The invention relates to a sensor (310), in particular for triggering a vehicle safety device (301), having a movable inertia body (350) which is movable relative to a carrier element (340) of the sensor (310), wherein the inertia body (350) is moved by inertia in relation to the carrier element (340) in the event of an abrupt change in speed or an inclination of the sensor (310) beyond a predetermined extent, and is brought from its inoperative position into its triggering position, through which a triggering position of the sensor (310) is brought about.

According to the invention, it is provided that the sensor (310) is provided with a deactivation device (700) which is suitable, in its deactivating state, to force the inoperative position of the inertia body (350).

A sensor system including a plurality of individual and separate sensor elements. Each of the individual sensor elements is independently functional. The individual sensor elements of the sensor system being formed in one piece from parts of a wafer or a vertically integrated wafer stack. The sensor system including at least one separation structure, in particular a scribe line, between the individual and separate sensor elements.

A sensor system including a plurality of individual and separate sensor elements. Each of the individual sensor elements is independently functional. The individual sensor elements of the sensor system being formed in one piece from parts of a wafer or a vertically integrated wafer stack. The sensor system including at least one separation structure, in particular a scribe line, between the individual and separate sensor elements.

A display device displays displacement of a bridge serving as a structure on a display part in the form of image information that is visually recognizable, based on a displacement amount of the bridge, the displacement amount having been calculated based on an output signal output from an acceleration detector serving as a physical quantity sensor provided on the bridge.

An inertial sensor, includes: a substrate; a fixing portion that is provided on the substrate; a first movable body that faces the substrate and that is displaceable with a first support beam as a first rotation axis; the first support beam that is arranged in a first direction and that couples the first movable body and the fixing portion; a second movable body that is displaceable due to deformation of a second support beam; the second support beam that is arranged in a second direction intersecting the first direction and that couples the first movable body and the second movable body; and a protrusion that is provided on the substrate or the second movable body, overlaps the second movable body in plan view from a third direction and that protrudes toward the second movable body or the substrate.

The invention relates to a sensor (310), in particular for triggering a vehicle safety device (301), having a movable inertia body (350) which is movable relative to a carrier element (340) of the sensor (310), wherein the inertia body (350) is moved by inertia in relation to the carrier element (340) in the event of an abrupt change in speed or an inclination of the sensor (310) beyond a predetermined extent, and is brought from its inoperative position into its triggering position, through which a triggering position of the sensor (310) is brought about. According to the invention, it is provided that the sensor (310) is provided with a deactivation device (700) which is suitable, in its deactivating state, to force the inoperative position of the inertia body (350).

The invention relates to a sensor (310), in particular for triggering a vehicle safety device (301), having a movable inertia body (350) which is movable relative to a carrier element (340) of the sensor (310), wherein the inertia body (350) is moved by inertia in relation to the carrier element (340) in the event of an abrupt change in speed or an inclination of the sensor (310) beyond a predetermined extent, and is brought from its inoperative position into its triggering position, through which a triggering position of the sensor (310) is brought about. According to the invention, it is provided that the sensor (310) is provided with a deactivation device (700) which is suitable, in its deactivating state, to force the inoperative position of the inertia body (350).

A MEMS inertial sensor includes a supporting structure and an inertial structure. The inertial structure includes at least one inertial mass, an elastic structure, and a stopper structure. The elastic structure is mechanically coupled to the inertial mass and to the supporting structure so as to enable a movement of the inertial mass in a direction parallel to a first direction, when the supporting structure is subjected to an acceleration parallel to the first direction. The stopper structure is fixed with respect to the supporting structure and includes at least one primary stopper element and one secondary stopper element. If the acceleration exceeds a first threshold value, the inertial mass abuts against the primary stopper element and subsequently rotates about an axis of rotation defined by the primary stopper element. If the acceleration exceeds a second threshold value, rotation of the inertial mass terminates when the inertial mass abuts against the secondary stopper element.

A high precision rotation sensor comprises an inertial mass suspended from a base wherein the mass is responsive to rotational inputs that apply loads to load-sensitive resonators whose changes in resonant frequency are related to the applied loads.

In an example, an optical gimbal is described, the optical gimbal comprising: a pulse generator configured to generate at least two coherent beam splitting pulses; a first optical beam director configured to tilt the vector of the beam splitting pulses by an angle θ; an atom source configured to allow the beam splitting pulses to manipulate trapped atoms within the atom source; a processor configured to receive the angle θ, and control the pulse generator and the beam director; a detector coupled to the atom source configured to measure a final population of the atoms in different states.