The invention relates to a scanning probe microscope, having: (a) a scanning device for scanning a measurement tip over a surface; (b) a cantilever for the measurement tip, wherein the cantilever has a torsion region; (c) wherein the torsion region is configured such that it undergoes torsion when a control signal is applied and thereby pivots the measurement tip; and (d) a control device for outputting the control signal when the measurement tip scans a region of the surface that can be examined more closely with a pivoted measurement tip than without pivoting the measurement tip.

A measurement system comprising: a radiation source arranged to generated a detection beam; a probe; and a probe positioning system arranged to move the probe from an un-aligned position in which it is not illuminated by the detection beam, to an aligned position in which it is illuminated by the detection beam and the detection beam is reflected by the probe to generate a reflected detection beam. A scanner generates a relative scanning motion between the probe and a sample, the sample being aligned with the probe and interacting with the probe during the relative scanning motion. A sensor detects the reflected detection beam during the relative scanning motion to collect a first data set from the sample. A second device is provided for modifying the sample or obtaining a second data set from the sample. A sample stage is arranged to move the sample in accordance with an offset vector stored in a memory so that it becomes un-aligned from the probe and aligned with the second device.

A scanning probe microscope has a cantilever having a probe at a tip of the cantilever, a driving unit that performs a separating operation for separating one of the sample and the probe from the other at a speed exceeding a response speed of the cantilever from a state where the probe is in contact with the surface of the sample, a determination unit that determines that the probe is separated from the surface of the sample when vibration of the cantilever at a predetermined amplitude is detected at a resonant frequency of the cantilever during the separating operation, and a driving control unit that stops the separating operation when the determination unit determines that the probe is separated from the surface of the sample and relatively moves the probe and the sample to a position where the probe is located on a next measuring point of the sample.

A measurement system comprising: a radiation source arranged to generated a detection beam; a probe; and a probe positioning system arranged to move the probe from an un-aligned position in which it is not illuminated by the detection beam, to an aligned position in which it is illuminated by the detection beam and the detection beam is reflected by the probe to generate a reflected detection beam. A scanner generates a relative scanning motion between the probe and a sample, the sample being aligned with the probe and interacting with the probe during the relative scanning motion. A sensor detects the reflected detection beam during the relative scanning motion to collect a first data set from the sample. A second device is provided for modifying the sample or obtaining a second data set from the sample. A sample stage is arranged to move the sample in accordance with an offset vector stored in a memory so that it becomes un-aligned from the probe and aligned with the second device.

A microwave impedance microscope including a tuning fork having a high-aspect ratio etched metal tip electrode extending transversely to one tine of the fork and having a high aspect ratio to thereby reduce parasitic capacitance. The metal tip may be electrochemically etched from a wire, then bonded to the tine. The fork is slightly inclined from the surface of the sample and the tip electrode projects transversely to the fork. A microwave signal is impressed on the tip. Microwave circuitry receives microwave signals reflected from the sample back into the tip and demodulates the reflected signal according to the impressed signal. Further circuitry further demodulates the reflected signal according to the lower-frequency signal causing the fork to oscillate at its mechanically resonant frequency. A multi-wavelength matching circuit interposed between the microwave circuitry and the probe includes a coaxial cable of length half a fundamental microwave wavelength.

A probe for atomic force microscopy comprises a tip for atomic force microscopy oriented in a direction referred to as the longitudinal direction and protrudes from an edge of a substrate in the longitudinal direction, wherein the tip is arranged at one end of a shuttle attached to the substrate at least via a first and via a second structure, which structures are referred to as support structures, at least the first support structure being a flexible structure, extending in a direction referred to as the transverse direction, perpendicular to the longitudinal direction and anchored to the substrate by at least one mechanical linkage in the transverse direction, the support structures being suitable for allowing the shuttle to be displaced in the longitudinal direction. An atomic force microscope comprising at least one such probe is also provided.

A probe for atomic force microscopy comprises a tip for atomic force microscopy oriented in a longitudinal direction, wherein: the tip is arranged at one end of a sensitive part of the probe, which is movable or deformable and linked to a support structure, which is anchored to the main surface of the substrate; the sensitive portion and the support structure are planar elements, extending mainly in planes that are parallel to the main surface of the substrate; the sensitive portion is linked to the support structure via at least one element allowing the sensitive portion to be displaced or to be extended in this direction; and the tip, the sensitive part and the support structure protrude from an edge of the substrate in the longitudinal direction. An atomic force microscope comprising at least one such probe is also provided.

a scanning probe microscope for high-speed imaging and/or nanomechanical mapping. The microscope comprises a scanning probe comprising a cantilever with a tip at the distal end; and means for modulating a tip-sample distance separating the tip from an intended sample to be viewed with the microscope, the means for modulating being adapted to provide a direct cantilever actuation.

A probe microscope comprising a probe array with an array of probes, each probe comprising a cantilever and a probe tip. A lighting system comprises a plurality of light sources. Each light source is configured to output a respective light beam. A lens array comprises an array of lenses. Each source lens is positioned to receive a respective one of the light beams from the lighting system. A collector lens is configured to collect the light beams from the lens array. An objective lens is configured to receive the light beams from the collector lens and focus each light beam onto the cantilever of a respective one of the probes. The lighting system is configured to modulate a power of the light beams to actuate the probes, and the lighting system is configured to modulate the power of some or all of the light beams independently.

A probe actuation system has a detection system arranged to measure a position or angle of a probe to generate a detection signal. An illumination system is arranged to illuminate the probe. Varying the illumination of the probe causes the probe to deform which in turn causes the detection signal to vary. A probe controller is arranged to generate a desired value which varies with time. A feedback controller is arranged to vary the illumination of the probe according to the detection signal and the desired value so that the detection signal is driven towards the desired value. The probe controller receives as its inputs a detection signal and a desired value, but unlike conventional feedback systems this desired value varies with time. Such a time-varying desired value enables the probe to be driven so that it follows a trajectory with a predetermined speed. A position or angle of the probe is measured to generate the detection signal and the desired value represents a desired position or angle of the probe.