A method of evaluating fatigue damage of a rotor mast. The method includes performing an x-ray diffraction (“XRD”) inspection of the rotor mast, assessing fatigue damage sustained by the rotor mast based on results of the XRD inspection, and determining whether the rotor mast is suitable for continued use based on the assessed fatigue damage.

A data generating method includes: an atomic model generating step of generating one or more three-dimensional atomic models corresponding to a nanomaterial to be measured; a three-dimensional data generating step of generating three-dimensional atomic level structure volume data corresponding to the nanomaterial to be measured based on the one or more three-dimensional atomic model; a tilt series generating step of generating a tilt series by simulating three-dimensional tomography for a plurality of different angles in a predetermined angle range for at least some of the three-dimensional atomic level structure volume data; and a three-dimensional atomic structure tomogram volume data generating step of generating a three-dimensional atomic structure tomogram volume data set by performing three-dimensional reconstruction on at least some of the three-dimensional atomic level structure volume data based on the tilt series.

The present disclosure relates to a method for estimating heights of defects in a wafer. The method comprises creating an un-calibrated 3D model of a defect in a wafer, determining one or more attributes associated with the un-calibrated 3D model, transforming the un-calibrated 3D model to a calibrated 3D model, and estimating a height of the defect using the calibrated 3D model. Creating an un-calibrated 3D model corresponds to a defect present in a wafer based on a plurality of Scanning Electron Microscope (SEM) images of the defect. Transforming the un-calibrated 3D model to a calibrated 3D model uses a scaling factor corresponding to the determined one or more attributes associated with the un-calibrated 3D model. A height of the defect is estimated based on the calibrated 3D model of the defect.

Mask inspection apparatuses and/or mask inspection methods are provided that enable quick and accurate inspection of a registration of a pattern on a mask while a defect of the mask and the registration of the pattern are inspected simultaneously. The mask inspection apparatus may include a stage configured to receive a mask for inspection; an e-beam array including a plurality of e-beam irradiators configured to irradiate e-beams to the mask and detectors configured to detect electrons emitted from the mask; and a processor configured to process signals from the detectors. A defect of the mask may be detected through processing of the signal and registrations of patterns on the mask may be inspected based on positional information regarding the e-beam irradiators.

The present disclosure provides an inspection system for contact network damage detection, including: a laser imaging radar, an X-ray transmitter, a booster, an X-ray receiver, and a control circuit board. The laser imaging radar emits a laser beam to a contact line for scanning. A laser radiation reflected by the contact line is received, and a continuous analog signal is generated, which is restored to a real-time image of the contact line. After the analog signal is converted into a digital signal on the control circuit board, a height of the contact line in a horizontal direction is calculated to determine a wear degree on an outer surface of the contact line. The booster boosts electric energy obtained by the pantograph on the contact line and supply power to the X-ray transmitter.

Provided is a method for virtually executing an operation of an energy dispersive x-ray spectrometry (EDS) system in real time production line by analyzing a defect included in a material undergoing inspection based on computer vision, the method including receiving a scanning electron microscope (SEM) image of the material including the defect, extracting an image-feature from the SEM image of the material; classifying the extracted image-feature under a predetermined label, predicting, based on the classified image-feature, an element associated with the defect included in the material and a shape of the predicted element, and grading the defect included in the material based on comparing the predicted element with a predetermined criteria.

A method of failure analysis for locating open circuit defect in a metal layers, comprising: providing a chip sample having a metal layer, with an open circuit defect; delaminating the chip to expose the metal layer; depositing a metal conductive layer on the metal layer; removing a portion of the metal conductive layer to expose the metal layer; depositing a non-conductive protective layer to cover the exposed metal layer and any remaining portions of the metal conductive layer; preparing a TEM slice sample which comprises the metal layer, the remaining portions of the metal conductive layer, and the non-conductive protective layer; performing a VC analysis on the TEM slice sample to determine the defect position of the open circuit defect; and analyzing the defect position of the open circuit defect.

There are described herein methods and system for generating an inspection image of an object from radiographic imaging. The method comprises obtaining a plurality of digital images of the object positioned between a radiation source and a photon beam detector, the digital images taken at different object-detector distances or source-detector distances to create unique grain diffraction patterns in each one of the digital images, and forming the inspection image from image features common to the digital images at a common scale and removing the unique grain diffraction patterns.

A method of evaluating fatigue damage of a rotor mast. The method includes performing an x-ray diffraction (“XRD”) inspection of the rotor mast, assessing fatigue damage sustained by the rotor mast based on results of the XRD inspection, and determining whether the rotor mast is suitable for continued use based on the assessed fatigue damage.

A state change tracking device includes: a hardware processor that non-destructively tracks a state change of an inspection target by a plurality of reconstructed images acquired by imaging the inspection target placed under a specific environment by an X-ray Talbot imaging device over time.