G02B5/1876

SYSTEM FOR ACTINIC INSPECTION OF SEMICONDUCTOR MASKS
20170221194 · 2017-08-03 ·

An apparatus and method are disclosed for actinic inspection of semiconductor masks intended for extended ultraviolet (EUV) lithography, or similar objects, with feature sizes less than 100 nm. The approach uses a coherent light source with wavelength less than 120 nm. Inside a vacuum system, an optical system directs the light to an object, i.e., the mask or mask blank, and directs the resulting reflected or transmitted light to an imaging sensor. A computational system processes the imaging sensor data to generate phase and amplitude images of the object. The preferred imaging modality, a form of digital holography, produces images of buried structures and phase objects, as well as amplitude or reflectance images, with nanometer resolution less than or equal to the feature size of the mask.

Color separation in planar waveguides using an optical filter between two diffractive optical elements (DOE)

An eyepiece for projecting an image to an eye of a viewer includes a first planar waveguide positioned in a first lateral plane, a second planar waveguide positioned in a second lateral plane adjacent the first lateral plane, and a third planar waveguide positioned in a third lateral plane adjacent the second lateral plane. The first planar waveguide includes a first diffractive optical element (DOE) coupled thereto and disposed at a first lateral position. The second planar waveguide includes a second DOE coupled thereto and disposed at a second lateral position. The third planar waveguide includes a third DOE coupled thereto and disposed at the second lateral position. The eyepiece further includes an optical filter positioned between the second planar waveguide and the third planar waveguide at the second lateral position.

DISTANCE MEASURING APPARATUS, IMAGING DEVICE, DISTANCE MEASURING SYSTEM, DISTANCE MEASURING METHOD, AND IMAGING METHOD
20220043265 · 2022-02-10 ·

An interframe difference processor 206 generates a difference image between frames of a sensor image, and an image processor 208 generates distance information indicating a distance to a photographic subject on the basis of calculation of a difference image and a developing pattern 1101. Thus, since a video display apparatus 101 generates the difference image between the frames of the sensor image, it is possible to realize a distance measuring apparatus capable of reducing an influence of a background and generating distance information with high accuracy.

COLOR CMOS IMAGE SENSOR WITH DIFFRACTIVE MICROLENSES OVER SUBPIXEL PHOTODIODE ARRAYS ADAPTED FOR AUTOFOCUS
20220239840 · 2022-07-28 ·

An image sensor has diffractive microlenses over pixels with central structures and ring(s) of material having index of refraction different from that of background material. Disposed beneath the diffractive microlenses are photodiodes that permit determining ratios of illumination of peripheral photodiodes to illumination of central photodiodes of the pixels, and, in embodiments, circuitry for determining said ratio. In embodiments, the ratio is used to find illumination wavelengths; and in other embodiments the ratio is used to determine focus of an imaging lens providing illumination. A method determines color by passing light through a diffractive lens disposed above photodiodes of the diffractive pixel and determining color from illumination peripheral and central photodiodes. An autofocus method of determining focus includes passing light through a diffractive lens and determining focus from illumination of peripheral photodiodes and central photodiodes of the pixel. In embodiments, the central structures are disks and rings are round.

Head-up display
11397324 · 2022-07-26 · ·

There is provided a head-up display for a vehicle. The head-up display has a first housing and a second housing. The first housing comprises a picture generating unit and optical system. The second housing comprises a substantially flat cover glass and a layer. The picture generating unit is arranged to output pictures. The picture generating unit comprises a light source and a spatial light modulator. The light source is arranged to emit light. The spatial light modulator is arranged to receive the light from the light source and spatially-modulate the light in accordance with computer-generated light-modulation patterns displayed on the spatial light modulator to form a holographic reconstruction corresponding to each picture. The optical system is arranged to receive the pictures output by the picture generating unit and relay the pictures using an optical combiner to form a virtual image of each picture. The optical combiner combines light output by the picture generating unit with light from a real-world scene to present combined images to a viewer within an eye-box. The second housing is disposed between the first housing and optical combiner. The substantially flat cover glass is arranged to protect the first housing. The layer is arranged to change the trajectory of light such that any sunlight reflected by the cover glass is deflected away from the eye-box.

MULTILAYER METALENS
20220229207 · 2022-07-21 ·

A multilayer metalens includes a substrate having first, second, and third axes that are perpendicular to each other. A first layer of antennas is arranged, relative to the third axis, on the substrate. Each antenna of the first layer of antennas is rotated relative to the first and second axes based on a position of each antenna of the first layer of antennas along the first and second axes. A second layer of antennas is arranged, in the third axis, on the first layer of antennas. Each antenna of the second layer of antennas is rotated relative to the first and second axes based on a position of each antenna of the second layer of antennas along the first and second axes. Each antenna in the first and second layers of antennas has, in a plane parallel to a top of the substrate an elongated shape. Each antenna in the first layer of antennas has a different rotation relative to the first and second axes than an antenna in the second layer of antennas that is located, relative to the third axis, adjacent to the respective antenna in the first layer of antennas.

Tunable Fresnel lens with improved image quality

Optical apparatus includes a Fresnel lens (40), including an array of refractive bands (37) bordered by abrupt phase steps (39) of a height selected so as to focus light in different, first and second wavelength ranges from an object plane (35) toward an image plane (36) with a modulation transfer function (MTF) in excess of a predefined threshold, while focusing light in a third wavelength range, intermediate the first and second wavelength ranges, with MTF less than the predefined threshold. A display (32) is configured to generate, at the object plane of the Fresnel lens, an image including first and second pixel colors within the first and second wavelength ranges, respectively.

Liquid crystal display panel, driving method therefor, and display device
11204527 · 2021-12-21 · ·

The present disclosure relates to the field of display technologies, and specifically discloses a liquid crystal display panel, a driving method therefor and a display device. Specifically, the liquid crystal display panel comprises: a first substrate and a second substrate arranged oppositely, as well as a plurality of liquid crystal diffraction units arranged in a same layer between the first substrate and the second substrate. Each liquid crystal diffraction unit comprises: a first electrode, a second electrode comprising at least one strip sub-electrode, as well as liquid crystal sandwiched between the first electrode and the second electrode. Furthermore, each liquid crystal diffraction unit is configured to change a deflection direction of light passing through each liquid crystal diffraction unit when voltages are applied to the first electrode and the strip sub-electrodes.

Ultralight very large aperture space telescope and methods using mode lenses and shims

A kinematically engaged yoke system (KEYS) for multiple-order-diffraction engineered material may comprise a harness comprising a frame and a plurality of semi-kinematic keys disposed on the frame, wherein the semi-kinematic keys are configured based on a MOD-side mechanical profile of a plurality of segments of a multiple-order-diffraction engineered material, and wherein the MOD-side mechanical profile, when engaged with the semi-kinematic keys, functions as a fiducial that provides alignment between neighboring segments; and one or more shims disposed between one or more pairs of neighboring segments of the plurality of segments of the multiple-order-diffraction engineered material, wherein the one or more shims facilitate alignment of the one or more pairs of neighboring segments of the plurality of segments based on a translation across one or more surfaces of the one or more shims.

Light emitting device

A light emitting device includes a substrate, a demarcating member and a light-diffusing plate. The substrate has a plurality of light sources. The demarcating member includes a plurality of wall parts defining a plurality of compartments respectively corresponding to the light sources with each of the light sources being surrounded by corresponding ones of the wall parts defining a single compartment. Each of the wall parts include a ridge part and an inclined surface part. The light-diffusing plate is disposed above the light sources and having a plurality of first protrusions disposed on a first surface of the light-diffusing plate facing the substrate. Each of the first protrusions overlaps the inclined surface part of each of corresponding ones of the wall parts in a plan view. Each of the first protrusions surrounds a corresponding one of the light sources in the plan view.