A charged particle beam apparatus using a light guide that improves light utilization efficiency includes a detector including a scintillator for emitting light when a charged particle is incident, a light receiving element, and a light guide for guiding the light from the scintillator to the light receiving element. The light guide includes: an incident surface that faces a light emitting surface of the scintillator and to which the light emitted by the scintillator is incident; an emitting surface that is configured to emit light; and a reflecting surface that is inclined with respect to the incident surface so that the light from the incident surface is reflected toward the emitting surface. The emitting surface is smaller than the incident surface. A slope surface is provided between the incident surface and the emitting surface, faces the reflecting surface, and is inclined with respect to the incident surface.

The electron spectrometer includes an excitation part 100 irradiating a sample with an energy beam, an orbiting part 10 causing electrons emitted from the sample irradiated with the energy beam to orbit, and a detection part 120 detecting the electrons released from the orbiting part 10, in which the orbiting part 10 includes a plurality of pairs of electrodes, the plurality of pairs of electrodes cause the electrons to orbit when an applied voltage is controlled, a part of the plurality of pairs of electrodes are pairs of electrodes to catch which catch the electrons into the orbiting part 10 when an applied voltage is controlled, and a part of the plurality of pairs of electrodes are pairs of electrodes to release which release the electrons from the orbiting part 10 when an applied voltage is controlled.

The present disclosure provides a method for detection of soil heavy metal pollution using an unmanned aerial vehicle (UAV) and an X-ray fluorescence (XRF) technology. Based. Based on hardware equipment such as the UAV, XRF analyzer, and embedded equipment, the present disclosure develops an altitude hold module of the system and a ground-contact monitoring module, and assists the UAV to achieve safe and accurate fixed-point hovering, and develops a driving device for data acquisition to replace manual control and realize the automatic acquisition of XRF data. The data inversion method is realized by using embedded equipment, and after the data is acquired by the portable XRF analyzer near the ground, the algorithm research of inversion processing of contents of heavy metal elements in soil is realized, such that the portable XRF analyzer can automatically and accurately detect the contents of heavy metals in soil at a certain distance.

A charged particle beam apparatus using a light guide that improves light utilization efficiency includes a detector including a scintillator for emitting light when a charged particle is incident, a light receiving element, and a light guide for guiding the light from the scintillator to the light receiving element. The light guide includes: an incident surface that faces a light emitting surface of the scintillator and to which the light emitted by the scintillator is incident; an emitting surface that is configured to emit light; and a reflecting surface that is inclined with respect to the incident surface so that the light from the incident surface is reflected toward the emitting surface. The emitting surface is smaller than the incident surface. A slope surface is provided between the incident surface and the emitting surface, faces the reflecting surface, and is inclined with respect to the incident surface.

An analysis and observation device includes: a component analysis section that performs component analysis of an analyte; an output section that outputs one component analysis result to an analysis history holding section; the analysis history holding section that holds a plurality of component analysis results as an analysis history; and an identifying section that identifies a component analysis result similar to the component analysis result obtained by the component analysis section from among the plurality of component analysis results held in the analysis history holding section. The analysis history holding section holds the analysis history to which the component analysis result has been newly added according to the output of the component analysis result by the output section, and the identifying section identifies a component analysis result similar to the one component analysis result from among results of the component analysis performed by the component analysis section.

An apparatus and method for characterisation of a sample via spectroscopy and/or imaging. The apparatus comprises a first detector for imaging or spectroscopy, a second detector for imaging or spectroscopy, and a toroidal capacitor type electrostatic energy analyser. The toroidal capacitor type electrostatic energy analyser comprises a first and a second entrance aperture arranged such that charged particles emitted from a sample and passing through the first entrance aperture traverse a first trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the first detector, and charged particles emitted from a sample and passing through the second entrance aperture traverse a second trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the second detector. A deflection assembly arranged between the sample and the analyser may be used to direct charged particles emitted from the sample towards the first and/or second entrance aperture of the analyser.

An analyzer includes a wavelength-dispersive X-ray spectrometer and a control unit that controls the wavelength-dispersive X-ray spectrometer, the control unit performing: processing of acquiring an analysis result of preparatory analysis performed on a specimen to be analyzed; processing of setting spectroscopic conditions for WDS analysis using the wavelength-dispersive X-ray spectrometer based on the analysis result of the preparatory analysis; and processing of performing the WDS analysis on the specimen to be analyzed under the set spectroscopic conditions.

According to the present invention, a desired one of multiple beams can be aligned with a small-diameter aperture quickly. A multi-electron beam inspection apparatus includes a beam selection aperture substrate including a first passage hole that passes all the multiple electron beams, a second passage hole through which one of the multiple electron beams is able to pass, a first slit, and a second slit not parallel to the first slit, an aperture moving unit moving the beam selection aperture substrate, a first detector detecting a current of a beam having passed through the first slit and a current of a beam having passed through the second slit, of the multiple electron beams, and a second detector detecting multiple secondary electron beams including reflected electrons, discharged from a substrate, due to application of the multiple electron beams, having passed through the first passage hole, to the substrate. The substrate is inspected based on an output signal from the second detector.

A method for determining a stratigraphic anomaly in a subsurface of the earth includes receiving raw data x, assigning the rock samples to corresponding stratigraphic units of the subsurface, transforming the raw data x to a centred log-ratios clr(x) dataset, calculating p-values with a pairwise sum rank test between populations of the centred log-ratios clr(x) dataset, selecting a set of fingerprint elements from the elements of the rock samples, converting raw concentrations corresponding to the set of fingerprint elements to isometric log-ratios ilr data, determining a number of ilr sub-populations within each stratigraphic unit, applying mixture discriminant analysis to the isometric log-ratios ilr data, using the ilr sub-populations to calculate posterior probabilities of the rock samples, and identifying the stratigraphic anomaly based on the posterior probabilities.

Multivariate machine learning (ML) techniques can be applied to an XRF spectra and mitigate matrix effects and enable simultaneous quantification of composition, even when markers elements or ions of interest are imperceptible in the XRF spectra. Physical (e.g., density) and chemical (e.g., total dissolved solids and hardness) properties of the material can be also quantified using ML techniques.