An ion detector for secondary ion mass spectrometer, the detector having an electron emission plate coupled to a first electrical potential and configured to emit electrons upon incidence on ions; a scintillator coupled to a second electrical potential, different from the first electrical potential, the scintillator having a front side facing the electron emission plate and a backside, the scintillator configured to emit photons from the backside upon incidence of electrons on the front side; a lightguide coupled to the backside of the scintillator and confining flow of photons emitted from the backside of the scintillator; and a solid-state photomultiplier coupled to the light guide and having an output configured to output electrical signal corresponding to incidence of photons from the lightguide. A SIMS system includes a plurality of such detectors movable arranged over the focal plane of a mass analyzer.

This dosimeter comprises: a transducer material capable, when it is excited by a secondary ionizing radiation, of generating photons or electric charges, an amplifying layer capable, in response to its excitation by the primary ionizing radiation, of generating the secondary ionizing radiation. This amplifying layer comprises a first and a second amplifying sublayer stacked on top of one another. The first and the second amplifying sublayers are composed of at least 70%, by weight, respectively, of at least one first and one second material, the atomic numbers of which are greater than or equal to 29. The atomic number of the first material being less than the atomic number of the second material. The first sublayer is interposed between the second sublayer and the transducer material.

This dosimeter comprises: a transducer material capable, when it is excited by a secondary ionizing radiation, of generating photons or electric charges, an amplifying layer capable, in response to its excitation by the primary ionizing radiation, of generating the secondary ionizing radiation. This amplifying layer comprises a first and a second amplifying sublayer stacked on top of one another. The first and the second amplifying sublayers are composed of at least 70%, by weight, respectively, of at least one first and one second material, the atomic numbers of which are greater than or equal to 29. The atomic number of the first material being less than the atomic number of the second material. The first sublayer is interposed between the second sublayer and the transducer material.

The present invention relates to a chip counter, which transmits an X-ray beam through a tape reel around which a tape having a plurality of semiconductor chips mounted in a row therein is wound, acquires an image scattered or diffracted by the semiconductor chips, and processes the acquired image, so as to count the number of the semiconductor chips, wherein: the X-ray beam transmitted through the tape reel (1) is sensed by a fluorescent intensifying screen (60); a fluorescent light emitted from the fluorescent intensifying screen (60) according to the sensing of the X-ray beam is captured by a camera (70), so that the number of the semiconductor chips is counted from an image in which the semiconductor chips are displayed by a dotted image; and the camera (70) is protected by an X-ray beam shielding member (100: 110; 120; and 130).

The present invention relates to a chip counter, which transmits an X-ray beam through a tape reel around which a tape having a plurality of semiconductor chips mounted in a row therein is wound, acquires an image scattered or diffracted by the semiconductor chips, and processes the acquired image, so as to count the number of the semiconductor chips, wherein: the X-ray beam transmitted through the tape reel (1) is sensed by a fluorescent intensifying screen (60); a fluorescent light emitted from the fluorescent intensifying screen (60) according to the sensing of the X-ray beam is captured by a camera (70), so that the number of the semiconductor chips is counted from an image in which the semiconductor chips are displayed by a dotted image; and the camera (70) is protected by an X-ray beam shielding member (100: 110; 120; and 130).

The present invention implements an ion detector with which it is possible to avoid direct collisions of negative ions with a scintillator, prevent degradation of the scintillator, prolong life of the scintillator, reduce the need for maintenance, and perform highly sensitive detection of both positive and negative ions. With respect to a reference line 65 connecting a central point 63 of a positive ion CD 52 and a central point 64 of a counter electrode 54, a central point 66 of a negative ion CD 53 is provided in a region of a side opposite to a region of a side of a central point 67 of a scintillator 56. Positive ions entering from an ion entrance 62 receive a deflection force and collide with the positive ion CD 52 to generate secondary electrons. The generated secondary electrons collide with the scintillator 56 to generate light. The generated light passes through a light guide 59 and is detected by a photomultiplier tube 58. A negative potential barrier is generated along the reference line 65. Negative ions entering form the ion entrance 62 are attracted to and collide with the negative ion CD 53 to generate positive ions. The generated positive ions collide with the positive ion CD 52 to generate secondary electrons. The generated secondary electrons collide with the scintillator 56 and are detected by the photomultiplier tube 58.

The present invention implements an ion detector with which it is possible to avoid direct collisions of negative ions with a scintillator, prevent degradation of the scintillator, prolong life of the scintillator, reduce the need for maintenance, and perform highly sensitive detection of both positive and negative ions. With respect to a reference line 65 connecting a central point 63 of a positive ion CD 52 and a central point 64 of a counter electrode 54, a central point 66 of a negative ion CD 53 is provided in a region of a side opposite to a region of a side of a central point 67 of a scintillator 56. Positive ions entering from an ion entrance 62 receive a deflection force and collide with the positive ion CD 52 to generate secondary electrons. The generated secondary electrons collide with the scintillator 56 to generate light. The generated light passes through a light guide 59 and is detected by a photomultiplier tube 58. A negative potential barrier is generated along the reference line 65. Negative ions entering form the ion entrance 62 are attracted to and collide with the negative ion CD 53 to generate positive ions. The generated positive ions collide with the positive ion CD 52 to generate secondary electrons. The generated secondary electrons collide with the scintillator 56 and are detected by the photomultiplier tube 58.

A radiation detector can include a logic element configured to determine an adjusted value for light emission of a luminescent material. A method of using the radiation detector can include determining an adjusted value of a luminescent material. The adjustment can be based on an inverse correlation between decay times corresponding to signal pulses and values of light emissions corresponding to the signal pulses. In an embodiment, the logic element may be further configured to obtain a measured value of a decay time and a measured value for the light emission, and determining an adjusted value for the light emission can be based on the measured value of the decay time and measured value for the light emission.

A radiation detector can include a logic element configured to determine an adjusted value for light emission of a luminescent material. A method of using the radiation detector can include determining an adjusted value of a luminescent material. The adjustment can be based on an inverse correlation between decay times corresponding to signal pulses and values of light emissions corresponding to the signal pulses. In an embodiment, the logic element may be further configured to obtain a measured value of a decay time and a measured value for the light emission, and determining an adjusted value for the light emission can be based on the measured value of the decay time and measured value for the light emission.

A radiation detector according to an embodiment includes a photodiode array and a scintillator array. The photodiode array has a plurality of active areas arranged in a grid formation. The scintillator array is laminated on the photodiode array, is configured to emit light in response to incidence of radiation thereto, and has a plurality of modification parts that do not penetrate therethrough, in regions each corresponding to a position between two of the active areas, for a purpose of preventing crosstalk.