A device includes several distinct laser sources each emitting an individual laser beam, a dispersive element, and a set of deflecting mirrors which, for each laser source, include a deflecting mirror associated to the source, the mirror reflecting the light beam emitted by the source towards the dispersive element, the mirror being positioned and oriented such that, after deflection by the dispersive element, the light beam is substantially centered on a common propagation axis, which is the same for the different light beams, the mirrors being integral with each other.

The invention relates to an arrangement for actuating an element in an optical system, in particular an optical system of a projection exposure apparatus, wherein the optical element is tiltable about at least one tilting axis via at least one joint having a joint stiffness, comprising at least one actuator for exerting a force on the optical element, wherein the actuator has an actuator stiffness which at least partly compensates for the joint stiffness.

The disclosure relates to a cooler for use in a device in a vacuum, wherein the partial pressure of the cooling medium in the vacuum environment during the operation of the cooler is less than 10.sup.3 mbar. The cooler includes a heat sink, wherein a cavity through which the cooling medium flows is formed in the heat sink, and wherein the heat sink includes a connection element which surrounds one end of the cavity through which the cooling medium flows. The cooler also includes a connecting piece for joining a coolant line to the cavity. The connecting piece includes a jacket secured on the connection element by a thermal connecting process. An intermediate layer is between the jacket and the connection element. The jacket exerts a force in the direction of the connection element so that the intermediate layer is under compressive stress in the radial direction during operation of the cooler.

An electro-optic device includes a chip provided with a mirror and a drive element adapted to drive the mirror, a light-transmitting cover adapted to cover the mirror in a planar view, and a spacer having contact with one surface of the chip between the cover and the chip. The entire part of one surface of the chip having contact with the spacer is made of a first material such as silicon oxide film having first thermal conductivity, and the spacer is made of a second material such as a quartz crystal having second thermal conductivity higher than the first thermal conductivity. The cover is made of a third material such as sapphire having third thermal conductivity higher than the second thermal conductivity.

An exemplary support structure for a planar faceplate includes ribs extending substantially perpendicular to a bottom surface of the planar faceplate. Spaced apart projections extend from the ribs towards the bottom surface of the planar faceplate and have distal ends that engage and are secured to the bottom surface. Each distal end defines an area with a numerical value that is less than the thickness of the planar faceplate measured in the same measurement units as the area to limit any stress formations induced in the planar faceplate due to thermal changes from reaching a top surface of the planar faceplate. Alternatively, the projections may be spaced apart mesas extending outward from a rigid material.

A connection arrangement for connecting an optical component of an optical imaging arrangement to a support unit of a support structure includes: a connecting element unit having a support interface end with support interface section; and a component interface end with a component interface section.

A dynamic focus and zoom system with three MEMS mirrors, three prisms, three beam splitters, three fixed lenses and an optical relay, all within a housing. The second prism, first and second fixed lenses, and first beam splitter are aligned linearly along a longitudinal axis of the optical relay. The first and second MEMS mirrors are linearly aligned with one another at a ninety-degree angle to such longitudinal axis. The third MEMS mirror, third fixed lens, third wave plate, third beam splitter and third prism are linearly aligned with one another at a ninety-degree angle to the same longitudinal axis. The third prism abuts up against the center of the optical relay between the first and second fixed lenses and is linearly aligned with the first prism such that the linear alignment of the first and third prisms is parallel to the longitudinal axis of the optical relay.

An actuator-sensor system for controlled diverting or deflecting of electromagnetic radiation in at least one axis (9), with an actuator (5) for mechanically moving a deflecting element (10) and with a measuring element (2) for sensing the position of the deflecting element (10), where the measuring element (2) includes a flat substrate (3) having at least one sensor element (4). Furthermore, the present disclosure relates to a fast steering mirror (FSM).

The invention relates to arrangements for actuating an element in a microlithographic projection exposure apparatus. In accordance with one aspect, an arrangement for actuating an element in a microlithographic projection exposure apparatus comprises a first number (n.sub.R) of degrees of freedom, wherein an adjustable force can be transmitted to the optical element in each of the degrees of freedom, and a second number (n.sub.A) of actuators, which are coupled to the optical element in each case via a mechanical coupling for the purpose of transmitting force to the optical element, wherein the second number (n.sub.A) is greater than the first number (n.sub.R). In accordance with one aspect, at least one of the actuators is arranged in a node of at least one natural vibration mode of the optical element.

A temperature compensated spacer includes first and second anchoring configurations for anchoring the spacer relative to first and second elements, and a frame providing a mechanical connection between the anchoring configurations. The frame has a polygonal opening with a first diagonal extending across the width of a gap between the elements and a second diagonal extending transversely to the first diagonal. A crossbar is associated with the polygonal opening so as to span the second diagonal. The frame and the crossbar are formed from materials having differing coefficients of thermal expansion. The crossbar is deployed so as to determine a length of the second diagonal such that variation in temperature causes deformation of the frame, thereby varying a length of the first diagonal.