A lidar system includes one or more light sources configured to generate a first beam of light and a second beam of light, a scanner configured to scan the first and second beams of light across a field of regard of the lidar system, and a receiver configured to detect the first beam of light and the second beam of light scattered by one or more remote targets. The scanner includes a rotatable polygon mirror that includes multiple reflective surfaces angularly offset from one another along a periphery of the polygon mirror, the reflective surfaces configured to reflect the first and second beams of light to produce a series of scan lines as the polygon mirror rotates. The scanner also includes a pivotable scan mirror configured to (i) reflect the first and second beams of light and (ii) pivot to distribute the scan lines across the field of regard.

Implementations described and claimed herein provide a mechanically-scanning 3-dimensional light detection and ranging (3D LiDAR) system including a galvo mirror assembly, wherein the galvo mirror assembly includes a mirror attached to an armature of a galvanometer to reflect a light signal generated by a light generator and received from a target, at least one permanent magnet, and at least one coil configured to carry a current to move the armature.

Implementations described and claimed herein provide a mechanically-scanning 3-dimensional light detection and ranging (3D LiDAR) system including a galvo mirror assembly, wherein the galvo mirror assembly includes a mirror attached to an armature of a galvanometer to reflect a light signal generated by a light generator and received from a target, at least one permanent magnet, and at least one coil configured to carry a current to move the armature.

The present disclosure provides improved optical systems for particle processing (e.g., cytometry including microfluidic based sorters, drop sorters, and/or cell purification) systems and methods. More particularly, the present disclosure provides advantageous micro-lens array optical detection assemblies for particle (e.g., cells, microscopic particles, etc.) processing systems and methods (e.g., for analyzing, sorting, processing, purifying, measuring, isolating, detecting, monitoring and/or enriching particles).

A facet assembly is a constituent part of a facet mirror for an illumination optical unit for projection lithography. The facet assembly has a facet with a reflection surface for reflecting illumination light. A facet main body of the facet assembly has at least one hollow chamber. A reflection surface chamber wall of the hollow chamber forms at least one portion of the reflection surface. An actuator control apparatus of the facet assembly is operatively connected to the hollow chamber for the controlled deformation of the reflection surface chamber wall. The result is a facet assembly that is usable flexibly as a constituent part of a facet mirror equipped therewith within an illumination optical unit for projection lithography.

A facet assembly is a constituent part of a facet mirror for an illumination optical unit for projection lithography. The facet assembly has a facet with a reflection surface for reflecting illumination light. A facet main body of the facet assembly has at least one hollow chamber. A reflection surface chamber wall of the hollow chamber forms at least one portion of the reflection surface. An actuator control apparatus of the facet assembly is operatively connected to the hollow chamber for the controlled deformation of the reflection surface chamber wall. The result is a facet assembly that is usable flexibly as a constituent part of a facet mirror equipped therewith within an illumination optical unit for projection lithography.

A micromirror array is a constituent part of an illumination-optical component of a projection exposure apparatus for projection lithography. A multiplicity of micromirrors are in groups in a plurality of mirror modules, each of which has a rectangular module border. The mirror modules are in module columns. At least some of the module columns are displaced with respect to one another along a column boundary line so that at least some of the mirror modules adjacent to one another over the boundary line are arranged displaced with respect to one another. Their module border sides running transversely to the boundary line are not aligned flush with one another. This micromirror array can have a relatively standardized production and can have a relatively small reflection folding angle on the object if the micromirror array represents a final illumination-optical component upstream of a reflective object to be illuminated.

The disclosure relates to an optical security feature that is based on a single axis alignment of mirrors or facets in a structured surface that forms a micro mirror array. In an aspect, a device is described that includes a reflecting structure on a first layer, where the reflecting structure has a top surface with multiple embossed facets arranged in a spatial orientation that produces a flat ring optical effect upon incidence of light. In another aspect, a method for making the device is described that provides a reflecting layer and produces the reflecting structure on the reflecting layer with multiple facets arranged in the spatial orientation to produce the flat ring optical effect. In yet another aspect, an apparatus for making the device is described that includes a pressing device and a stamping device to transfer a pattern of the reflecting structure to a reflecting material.

The disclosure relates to an optical security feature that is based on a single axis alignment of mirrors or facets in a structured surface that forms a micro mirror array. In an aspect, a device is described that includes a reflecting structure on a first layer, where the reflecting structure has a top surface with multiple embossed facets arranged in a spatial orientation that produces a flat ring optical effect upon incidence of light. In another aspect, a method for making the device is described that provides a reflecting layer and produces the reflecting structure on the reflecting layer with multiple facets arranged in the spatial orientation to produce the flat ring optical effect. In yet another aspect, an apparatus for making the device is described that includes a pressing device and a stamping device to transfer a pattern of the reflecting structure to a reflecting material.

A device for day lighting the interior of structure deploys reflective louvers that are spaced apart in stacks. The louvers include a coating or multilayer structure that is operative to reflect visible light but transmit IR light through the louver. The louvers also have a retro-reflective structure to return the IR light by reverse reflection in the opposite direction of the incident light, which is back toward the sun. The interior of the structure is more uniformly illuminated with visible light while the louvers and interior are not heated by IR light or radiation from the sun.