An apparatus and method for three-dimensional inspection of an object by X-rays. The apparatus includes an X-ray generator and a digital imaging device spaced from each other by a distance which defines a magnification by 1 on the imaging device. The apparatus also includes a means for moving the X-ray generator and identically the imaging device by unitary movements in two orthogonal directions. Each unitary movement corresponds to an integer number fraction of the side of the imaging device, and obtains, by successive shots after each unitary movement, a matrix set of sub-images overlapping in the plane of extension of the imaging device. Each sub-image has a center with coordinates in a plane of magnification equal to N. An image processing means performs magnification of each sub-image and determines a stretch factor enabling the coincidence of the sub-images representing all or part of a predefined element of interest.

In this X-ray phase imaging apparatus, at least one of a plurality of gratings is composed of a plurality of grating portions arranged along a third direction perpendicular to a first direction along which a subject or an imaging system is moved by a moving mechanism and a second direction along which an X-ray source, a detection unit, and a plurality of grating portions are arranged. The plurality of grating portions are arranged such that adjacent grating portions overlap each other when viewed in the first direction.

A method of inspecting a component using computed tomography is described, the method comprising the steps of: (a) providing a computed tomography (CT) scanner; (b) providing a target component; (c) reviewing the geometry of the component; (d) estimating the best component orientation; (e) orienting the component; (f) scanning the component with the CT scanner; (g) loading CT scan data into 3D image software; (h) registering the best CT scan data; (i) determining acceptable and unacceptable regions of CT scan data; (j) determining additional component orientations; (k) repeating steps (e) through (i) until all regions of CT scan data for the component are acceptable; and (l) creating a merged volume of acceptable CT scan data.

The presently-disclosed technology improves the resolution of an x-ray microscope so as to obtain super-resolution x-ray images having resolutions beyond the maximum normal resolution of the x-ray microscope. Furthermore, the disclosed technology provides for the rapid generation of the super-resolution x-ray images and so enables real-time super-resolution x-ray imaging for purposes of defect detection, for example. A method of super-resolution x-ray imaging using a super-resolving patch classifier is provided. In addition, a method of training the super-resolving patch classifier is disclosed. Other embodiments, aspects and features are also disclosed.

The presently-disclosed technology improves the resolution of an x-ray microscope so as to obtain super-resolution x-ray images having resolutions beyond the maximum normal resolution of the x-ray microscope. Furthermore, the disclosed technology provides for the rapid generation of the super-resolution x-ray images and so enables real-time super-resolution x-ray imaging for purposes of defect detection, for example. A method of super-resolution x-ray imaging using a super-resolving patch classifier is provided. In addition, a method of training the super-resolving patch classifier is disclosed. Other embodiments, aspects and features are also disclosed.

The present disclosure provides a sampling method and sampling apparatus of a scanning device. In at least one example, the sampling method comprises acquiring a ray attenuation variation at each of a plurality of scanning angles of the scanning device, determining a corrected sampling interval at each of the scanning angles of the scanning device by adjusting an initial sampling interval at each of the scanning angles of the scanning device according to the ray attenuation variation at each of scanning angles, and performing actual sampling according to the corrected sampling interval at each of the scanning angles of the scanning device.

For each respective first-phase rotational position of a set of first-phase rotational positions, an imaging system may generate a respective first-phase image. The imaging system may determine, based on an identified region of interest in the respective first-phase image, collimator blade positions for the respective first-phase rotational position. For each respective second-phase rotational position of a set of second-phase rotational positions, the imaging system may determine, based on the collimator blade positions for the first-phase rotational positions, collimator blade positions for the respective second-phase rotational position. The imaging system may generate a respective second-phase image in a second series of images while the test object is at the respective second-phase rotational position and while the collimator blades are at the collimator blade positions for the respective second-phase rotational position. The imaging system may compute, based on the second series of images, tomographic data for the portion of the test object.

The disclosure relates to a method of examining a sample using a charged particle microscope. The method comprises the steps of detecting using a first detector emissions of a first type from the sample in response to the beam scanned over the area of the sample. Then, using spectral information of detected emissions of the first type, at least a part of the scanned area of the sample is divided into multiple segments. According to the disclosure, emissions of the first type at different positions along the scan in at least one of said multiple segments may be combined to produce a combined spectrum of the sample in said one of said multiple segments. In an embodiment, a second detector is used to detect emissions of a second type, and this is used to divide the area of the sample into multiple regions. The first detector may be an EDS, and the second detector may be based on EM. This way, EDS data and EM data can be effectively combined for producing colored images.

The presently-disclosed technology improves the resolution of an x-ray microscope so as to obtain super-resolution x-ray images having resolutions beyond the maximum normal resolution of the x-ray microscope. Furthermore, the disclosed technology provides for the rapid generation of the super-resolution x-ray images and so enables real-time super-resolution x-ray imaging for purposes of defect detection, for example. A method of super-resolution x-ray imaging using a super-resolving patch classifier is provided. In addition, a method of training the super-resolving patch classifier is disclosed. Other embodiments, aspects and features are also disclosed.

An X-ray phase imaging apparatus includes an X-ray source; a detector; a plurality of gratings; a rotation mechanism; an image processor configured to generate a phase contrast image and to generate a preview image prior to capture of the phase contrast image; and a controller configured to control function of displaying on a display the preview image, and function of discriminatively displaying on the display an image coverage area for the phase contrast image that is associated with a relative rotation angle between the plurality of gratings and a subject.