A sensor apparatus comprising an acoustic assembly arranged to transmit an acoustic signal to a substrate and receive at least part of the acoustic signal after the acoustic signal has interacted with the substrate, a transducer arranged to convert the at least part of the acoustic signal to an electronic signal, and, a processor configured to receive the electronic signal and determine both a topography of at least part of the substrate and a position of a target of the substrate based on the electronic signal. The sensor apparatus may for part of a lithographic apparatus or a metrology apparatus.

A detector that detects an internal state of a plate-shaped object including a fiber-reinforced resin. The detector includes an exciter that applies, to a surface of the object, ultrasonic vibrations of Lamb waves, in a selected frequency range where only a zero-order fundamental wave symmetric mode and a zero-order fundamental wave asymmetric mode of the Lamb waves appear, a vibration detector that detects the applied ultrasonic vibrations propagating in the object, and an internal state estimation calculator that estimates the internal state of the object, by obtaining a propagation time of the ultrasonic vibrations propagating in the object corresponding to each frequency of the Lamb waves, based on the detection result of the vibration detector, estimating the internal state based on a delay time of the propagation time relative to a reference propagation time of the object for each frequency in the selected frequency range, and outputting the estimated internal state.

Methods, systems, and apparatuses are provided for detecting and determining conditions of and conditions within a fluid conduit.

An inspection method according to the present disclosure includes a step of mounting an ultrasonic probe, a step of mounting a pulser receiver, a step of causing the ultrasonic probe to transmit ultrasonic waves, a step of causing the ultrasonic probe to receive a reflected wave of the ultrasonic waves reflected by the wind turbine blade, a step of causing the pulser receiver to acquire reflected-wave data, a step of causing the pulser receiver to wirelessly transmit the reflected-wave data, a step of causing at least one of antennas to receive the wirelessly transmitted reflected-wave data, and a step of causing an information processing device electrically connected to the at least two antennas to perform information processing on the reflected-wave data.

A dual channel nondestructive testing method for a rock bolt and related devices includes: determining a target phase difference and an instantaneous phase difference of the first received signal and the second received signal; determining an integral instantaneous phase difference between the first received signal and the second received signal based on the target phase difference and an instantaneous phase difference; determining a length of the exposed section of the rock bolt, a length of the rock bolt and a position of a grouting defect based on the integral instantaneous phase difference, a first velocity of the acoustic signal propagating in an exposed section of the rock bolt and a second velocity of the acoustic signal propagating in an anchor section of the rock bolt.

An ultrasonic wave inspection device includes: a transmitter that outputs ultrasonic waves toward an inspection object; a receiver that receives at least first ultrasonic waves passed through the inspection object, among the ultrasonic waves output from the transmitter; a member that regulates a second propagation path, the second propagation path being a portion of propagation paths through which the output ultrasonic waves reach the receiver, and the second propagation path being different from a first propagation path through which the first ultrasonic waves reach the receiver; and a signal controller that extracts ultrasonic waves of a predetermined time segment from at least the first ultrasonic waves, the predetermined time segment starting from a time when the first ultrasonic waves is received.

Methods, systems, and apparatuses are provided for detecting and determining conditions of and conditions within a fluid conduit.

Methods, systems, and apparatuses are provided for detecting and determining conditions of and conditions within a fluid conduit.

A method is provided for non-intrusively determining deposits of a fluidic channel. The method includes creating a pressure pulse in a fluidic channel. The method also includes sensing, by one or more sensors, reflections of the pressure pulse; and obtaining, from the one or more sensors, a measured pressure profile based on the sensed reflections of the pressure pulse. A processor then can determine one or more properties of the deposit in the fluidic channel based on the measured pressure profile.

Methods, systems, and apparatuses are provided for detecting and determining conditions of and conditions within a fluid conduit.