G01N2223/646

SEGMENTED MULTI-CHANNEL, BACKSIDE ILLUMINATED, SOLID STATE DETECTOR WITH A THROUGH-HOLE FOR DETECTING SECONDARY AND BACKSCATTERED ELECTRONS

A segmented detector device with backside illumination. The detector is able to collect and differentiate between secondary electrons and backscatter electrons. The detector includes a through-hole for passage of a primary electron beam. After hitting a sample, the reflected secondary and backscatter electrons are collected via a vertical structure having a P+/P−/N+ or an N+/N−/P+ composition for full depletion through the thickness of the device. The active area of the device is segmented using field isolation insulators located on the front side of the device.

System and Method for Inspecting Fused Plastic Pipes
20220381701 · 2022-12-01 · ·

A method and apparatus for testing a fuse between plastic pipes within a fusion socket performed in the field includes a source of X-ray radiation and a scanning plate that has pixels that change state when exposed to this radiation. The source of the X-ray radiation is positioned on one side of the fuse and the scanning plate is positioned on another side so that the x-ray radiation passes through the fuse. After exposure, the x-ray image from the scanning plate is analyzed visually or algorithmically to find internal voids, weak fuses, and evidence of movement after the plastic of the fitting/pipes melted and flowed together. With such, the quality of the fitting is evident without cutting or otherwise destroying the fitting and, therefore, only weak or otherwise compromised fittings need be cut and redone.

INSPECTION DEVICE
20220365003 · 2022-11-17 ·

An inspection apparatus includes an image generation unit, an image processing unit and an inspection unit. The image generation unit is configured to develop one dimensional transmission signal of an article to be inspected passing through an irradiation line of electromagnetic wave into a two dimensional image on a memory. The image processing unit is configured to perform image processing on a partial image every time the partial image including a part of article to be inspected is generated in the image generation unit. The inspection unit is configured to inspect a quality of the partial image after image processing, based on one or more processing results of the image processing unit.

SYSTEM, METHOD, AND APPARATUS FOR X-RAY BACKSCATTER INSPECTION OF PARTS
20220365006 · 2022-11-17 ·

Disclosed herein is an x-ray backscatter apparatus for non-destructive inspection of a part. The x-ray backscatter apparatus comprises an x-ray source and an x-ray filter. The x-ray filter comprises a plurality of emission apertures and a detection aperture. The x-ray backscatter apparatus further comprises an x-ray intensity sensor that is fixed to the x-ray filter over the detection aperture such that any portion of an unfiltered x-ray emission filtered into the detection aperture is detected by the x-ray intensity sensor. The x-ray backscatter apparatus additionally comprises an emission alignment adjuster that is operable to adjust a position of the unfiltered x-ray emission relative to the plurality of emission apertures and the detection aperture in response to a position, relative to the detection aperture, of a peak intensity of the unfiltered x-ray emission passing into the detection aperture, detected by the x-ray intensity sensor.

MULTIPLE SECONDARY ELECTRON BEAM ALIGNMENT METHOD, MULTIPLE SECONDARY ELECTRON BEAM ALIGNMENT APPARATUS, AND ELECTRON BEAM INSPECTION APPARATUS
20220365010 · 2022-11-17 · ·

A multiple secondary electron beam alignment method includes scanning a plurality of first detection elements of a multi-detector, which are arrayed in a grid, with multiple secondary electron beams emitted from a surface of a target object on a stage, detecting a plurality of beams including a corner beam located at a corner in the multiple secondary electron beams by the multi-detector, calculating a positional relationship between the plurality of beams including the corner beam and a plurality of second detection elements, which have detected the plurality of beams including the corner beam, in the plurality of first detection elements, calculating, based on the positional relationship, a shift amount for aligning the plurality of first detection elements with the multiple secondary electron beams, and moving, using the shift amount, the multi-detector relatively to the multiple secondary electron beams.

System and method for inspecting defects of structure by using x-ray
11585768 · 2023-02-21 · ·

A method of detecting a defect in a wind turbine blade uses a system that includes an X-ray generator, moved by a first transporting means, that generates X-ray to be irradiated to the wind turbine blade; an X-ray detector, moved by a second transporting means, that detects the X-ray generated by the X-ray generator and transmitted through the wind turbine blade; and a control unit. To detect a defect, the control unit divides virtually the wind turbine blade into a plurality of lengthwise sections based on a thickness profile thereof, receives a location of the X-ray generator, and controls output of the X-ray generator based on the location of the X-ray generator relative to the plurality of lengthwise sections. In particular, the output of the X-ray generator is decreased for a section among the plurality of lengthwise sections that is farther from a hub of the wind turbine blade.

Inspection method and manufacturing method for molded resin product as well as inspection device and manufacturing device for molded resin product

For the purpose of enabling high-accuracy detection as to whether a molded resin product is a non-defective product or a defective product and advance detection of a molded resin product that may suffer deformation or the like in the future, the present invention relates to an inspection method and a manufacturing method for a molded resin product as well as an inspection device and a manufacturing device for a molded resin product, wherein, in an inspection of a joint interface of a molded resin product divided into a plurality of members, the height positions of defect candidates are measured from the results of detecting X rays radiated via at least two paths when the X rays are transmitted through the molded resin product, which makes it possible to detect a defect with high accuracy.

Nondestructive testing system and nondestructive testing method

A non-destructive inspection system includes: a neutron emission unit 12 capable of emitting neutrons pulsed; a neutron detector capable of detecting the neutrons emitted from the neutron emission unit and penetrating through an inspection object; a storage unit storing attenuation information indicating a relationship between a material of the inspection object and attenuation of the neutrons; and a calculation unit capable of calculating distance information indicating a position of a specific portion in the inspection object in accordance with time change information which is information on a change over time in an amount of the neutrons detected by the neutron detector. The calculation unit is capable of generating information related to an amount of the specific portion from information based on the amount of the neutrons according to the time change information, using the distance information and the attenuation information.

UTILIZE MACHINE LEARNING IN SELECTING HIGH QUALITY AVERAGED SEM IMAGES FROM RAW IMAGES AUTOMATICALLY

A method for evaluating images of a printed pattern. The method includes obtaining a first averaged image of the printed pattern, where the first averaged image is generated by averaging raw images of the printed pattern. The method also includes identifying one or more features of the first averaged image. The method further includes evaluating the first averaged image, using an image quality classification model and based at least on the one or more features. The evaluating includes determining, by the image quality classification model, whether the first averaged image satisfies a metric.

Shaped aperture set for multi-beam array configurations

An aperture array for a multi-beam array system and a method of selecting a subset of a beam from a multi-beam array system are provided. The aperture array comprises an array body arranged proximate to a beam source. The array body comprises a plurality of apertures, at least two of the apertures having different geometries. The array body is movable, via an actuator, relative to an optical axis of the beam source, such that a subset of a beam from the beam source is selected based on the geometry of the aperture that is intersected by the optical axis.