads during measurement operation employs a closed-loop control where piezoelectric actuators are used to maintain a constant gap throughout the scan by closing the error signal on the gap measurement sensor. A system for measuring a property of a continuous sheet includes dual scanner heads housing radiation emitters and receivers. Gap measurement signals energize the actuators that adjust the position of one or both sensor devices to maintain the gap at a desired distance.