Methods and systems for RF pulse monitoring and RF pulsing parameter optimization at a manufacturing system are provided. A radio frequency (RF) signal is pulsed within a processing chamber in accordance with a set of process parameters. Sensor data is received from one or more sensors that indicates a RF pulse waveform detected within the processing chamber. One or more RF signal characteristics are identified in the detected RF pulse waveform. Each identified RF signal characteristic corresponds to at least one RF signal pulse of the RF signal pulsing within the processing chamber. A determination is made, based on the identified one or more RF signal characteristics, whether the detected RF pulse waveform corresponds to the target RF pulse waveform. An indication of whether the detected RF pulse waveform corresponds to the target RF pulse waveform is provided to a client device.

A device may include a receive antenna input to couple a receive antenna to a receive chain of the device. The device may include a test signal generator to generate a test signal. The device may include a signal coupler between the receive antenna input and the receive chain. The signal coupler may include a first port to inject the first test signal into the receive antenna via the receive antenna input. The device may include a control circuit to monitor an impedance matching of the receive antenna based on one or more characteristics of a reflected signal resulting from the first test signal being injected into the receive antenna. The one or more characteristics of the reflected signal may be dependent on the impedance matching of the receive antenna.

A method for determining electric voltage u(t) and/or electric current i(t) of an RF signal in the time domain in a calibration plane, wherein by at least one directional coupler having two outputs and one signal input a first component of a first RF signal that runs from the signal input in the direction of the calibration plane, and a second component of a second RF signal that runs from the calibration plane in the direction of the signal input is decoupled. For a two-port error of the directional coupler, the error terms e.sub.00, e.sub.01, e.sub.10 and e.sub.11, are determined as a function of a frequency f and the signal values v.sub.1(t) and v.sub.2(t) are transformed into the frequency domain as wave quantities V.sub.1(f) and V.sub.2(f), and absolute wave quantities a.sub.1 and b.sub.1 in the frequency domain in the calibration plane are calculated from the wave quantities V.sub.1(f) and V.sub.2(f) by the error terms e.sub.00, e.sub.01, e.sub.10 and e.sub.11.

A method for determining electric voltage u(t) and/or electric current i(t) of an RF signal in the time domain in a calibration plane, wherein by at least one directional coupler having two outputs and one signal input a first component of a first RF signal that runs from the signal input in the direction of the calibration plane, and a second component of a second RF signal that runs from the calibration plane in the direction of the signal input is decoupled. For a two-port error of the directional coupler, the error terms e.sub.00, e.sub.01, e.sub.10 and e.sub.11, are determined as a function of a frequency f and the signal values v.sub.1(t) and v.sub.2(t) are transformed into the frequency domain as wave quantities V.sub.1(f) and V.sub.2(f), and absolute wave quantities a.sub.1 and b.sub.1 in the frequency domain in the calibration plane are calculated from the wave quantities V.sub.1(f) and V.sub.2(f) by the error terms e.sub.00, e.sub.01, e.sub.10 and e.sub.11.

A measuring bridge (1) provides a first matching pad (2), a second matching pad (3) and a third matching pad (4), wherein all matching pads (2, 3, 4) comprise at least three resistors (2.sub.1, 2.sub.2, 2.sub.3, 3.sub.1, 3.sub.2, 3.sub.3, 4.sub.1, 4.sub.2, 4.sub.3) which are arranged in a T-structure. A second resistor (3.sub.2) of the second matching pad (3) is connected to a second resistor (2.sub.2) of the first matching pad (2), and a third resistor (4.sub.3) of the third matching pad (4) is connected to a third resistor (2.sub.3) of the first matching pad (2). A second resistor (4.sub.2) of the third matching pad (4) can be connected to a device under test (7). A third resistor (3.sub.3) of the second matching pad (3) can be connected to a calibration standard (5), and a first resistor (3.sub.1, 4.sub.1) of the second and the third matching pad (3, 4) are connected in each case to a signal input of an element (11) which suppresses a common-mode component on its two signal inputs.

A measuring bridge (1) provides a first matching pad (2), a second matching pad (3) and a third matching pad (4), wherein all matching pads (2, 3, 4) comprise at least three resistors (2.sub.1, 2.sub.2, 2.sub.3, 3.sub.1, 3.sub.2, 3.sub.3, 4.sub.1, 4.sub.2, 4.sub.3) which are arranged in a T-structure. A second resistor (3.sub.2) of the second matching pad (3) is connected to a second resistor (2.sub.2) of the first matching pad (2), and a third resistor (4.sub.3) of the third matching pad (4) is connected to a third resistor (2.sub.3) of the first matching pad (2). A second resistor (4.sub.2) of the third matching pad (4) can be connected to a device under test (7). A third resistor (3.sub.3) of the second matching pad (3) can be connected to a calibration standard (5), and a first resistor (3.sub.1, 4.sub.1) of the second and the third matching pad (3, 4) are connected in each case to a signal input of an element (11) which suppresses a common-mode component on its two signal inputs.

A measurement accessory device connectable to a measurement apparatus or to a device under test wherein the measurement accessory device comprises means for providing characteristic data of said measurement accessory device in machine readable form used by said measurement apparatus during measurement of said device under test.

A sensor device according to an embodiment of the present technology includes a sensor head and a measurement unit. The sensor head includes a first probe and a second probe, the first probe including a first antenna section used for transmission, the second probe including a second antenna section used for reception, the second probe being situated at a specified distance from the first probe and facing the first probe. The measurement unit includes a signal generator that generates a measurement signal that includes information regarding characteristics of a propagation of an electromagnetic wave in a medium between the first and second antenna sections.

Load pull measurement arrangement having an active tuner with a signal generator providing a signal at a first frequency to a vector modulator. The vector modulator has an input for receiving control signals and is arranged to provide an injection signal at the first frequency based on the control signals. The active tuner further has a frequency multiplier receiving the injection signal and outputting a multiplied injection signal having a second frequency, the second frequency being an integer multiple of the first frequency. Furthermore, a millimeter wave extender has a frequency multiplier in the signal injection path connected to the device under test during operation.

Load pull measurement arrangement having an active tuner with a signal generator providing a signal at a first frequency to a vector modulator. The vector modulator has an input for receiving control signals and is arranged to provide an injection signal at the first frequency based on the control signals. The active tuner further has a frequency multiplier receiving the injection signal and outputting a multiplied injection signal having a second frequency, the second frequency being an integer multiple of the first frequency. Furthermore, a millimeter wave extender has a frequency multiplier in the signal injection path connected to the device under test during operation.