A method of inspecting a semiconductor device includes charging an inspection region of a semiconductor device using a charging electron beam, and scanning the inspection region using a scanning electron beam. The charging of the inspection region includes dividing the inspection region into a charging region and a non-charging region, and charging the charging region using the charging electron beam. The scanning of the inspection region includes irradiating the scanning electron beam to the inspection region, and detecting secondary electrons emitted from the inspection region by the scanning electron beam.

A measurement X-ray CT apparatus calibrates a geometrical positional relationship between a focus of an X-ray source, an X-ray detector, and a rotation center of a rotating table in advance. The measurement X-ray CT apparatus then obtains projection images by irradiating the object to be measured with X-rays to perform a CT scan, and generates a three-dimensional image of the object to be measured by CT reconstruction of the projection images. The measurement X-ray CT apparatus further includes a reference frame that is made of a material and has a structure less susceptible to environmental changes, and sensors that are located on the reference frame and intended to successively obtain calibration values of the geometrical positional relationship between the focus of the X-ray source and the X-ray detector during the CT scan. The calibration values are used as parameters of the CT reconstruction.

The present application relates to a scanning probe microscope comprising a probe arrangement for analyzing at least one defect of a photolithographic mask or of a wafer, wherein the scanning probe microscope comprises: (a) at least one first probe embodied to analyze the at least one defect; (b) means for producing at least one mark, by use of which the position of the at least one defect is indicated on the mask or on the wafer; and (c) wherein the mark is embodied in such a way that it may be detected by a scanning particle beam microscope.

The present embodiments generally relate to methods of non-destructively imaging plant root damage by insect root herbivores and evaluating the efficacy of insecticidal materials associated with the roots of plants against the insect root herbivores, useful for automated high throughput bioassays.

A sealing integrity evaluation device for high-temperature and high-pressure casing-cement ring-formation and a method thereof are provided. the device includes: a high-temperature autoclave, a temperature and pressure control system, and a casing-cement-formation combination; wherein the autoclave realizes alternating temperature and pressure during the experiment; the control system monitors, controls and records the temperature and pressure data; the combination simulates a full size or a compact size casing-cement-formation of a well. Casing-cement-formation combination samples are designed and prepared by simulating working conditions such as alternating temperature, pressure, and casing internal pressure, by testing the channeling and leakage pressure of the first interface and the second interface of combination, analyzing the shape and size of the internal defects, testing the compressive strength, provided a more stable and reliable experimental method and data support for the detection of cementing sheath sealing ability and the evaluation of sealing integrity.

Some embodiments include a radiographic inspection system, comprising: a detector; a support configured to attach the detector to a structure such that the detector is movable around the structure; a radioisotope collimator; and a collimator support arm coupling the detector to the radioisotope collimator such that the radioisotope collimator moves with the detector.

The present disclosure belongs to the technical field of casting equipment, and provides a method and system for adjusting process parameters of a die-casting machine, and a storage medium. The method and the system can receive die wheel type, molten aluminum temperature, interruption time and defect information in real time, respond to the above information one by one according to a set response priority order, select die-casting process parameters, and automatically adjust different process parameters for different products and different working conditions, thereby realizing simultaneous control of multiple die-casting machines, replacing manual adjustment and improving product quality stability and production efficiency.

An X-ray inspection apparatus includes an X-ray source configured to irradiate an article with X-rays in a plurality of energy bands, an X-ray detection unit capable of detecting the X-rays by a photon counting method, an image generation unit configured to generate an overall transmission image corresponding to the X-rays in all of the plurality of energy bands and a transmission image corresponding to the X-rays in some of the plurality of energy bands on the basis of a detection result of the X-rays by the X-ray detection unit, and an inspection unit configured to inspect the article on the basis of the overall transmission image and the transmission image.

A charged particle beam device according to the present invention changes a signal amount of emitted charged particles by irradiating the sample with light due to irradiation under a plurality of light irradiation conditions, and determines at least any one of a material of the sample or a shape of the sample according to the changed signal amount.

The vehicle battery inspection device includes a circular ring-shaped rail 10; a vehicle stand 20 that is arranged inside the rail 10, on the vehicle stand 20 the vehicle can self-travel substantially along the axial direction of the rail 10; a vehicle stand driver 30 that movably supports the vehicle stand 20; an X-ray source 40 configured to be movable along a circumferential direction of the rail 10 and irradiates the vehicle on the vehicle stand 20 with X-rays; an X-ray detector 50 configured to be movable in synchronization with the X-ray source 40 along the circumferential direction while being held in an orientation facing the X-ray source 40 and detects the X-rays to output an X-ray CT image of the battery; and a controller 90 which controls the vehicle stand driver 30 to arrange the battery at a location of inspection with the X-rays.