Testing devices such as integrated circuits (IC) with integrated antennas configured for millimeter wave (mmW) transmission and/or reception. A DUT may be mounted to an interface in a measurement fixture (e.g., a socket, anechoic chamber, etc.). Power and data connections of the DUT may be tested over the interface, which may also provide connections (e.g., wired) for input/output signals, power, and control and may also provide positioning. Radio frequency (RF) characteristics of the DUT may be tested over-the-air using an array of antennas or probes in the radiating Fresnel zone of the DUT's antennas. Each of the antennas or probes of the array may incorporate a power detector (e.g., a diode) so that the RF radiating pattern may be measured using DC voltage measurements. Measured voltage measurements may be compared to an ideal signature, e.g., voltage measurements expected from an ideal or model DUT.

A power detector has a signal input terminal, N limiting amplifiers, N rectifiers and a signal output terminal. N is an integer greater than 1. The signal input terminal receives an input signal, and the signal output terminal outputs a detection signal. The N limiting amplifiers generate N amplified signals according to N attenuated signals having different attenuation. Each limiting amplifier receives one of the N attenuated signals and outputs one of the N amplified signals. Each rectifier receives a corresponding amplified signal and outputs a rectified signal. The detection signal is associated with the sum of N rectified signals outputted from the N rectifiers, and all transistors of the power detector are bipolar junction transistors.

Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.

An apparatus for measuring radio frequency power is provided. The apparatus comprises at least one interface, at least two measurement paths, and a processor. In this context, at least two of the at least two measurement paths are connected to a single interface, whereas the at least two measurement paths are connected to the processor in order to provide measurement data for the processor. In addition to this, the processor is configured to select one of the at least two measurement paths for producing a measuring result on the basis of at least one environmental sensor value from at least one environmental sensor and/or on the basis of at least one user input.

Disclosed is a directional coupler having a coupler, a forward resistive attenuator, a reflected resistive attenuator, a forward compensation capacitor, and a reflected compensation capacitor. A forward coupler side arm and reflected coupler side arm of the coupler are configured to obtain a sample of forward energy and a sample of reflected energy from the coupler transmission line section. The forward resistive attenuator and reflected resistive attenuator are configured to attenuate the sample of forward energy and the sample of reflected energy. The forward compensation capacitor and the reflected compensation capacitor are configured to receive the attenuated sample of forward energy and the attenuated sample of reflected energy and produce a frequency-compensated sample of forward energy and a frequency-compensated sample of reflected energy.

An integrated circuit (IC) is provided with a plurality of diode based mm-wave peak voltage detectors (PVD)s. During a testing phase, a multi-point low frequency calibration test is performed on one or more of the PVDs to determine and store a set of alternating current (AC) coefficients. During operation of the IC, a current-voltage sweep is performed on a selected one of the PVDs to determine a process and temperature direct current (DC) coefficient. A peak voltage produced by the PVD in response to a high frequency radio frequency (RF) signal is measured to produce a first measured voltage. An approximate power of the RF signal is calculated by adjusting the first measured voltage using the DC coefficient and the AC coefficient.

An integrated circuit (IC) is provided with a plurality of diode based mm-wave peak voltage detectors (PVD)s. During a testing phase, a multi-point low frequency calibration test is performed on one or more of the PVDs to determine and store a set of alternating current (AC) coefficients. During operation of the IC, a current-voltage sweep is performed on a selected one of the PVDs to determine a process and temperature direct current (DC) coefficient. A peak voltage produced by the PVD in response to a high frequency radio frequency (RF) signal is measured to produce a first measured voltage. An approximate power of the RF signal is calculated by adjusting the first measured voltage using the DC coefficient and the AC coefficient.

Various embodiments are presented of a system and method for testing (e.g., rapidly and cheaply) devices with antennas configured for radio frequency (RF) and/or millimeter wave (mmW) transmission and/or reception. A device to be tested (e.g., the device under test (DUT)) may be mounted to an interface in a measurement fixture (e.g., a socket, anechoic chamber, etc.). Power and data connections of the DUT may be tested over the interface, which may also provide connections for input/output signals, power, and control and may also provide positioning. RF characteristics (e.g., including transmission, reception, and/or beamforming) of the DUT may be tested over-the-air using an array of antennas or probes.

Disclosed is a directional coupler having a coupler, a forward resistive attenuator, a reflected resistive attenuator, a forward compensation capacitor, and a reflected compensation capacitor. A forward coupler side arm and reflected coupler side arm of the coupler are configured to obtain a sample of forward energy and a sample of reflected energy from the coupler transmission line section. The forward resistive attenuator and reflected resistive attenuator are configured to attenuate the sample of forward energy and the sample of reflected energy. The forward compensation capacitor and the reflected compensation capacitor are configured to receive the attenuated sample of forward energy and the attenuated sample of reflected energy and produce a frequency-compensated sample of forward energy and a frequency-compensated sample of reflected energy.

A power detector has a signal input terminal, N limiting amplifiers, N rectifiers and a signal output terminal. N is an integer greater than 1. The signal input terminal receives an input signal, and the signal output terminal outputs a detection signal. The N limiting amplifiers generate N amplified signals according to N attenuated signals having different attenuation. Each limiting amplifier receives one of the N attenuated signals and outputs one of the N amplified signals. Each rectifier receives a corresponding amplified signal and outputs a rectified signal. The detection signal is associated with the sum of N rectified signals outputted from the N rectifiers, and all transistors of the power detector are bipolar junction transistors.