A MEMS gas sensor includes a photoacoustic sensor including a thermal emitter and an acoustic transducer, the thermal emitter and the acoustic transducer being inside a mutual measurement cavity. The thermal emitter includes a semiconductor substrate and a heating structure supported by the semiconductor substrate. The heating structure includes a heating element. The MEMS gas sensor further includes a chemical sensor thermally coupled to the heating element, and the chemical sensor including a gas adsorbing layer.

A detector cell for a photoacoustic gas sensor comprises a first layer structure, a second layer structure arranged at the first layer structure and comprising a membrane structure, and a third layer structure arranged at the second layer structure. The first layer structure and the third layer structure hermetically enclose a cavity, wherein the membrane structure is arranged in the cavity.

A detector cell for a photoacoustic gas sensor comprises a first layer structure, a second layer structure arranged at the first layer structure and comprising a membrane structure, and a third layer structure arranged at the second layer structure. The first layer structure and the third layer structure hermetically enclose a cavity, wherein the membrane structure is arranged in the cavity.

A detector cell for a photoacoustic gas sensor comprises a first layer structure, a second layer structure arranged at the first layer structure and comprising a membrane structure, and a third layer structure arranged at the second layer structure. The first layer structure and the third layer structure hermetically enclose a cavity, wherein the membrane structure is arranged in the cavity.

A MEMS gas sensor includes a photoacoustic sensor including a thermal emitter and an acoustic transducer, the thermal emitter and the acoustic transducer being inside a mutual measurement cavity. The thermal emitter includes a semiconductor substrate and a heating structure supported by the semiconductor substrate. The heating structure includes a heating element. The MEMS gas sensor further includes a chemical sensor thermally coupled to the heating element, and the chemical sensor including a gas adsorbing layer.

The invention relates to a device (100) and a corresponding method for thermoacoustic sensing, in particular thermoacoustic imaging, the device (100) comprising: a) an irradiation unit (10) configured to generate electromagnetic and/or particle energy exhibiting a first modulation, the first modulation comprising at least one frequency and to continuously emit the energy towards a target (1), whereby acoustic waves are continuously generated in the target, the acoustic waves exhibiting a second modulation, the second modulation comprising the at least one frequency and/or a harmonic frequency of the at least one frequency; b) a detection unit (20) configured to simultaneously detect the acoustic waves exhibiting the second modulation while the energy exhibiting the first modulation is being continuously emitted towards the target (1); and c) a processing unit (30) configured to determine at least one thermoacoustic value of an amplitude and/or a phase of the second modulation of the acoustic waves at the at least one frequency and/or at a harmonic frequency of the at least one frequency. The invention allows for fast and economic thermoacoustic sensing, in particular imaging of a region of interest of an object.

A detector cell for a photoacoustic gas sensor comprises a first layer structure, a second layer structure arranged at the first layer structure and comprising a membrane structure, and a third layer structure arranged at the second layer structure. The first layer structure and the third layer structure hermetically enclose a cavity, wherein the membrane structure is arranged in the cavity.

The invention relates to a device (100) and a corresponding method for thermoacoustic sensing, in particular thermoacoustic imaging, the device (100) comprising: a) an irradiation unit (10) configured to generate electromagnetic and/or particle energy exhibiting a first modulation, the first modulation comprising at least one frequency and to continuously emit the energy towards a target (1), whereby acoustic waves are continuously generated in the target, the acoustic waves exhibiting a second modulation, the second modulation comprising the at least one frequency and/or a harmonic frequency of the at least one frequency; b) a detection unit (20) configured to simultaneously detect the acoustic waves exhibiting the second modulation while the energy exhibiting the first modulation is being continuously emitted towards the target (1); and c) a processing unit (30) configured to determine at least one thermoacoustic value of an amplitude and/or a phase of the second modulation of the acoustic waves at the at least one frequency and/or at a harmonic frequency of the at least one frequency. The invention allows for fast and economic thermoacoustic sensing, in particular imaging of a region of interest of an object.